High Vacuum Angle Valve, XL Series Through the movement of piston S (11), the valve S (18) is removed from the valve S seal assembly [1]-(14), and initial exhaust takes place through the passage S(17).
(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up
How to Order Manifold Assemblies (Example) Double solenoid (24VDC) SY3260-5G-C6 (2 sets) Cylinder port size M5: M5 x 0.8 Example Single solenoid (24VDC) SY3160-5G-M5 (2 sets) Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) SS5Y3-60-04U R D side Port R C8: With 8 One-touch fitting P Stations 1 2 n Port P C8: With 8 One-touch fitting U side SS5Y3-60-04U 1 set (type
Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.
18 4.5 18 4.5 1.7 4 2-M4 x 0.7 thread depth 5 Mounting thread 3.3 3 15 Groove for auto switch mounting 90 14 Series MHF2 Dimensions MHF2-16D Scale: 50% 4H9 +0.030 0 depth 3 38 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 57.5 5 M5 x 0.8 Finger closing port 50 72 2-M5 x 0.8 thread depth 5.5 Mounting thread 26 52 10.6 E 20 20 24 33 E 0 -0.1 2-4.3 through (mounting hole
MB MB1 Symbol Bore size (mm) S A A' B B' D F F' GA GB H J K MM NN R 5 st 10 st 15 st 20 st 30 st CA2 6 10 15 35.5 40.5 45.5 30.5 7 M10 x 1.0 7 9 14 14 3 8 6.5 6 6 17 6 8 M3 x 0.5 35.5 40.5 45.5 55.5 30.5 M12 x 1.0 8 10 12 15 17 5 8 6.5 6 7 20 7 8 M4 x 0.7 CS1 M14 x 1.0 35.5 40.5 45.5 55.5 30.5 10 12 14 20 19 6 10 8.5 6 7 24 9 8 M5 x 0.8 C76 Symbol Z C With auto switch Bore size (mm) W 5
Symbol Bore size (mm) A A' B B' D E F GA GB H J R MM FC NN FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 7 M3 x 0.5 3.4 M10 x 1.0 1.6 24 16 32 10 10 12 15 17 5 13 8 6 7 20 7 8 M4 x 0.7 4.5 M12 x 1.0 1.6 28 18 37 15 12 14 20 19 6 15.5 10 6 7 24 9 10 M5 x 0.8 5.5 M14 x 1.0 2.3 36 22 49 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P
100, 125, 150 Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 (mm) J 12 Scale: 30% 6.5 5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole 4.2 N-M5 x 0.8 thread depth 10 (N-1) x H G M5 x 0.8 thread depth 10 GG H 6 depth 4.5 5H9 +0.03 Bottom through
Intrinsically Safe Environment UL913 & CSA157 Compliant Series 53-SY5000/7000/9000 NC300-C Dimensions Compact, High Flow Compact, High Flow B A L3 Model Dimension L1 L2 L3 53-SY5120-L 53-SY5120-LL 53-SY5120-TT 53-SY7120-L 53-SY7120-LL 53-SY7120-TT 53-SY9120-L 53-SY9120-LL 53-SY9120-TT 104 15 L1 120.8 40 118.2 L2 18 135 148.3 42 23 165.1 L2 Flow-rate Characteristics Flow-rate characteristics 14
M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring
Select the graphs for horizontal of the EQFS40H on page 14. 3. Lx = 350 mm, Ly = 250 mm, Lz = 1000 mm 4.
22 15 10 13.5 12.5 26.5 50 8 56.2 7 39 12 NA NN P RR S U Z ZZ Bore (mm) 20 M20 x 1.5 30 1/8 9 146 14 217 226 25 M26 x 1.5 34.5 1/8 9 146 14 221 230 32 M26 x 1.5 42.5 1/8 9 159 14 234 243 40 M32 x 2 51 1/4 11 181 18 270 281 Double clevis style: RECD 2 x P (Rc, NPT, G) NN +0.058 0 CDH10 G G H1 Plugged (M5 x 0.8) Width across flats B1 REA I REB NA D REC MM 1.5 +0.2 +0.1 CY CX Width across flats
22 15 10 13.5 12.5 26.5 50 8 56.2 7 39 12 NA NN P RR S U Z ZZ Bore (mm) 20 M20 x 1.5 30 1/8 9 146 14 217 226 25 M26 x 1.5 34.5 1/8 9 146 14 221 230 32 M26 x 1.5 42.5 1/8 9 159 14 234 243 40 M32 x 2 51 1/4 11 181 18 270 281 Double clevis style: RECD 2 x P (Rc, NPT, G) NN +0.058 0 CDH10 G G H1 Plugged (M5 x 0.8) Width across flats B1 REA I REB NA D REC MM 1.5 +0.2 +0.1 CY CX Width across flats
(L3) L2 3 L1 2 1 A 4 B 2 14 Stations 4 P=10.5 17.7 D side 2n-M5 8 8 44 30.5 67 (Single, rubber) 69.5 (Single, metal) A 4 14.5 B 2 95 (Double) 103.5 (3 Position) 300 (Lead wire length) 14 6.5 Cover diameter 1.6 Cross section 0.34mm2 M5 57.5 31 26 13 55 X 13.6 R1 R2 5 3 1 P R1 R2 5 3 1 P (29) 20 6 8.5 PE port 4-Rc(PT)1/8 R1, R2(EXH) port 15 16.5 16.5 15.5 15.5 33 57 (30.5) 7 2-Rc(PT)1/8 P
GA (Hexagon socket head plug) TT UU (Hexagon socket head plug) G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 1.1 (WW) QQ (Hexagon socket head plug) (WW) M5 x 0.8 M5 x 0.8 GA PP (Hexagon socket head plug) (Port) XX XX G Centralized piping type Centralized piping type 2 x M5 x 0.8 2 x M5 x 0.8 (Hexagon socket head plug) VV VV (Hexagon socket head plug) S WX 8.4 Bottom ported (Applicable
x 0.7 3.2 7 8.1 6.8 JS16 nut M5 x 0.8 4 8 9.2 7.8 JS20 nut M8 x 1.25 5 13 15 12.5 D C JS32 nut M10 x 1.25 6 17 19.6 16.5 JS40 nut M14 x 1.5 8 22 25.4 21 H B JS63 nut M18 x 1.5 11 27 31.2 26 10-19-14
Nominal thread size Applicable bore size (mm) 10 10, 16 20 25, 32 40 50, 63 Symbol Applicable cylinder nominal thread size M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 Symbol 10 16 20 32 40 63 4-070 5-080 8-125 10-125 14-150 18-150 Mounting Warning 1. For the screw-in depth of the female threads, refer to the dimensions (page 10-19-14). 2.
Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 2 0 M5 06 AS 1F S G Body size 1 S Body size 2/3/4 AS 2 2 0 1F S G 01 06 With indicator Body size Made to Order Refer to page 698 for details. 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) 0 Meter-out 1 Meter-in Note) Face seal type is used for the G thread
With seal Note) In case that connecting port is either M5 or 10-32 UNF thread, it is not available with seal. With gasket is provided as standard. Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Universal type 01 02 03 04 Applicable tubing O.D.