45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

VCL

36 67.5 1/4 31 8.5 12.5 M4 27 18 12.8 6 22 62 44 53 99 53 66 86 22 40 81.5 1/4, 3/8 11 15 36.5 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 86 30 50 1/2 15 13.5 36.5 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 17 41 11 M5 36 22.5 23 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 M5 36 25 23 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 17.5 17 41 36 30

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

CV/MVGQ

[129] 129 [130] 116 [117] 117 [118] 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 10 16 84 72 60 52.5 M8 x 1 9.5 12.5 M4 x 0.7 34.5 28 8 4 14 12 15 0 0.022 8 85 73 61 52.5 M10 x 1 9.5 12.5 M5 x 0.8 40.5 28 8 5 20 18 15 0 0.022 10 Single Acting, Spring Return/Axial Foot Style (L) CVJ3L S Bore size Stroke 48 [49] 28 [34.5] M5 x 0.8 M5 x 0.8 Manual override Width across flats B1 Rod End Nut

SMC Pneumatic Clean Series

C D E GA GB H H1 J K KA MM N P M S ZZ A Up to 1000 30 27 60 22 44 16 32 33 15 51 8 M8 x 1.25 M14 x 1.5 6 14 11 1/4 27 102 164 40 Up to 1000 35 32 70 27 52 20 40 35 17 58 11 M8 x 1.25 M18 x 1.5 7 18 11 3/8 30 108 177 50 Up to 1000 35 32 85 27 64 20 40 35 17 58 11 M10 x 1.25 M18 x 1.5 7 18 14 3/8 31 116 188 63 Axial Foot Style (L) / CA2L, CA2L 10112122Relief port M5 x 0.8 2-cushion valve H

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

114 186 340 405 485 660 870 20 40 60 30 60 10 40 60 L1 16 40 L2 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D 146 98 158 178 116 226 138 238 278 166 1010 1175 1645 1840 1850 80 40 80 100 50 60 20 40 60 MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 25 198 216 150 198 242 298 336 220 318 402 2720 2935 3070 3985 4820 100 120 70 120 160 188 246 286 40 30 32 20

Fieldbus System

C3: 3.2 (SMC) C4: 4 (SMC) C6: 6 (SMC) N1: 1/8" (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) M5: M5 thread n: Stations (Maximum 24 stations) n L L1 L2 L3 L4 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 223.5 234 244.5 255 265.5 276 286.5 297 104.2 114.7 125.2 135.7 146.2 156.7 167.2 177.7 188.2 198.7 209.2

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

PSE54R04 R06 ZSE ISE ZSP PS B 10 10 A ISA B PSE With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 IS A ISG (mm) (mm) PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 ZSM A A 11.5 10.8 6 4 B 3.5 3 B 20 18 Common Dimensions PSE54-IM5 18 3000 13 9.6 8.7 9 4 M5 x 0.8 PSE5401 N01 PSE54-IM5H 8.7 13 14.4 10 3.4 01: R1/8 N01: NPT1/8 3 8 With across flats 12 M5 x 0.8 7 M5 x 0.8 833 Low Differential Pressure Sensor

Compact Cylinder/Guide Rod Type Series CQM

32 40 50 63 80 100 6 8.5 11.5 14.5 18 24 9 13 11 13 17 21 D-P4DWL type is compatible with bore sizes 40 to 100.

Slide Unit Series CX2/CXWM/CXWL

x 0.8 Hexagon socket head cap plug 2 x 2 x 4.3 through (5H7 hole pitch) 2 x 5H7 depth 6 +0.012 0 4 x M5 x 0.8 thread depth 10 2 x M5 x 0.8 Cylinder port 2 x M8 x 1.0 Adjusting bolt 3 x M5 x 0.8 thread depth 10 4 x 4.2 through Shock absorber Max.

Slide Unit Series CX2/CXWM/CXWL

x 0.8 Hexagon socket head cap plug 2 x 2 x 4.3 through (5H7 hole pitch) 2 x 5H7 depth 6 +0.012 0 4 x M5 x 0.8 thread depth 10 2 x M5 x 0.8 Cylinder port 2 x M8 x 1.0 Adjusting bolt 3 x M5 x 0.8 thread depth 10 4 x 4.2 through Shock absorber Max.

VEX1

Description VEX312-01 02 VEX322-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX370-10 12 VEX390-14 20 Air operated Bracket (With bolt and washer) Foot (With bolt and washer) B VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A F VEX1-18-2A VEX3-32-2A Pilot exhaust port P2 silencer Note) N AN120-M5 AN210-02 Note) Only with solenoid.

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Round head combination screw Standard model + 14.5 Individual exhaust port Rc 1/8 13-4-18 18 Series ZM Made to Order Specifications: Please consult with SMC for detailed specifications, dimensions, and delivery. 3.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

32.5 26 44 43 17.2 8 22.5 M5 x 0.8 Rc, NPT, G1/8 Rc, NPT, G1/4 Rc, NPT, G3/8 6.0 150 62 47 9.0 10 30 138 6.0 47.5 40 64 65 24.0 10 32.0 8.5 240 92 66 14.0 14 40 223 7.5 80.0 60 112 94 37.0 15 46.0 10.0 320 136 99 20.0 16 64 300 10.0 110.0 84 162 139 58.0 29 70.0 8-14-18 18 Mechanically Jointed Rodless Cylinder Series MY3A/3B Basic Type: 16, 25, 40, 63 MY3B Bore size Stroke G G NG NG MX 2

Escapements Series MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 185 155 125 MIS12-30 MIS12-20 18 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

/

Q R R 53.5 56.5 56.5 59 59 R 69.5 72.5 72.5 75 75 M 12.8 19 23 19 23 Q 42 52 55 58 61 S Q 41 51 54 57 60 S K 6 8 8 8 8 J M4 M5 M5 M5 M5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 46 56 59 62 65 30 40 45 50 45 50 18 22 30 22 30 68 78 85 85.5 92 9 10.5 14 10.5 14 19.5 27 30 33 33 36 36 48.5 51.5 51.5 54 54 41 51 54 57 60 65.5 68.5 68.5 71

KC

(mm) <M5> <M5> Weight (g) Applicable tubing KCH04-M5 KCH04-01S KCH06-M5 KCH06-01S KCH06-02S KCH08-01S KCH08-02S KCH08-03S KCH10-02S KCH10-03S KCH12-03S KCH12-04S 2.1 2.6 2.4 M5 x 0.8 9.8 30.8 26.1 32.4 37.4 28.9 42.4 45.7 34 50.5 51.5 54.2 41.6 27.3 22.1 28.9 33.4 22.9 38.4 39.7 27.5 44.5 45 47.7 33.6 18 2.1 2.6 2.4 4 8 1 8 10 11.8 12 14 M5 x 0.8 10 16 14 20 27 25 34 43 48 41 Reference dimensions

Process Pump

(19.05) (15.85) FLUID OUT 3/4" tube extension Straight part 40 82 110 166 195 51 157 18 FLUID IN 3/4" tube extension AIR EXH Rc, NPT, G 1/4" Silencer: AN20-02 (Option) 613 PAF Series Dimensions: Automatically Operated Type (PAF5000 Series) With nut (with LQ1 fittings): PAF5410S-1S19 1S25 204 10 255 120 4 x 9 Reset button Air operated reset port Rc, NPT, G 1/8" 10 AIR SUP Rc, NPT, G 1/4"