VHK

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 M1 Q L1 L2 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6

Fieldbus System

Cylinder port size C3 With 3.2 One-touch fitting C4 With 4 One-touch fitting C6 With 6 One-touch fitting M5 M5 thread CM Mixed sizes and with port plug L3 Top ported elbow with 3.2 One-touch fitting L4 Top ported elbow with 4 One-touch fitting L6 Top ported elbow with 6 One-touch fitting L5 M5 thread B3 Bottom ported elbow with 3.2 One-touch fitting B4 Bottom ported elbow with 4 One-touch

Electric Grippers

3 17 +0.1 0 (Finger operating range: 0 to 17) Note) When closed: 0 When opened: 16 1 2 x M5 x 0.8 x 10 2 x 4.2 through 36.4 (38.2) 74.6 1.7 1.7 Note) Range within which the fingers can move when it returns to origin.

Stainless Steel 316

(mm) Connection thread R M Weight (g) A D L D Applicable tubing KQGS04-M5 KQGS04-01S KQGS06-M5 KQGS06-01S KQGS06-02S KQGS08-01S KQGS08-02S KQGS08-03S KQGS10-02S KQGS10-03S KQGS12-03S KQGS12-04S 22 2 8.6 4 M5 x 0.8 4 25 10 18 M 21 1/8 3 9.8 4.1 A A L 22.8 2 12 4 M5 x 0.8 12 6 25.8 1/8 21.8 12 18.8 9.9 4 Connection thread 1/4 19.8 20 10 H 30.5 14 1/8 26.5 17 5 17.2 (In case of R) 8 28.5 1/4

Possible to transfer a workpiece at low-speed.

67h9 32H9 12 22H9 10 4.5 3 6.5 17 8.6 14 8.5 85.4 80 10 38 22 19 6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 13 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M 8 x 1.25 12 M5 x 0.8 M 8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10

Electric Slide Tables

Use bolts that are between the maximum and minimum screw-in depths in length. 45 Electric Slide Table/High Rigidity Type Series LESH Model Selection Specific Product Precautions Dimensions: In-line Motor Type/D Type LESH16D depth 5 +0.03 +0.01 5 5 +0.03 +0.01 depth 5 2 x M5 x 0.8 x 8 Manual override screw Note 4) 17 6 D x M5 x 0.8 x 6.5 Note 5) 17 Servo Motor (24 VDC)/Step Motor (Servo/24

0.55

Port size: 1/4 17 Pilot Poppet Type Common Exhaust Type 41 /Individual Exhaust Type 42 Series VP300/500/700 Series VP300/Dimensions Type 41/Common exhaust: VV3P3-41l1-02 Grommet (G) Stations Approx. 300 (Lead wire length) 96.1 57.6 26.2 M5 x 0.8 Common external pilot port (External pilot specification: R) N.C.

MG

to 300 st Over 100 st to 200 st 105 Over 200 st to 300 st Over 300 st 12 16 20 25 14 110 60 48 3 22 3.5 56 M5 x 0.8 41 10 50 5 37 20 40 15 25 16 110 200 60 105 24 54 3 25 3.5 62 M5 x 0.8 46 10 56 5 38 24 44 17 27 18 120 200 77 117 167 28 70 3 30 3.5 81 M6 x 1.0 54 12 72 17 44 24 44 300 29 39 26 120 200 77 117 167 34 78 4 38 4.5 91 M6 x 1.0 64 12 82 17 50 24 44 300 29 39 MGPM (Slide bearing

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5

Fieldbus System

C3: 3.2 (SMC) C4: 4 (SMC) C6: 6 (SMC) N1: 1/8" (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) M5: M5 thread n: Stations (Maximum 24 stations) n L L1 L2 L3 L4 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 223.5 234 244.5 255 265.5 276 286.5 297 104.2 114.7 125.2 135.7 146.2 156.7 167.2 177.7 188.2 198.7 209.2

MXS Series Air Slide Table

M8 X 1 MXS-AS12-X11 15 30 D F MXS-AS12-X12 25 40 MXS-AS16 5 24.5 MXS16 Mounted to table 16.5 M5 X 18 19 M5 X 18 12 5 21 14 37 11 MXS-AS16-X11 15 34.5 M10 X 1 MXS-AS16-X12 25 44.5 Q MXS-AS20 5 27.5 MXS20 M12 X 1.25 21 M6 X 20 24 M6 X 20 13 6 25 17 13 45.5 MXS-AS20-X11 15 37.5 I MXS-AS20-X12 25 47.5 J H MXS-AS25 5 32.5 MXS25 MXS-AS25-X11 15 42.5 25.5 M8 X 25 M8 X 25 17 6 31 19 26.5 M14 X 1.5

Compact Cylinder with Lock Series CLQ

x 0.8 Rod side cylinder port 2 x 5.4 through 2 x 2 x 9 depth of counterbore 7 depth VH Q H thread effective depth C 5.5 M5 x 0.8 unlocking port (Unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 K M E S 3.2 2 x 2 x M5 x 0.8 3.2 Head side cylinder port 16 16 W Dust cover (Manual unlocking unit) L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (Manual unlocking unit) M5

LX

Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3. T-slots l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXP M5 x 0.8 7.4 8.5 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 3) M5 fittings for M5 thread are attached without being incorporated.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

21

32 10 13 10.5 6 8 4 6.8 28 96 17.5 15 6 34 33.4 Width across flats 10 length 3.5 47 17 32 12 13 10.5 6 8 4 6.8 28 102 17.5 15 8 34 37.4 Width across flats 12 length 3.5 54 22 41 14 16 13.5 8 10 4 7 30 113 23.5 20.5 8 42 46.4 LX 40 LZ MM NA 24 NN M20 x 1.5 P M5 x 0.8 S 55 X 20 Y 8 Z ZZ 114 LT 3.2 Bore size 20 25 32 40 55 M8 x 1.25 11 40 30 M26 x 1.5 M5 x 0.8 56 20 8 118 3.2 55 M10 x 1.25

High Vacuum Angle Valve

For details, refer to Common Option [2] Mounting position of the heater on page 17.

KS/KX

(mm) Applicable tubing KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S M5 x 0.8 M6 x 1 36.5 9 12 37 33 8 10.4 16 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 12 8 6 12.8 14 17