Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

8 16 10 9 A + Stroke 20 20 10 20 10 10 25 20 18 36 12 10 30 22 18 36 12 10 40 28 22 44 12 14 8 Series MQQ Accessory Dimensions Female-male thread conversion joint Rod end nut d NN Rod MM D C C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.

Air-hydro Unit

S F 35 CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 148.5 103.9 45 1/2 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 148.5 57 1/2 121.8 101 M5 x 0.8 5.4 to 7.5 CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S

CC

S F 35 ML2B CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57

CE2

12 15 95 38 328.5 81 90 19 9 70 12 110 12 35 50 88.5 + 0.070 0 + 0.3 + 0.1 0.032 0.059 263 148 25 16 18 110 49 352 101 105 23 11.5 86 16 130 15 40 59 106 + 0.070 0 + 0.3 + 0.1 0.032 0.059 -X 31.5 297 192 20 25 140 61 403 119 130 28 13.5 102 20 160 18 48 76 112.5 + 0.084 0 + 0.3 + 0.1 0.040 0.073 35.5 309 214 25 25 162 64 430 133 150 36 13.5 116 25 180 18 58 92 139.5 + 0.084 0 + 0.3 + 0.1

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

9 16 MXP16-PS 8-8-13 13 Series MXP Dimensions: MXPJ6 4-M3 x 0.5, depth 3 7 5 H 3 18 1 0.05 D B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.5 16.5 14 13 20 6 F 6 6 5 Piping port 2-M4 x 0.7 13.5 Bottom hole diameter 3.3 2-M3 x 0.5 17 0.05 (Plug: M-3P) Mounting

IN20267

Adjustment and Operation . 46 17.9. Washing . 47 18. Maintenance . 48 19. Recovering the IP Address of SMC Ethernet MPC . 49 20. 4 - IN20267 Safety Instructions 2. These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of "Caution", "Warning" or "Danger".

PF-OMM0004_C

13.6 2.7 14 PF3W720 3/8 1/2 78 54 30 60 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W740 1/2 3/4 98 71 38 68 48.6 19.2 32 28 49 35 28 16.8 2.7 12 PF3W711 3/41 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -81No.PF-OMM0004-D PF3W721 A AA B D E F G

PF-OMN0009_C

13.6 2.7 14 PF3W520 3/8 1/2 78 54 30 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W540 1/2 3/4 98 71 38 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 12 PF3W511 3/41 124 92 46 62.6 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0009CN-F PF3W521 2X A AA

Dedicated Controller

BIT 2 5 Program designation <1> BIT 3 Pro-no. bit2 5 18 STP-NO BIT 1 Pro-no. bit3 18 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 BIT 2 Stp-no. bit1 6 19 BIT 3 Stp-no. bit2 19 7 BIT 4 20 Stp-no. bit3 7 The terminal that designates the step to be executed.

CC

35 36 25 72 17.5 1 88.2 148.5 103.9 45 CCVS02-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 2 98 148.5 121.8 57 CCVSl1-lG-S M5 X 0.8 5.4 to 7.5 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl2-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl3-lG-S 1/2 45 80 86 35 36 25 72 17.5 98 57 88.2 CCVSl0-S 3/4 66 107 116 135 50 24 40

IDU/IDF

38000 IDF190D 32000 190 4B flange 50 IDF240D 43000 240 Medium Large 13 to 15 75 IDF75C 10500 12400 R22 R 2 40C Water cooled 20 2 1/2B flange IDF120D 23000 120 25000 IDF150D 30 150 3B flange R407C 40C 16 to 18 32000 IDF190D 38000 190 4B flange 6B flange 43000 IDF240D 50 240 35C R22 54000 IDF370B 65000 370 With motor operated auto drain.

AC Servo Motor Driver (CC-Link Type)

Parameter Configuration using Setup software (MR Configurator2TM) . 18 5.1Setup software (MR Configurator2TM) . 18 5.1.1 Installation Method . 18 5.2 Basic driver set-up for Initial Test Drive . 18 5.2.1 Start up the Setup software (MR Configurator2TM) . 19 5.2.2 System Settings . 20 5.2.3 Model Selection . 20 5.2.4 Driver ON LINE Check . 21 5.2.5 Help Function . 21 5.3 Parameter Settings

AC Servo Motor Driver (CC-Link Type)

Parameter Configuration using Setup software (MR Configurator2TM) . 18 5.1Setup software (MR Configurator2TM) . 18 5.1.1 Installation Method . 18 5.2 Basic driver set-up for Initial Test Drive . 18 5.2.1 Start up the Setup software (MR Configurator2TM) . 19 5.2.2 System Settings . 20 5.2.3 Model Selection . 20 5.2.4 Driver ON LINE Check . 21 5.2.5 Help Function . 21 5.3 Parameter Settings

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12 29 5 50 70.5 30.5 18 12 29 5 50 86.5

Nozzle Type Ionizer

Nozzle Type Ionizer Lightweight 16 mm x 100 mm x 46 mm RoHS Thickness Width Height Slim 33% reduction 120 g a 80 g 16 mm Offset voltage: 10 V (For energy saving static neutralization nozzle) 46 mm 100 mm Female threads for piping High flow rate nozzle Energy saving static neutralization nozzle Nozzle Variations Made to order Application Examples With right angles -X367 Dust removal and static

Refrigerated Air Dryer

Standard Products IDFAE Series Air flow capacity (m3/h [ANR]) Outlet air pressure dew point Rated inlet condition Page Model Refrigerant Port size 3C 7C 10C IDFA3E 12 15 17 Rc 3/8 IDFA4E 24 31 34 Rc 1/2 IDFA6E 36 46 50 P. 92 to 94 R134a (HFC) IDFA8E 65 83 91 Rc 3/4 IDFA11E 80 101 112 35C 0.7 MPa IDFA15E1 120 152 168 Rc 1 IDFA22E 182 231 254 R 1 IDFA37E R 11/2 273 347 382 P. 95 to 97 R407C

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

20046 149 42 50 50 144.5 156 199 25 29.5 41 84 131 152 172 199 20 16 37 57 84 63 63 Note) Intermediate strokes other than standard strokes are produced by installing spacers. 5

Aluminum High Vacuum Angle Valve

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SY3120 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SY3220 Example) SYJ3190-1GS, SYJ3290-1GS, SY3120-1GS-C4, SY3220-1GS-C4 For details, consult your SMC sales representative. For option Q, the solenoid valve should be a CE-compliant product.

5 Port Solenoid Valve Series SQ1000/2000

L6 (for 6) C4 (for 4) C10 (for 10) L6 (for 6) Side SQ2000 C8 (for 8) 35 J kit: Flat cable 1 to 8 stations SQ230 SQ231 Option SS5Q23 580 Note 2) L4 (for 4) Built-in Silencer Direct exhaust C6 (for 6) Top C8 (for 8) Note 1) One-touch fittings for inch sizes are also available.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 R 12 15 18 23 27.5 34.5 6.5 7.5 8 10 10 13 13 M3 x 0.5 M6 x 1 M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 M5 x 0.8 M26 x 1.5 M6 x 1 M26 x 1.5 M6 x 1 M32 x 2 0.007 0.037 M8 x 1.25 M8 x 1.25 M8 x 1.25 M10 x 1.5 P (Piping port