LEY-OM007

16 LE-D-2-1 2 /P.46 7.4 /P.47 7.5 25 LEYG-S025 25 LE-D-2-2 32 LEYG-S032 32 LE-D-2-3 -16- 4. 4.1.

Step Motor Controller (Servo / 24 VDC)

Operation instruction . 46 2 - (1) Power on Return to origin . 46 (2) Positioning operation . 47 (3) Pushing operation. 47 (4) HOLD . 48 (5) Reset . 48 (6) Stop . 48 (7) Area output . 49 11. Alarm Detection . 50 11.1 Parallel output for the alarm group . 50 11.2 Alarm details . 51 12. Wiring of cables/Common precautions . 57 13.

Soft Start-up Valve

Solenoid valve side pin wiring diagram -11- Grommet With light (GZ) DIN Terminal With light (DZ, YZ) * Surge voltage suppressor of varistor has residual voltage corresponding to the protective element and rated voltage; therefore, protect the controller side from the surge. The residual voltage of the diode is approximately 1 V.

HRX-OM-R016

Centigrade(oC) Fahrenheit(oF) 5.13 11 Changing temp. unit Pressure unit can be changed.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

27 25 60 27 30 6 19 8 14 1/4 3/8 3/8 1/2 1/2 Refer to p.3.4-18 for further information on rod end nuts and accessories. 58 13 17 up to 600 20 17 52 12 11 27 47.3 61 M8 X 1.25 M18 X 1.5 159 40 90 17 11 30 25 70 7 19 0 32 35 18 58 17 up to 600 20 17 64 10 11 27 54.8 M18 X 1.5 170 40 15.5 68.5 M10 X 1.25 98 17 14 31 25 7 19 0 85 32 35 18 71 21 up to 750 21 25 78 14 13 32 65.8 M22 X 1.5 204

Clamp Cylinder Series CK1

6 Double knuckle joint CKPA80 Built-in strong magnet type / with magnetic field resistant auto switch (D-P79WSE type) 60 35 54 + Stroke 60 Speed controller valve Top width across flats 3 Cushion valve Top width across flats 3 10 40 15 10 11 30 11 3 x Rc 3/8 3 x Rc 3/8 64.5 27 Width across flats 85 45 45 M20 x 1.5 44 25 95 62 50 Max. 58 Max. 58 46 R20 Shaft: 18 Hole: 18 +0.027 0 0.050 0.093

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

27 17 84 25 6 19 8 1/4 3/8 3/8 1/2 1/2 Refer to p.3.8-18 for further information on rod end nuts and accessories. 14 up to 600 11 52 20 13 40 12 17 17 58 27 47.3 61 M8 M18 X 1.5 159 35 32 70 7 11 19 30 17 90 0 25 18 up to 600 11 64 20 15.5 40 10 17 17 58 27 54.8 68.5 M10 X 1.25 M18 X 1.5 170 32 85 35 7 14 19 31 17 98 0 25 18 up to 750 102 13 78 25 18.5 52 14 21 21 71 32 65.8 80.5 M12 X

Stainless Steel One-touch Fittings Series KG

Nylon Urethane KGW04-M5 KGW04-01 8 32 38.5 18 30 37.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 33.5 42.5 30.5 40 8 8 3.0 3.0 1 8 10 6 17 12.8 20 10 1 4 KGW06-02 46 46.5 10.9 10.9 17 14 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 47 51 43.5 49.5 12 30 47 8 18.5 20.5 14.2 15.2 14 12 23 3 8 KGW08-03 17 51.5 52.5 74

Series KG Stainless Steel One-touch Fittings

Nylon Urethane KGW04-M5 KGW04-01 8 M5 0.8 32 38.5 18 30 37.5 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 33.5 42.5 30.5 40 8 3.0 3.0 8 1 8 10 6 17 20 12.8 10 1 4 KGW06-02 46 46.5 17 14 10.9 10.9 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 47 51 43.5 49.5 12 30 47 8 14 18.5 20.5 14.2 15.2 12 23 3 8 KGW08-03 17 51.5 52.5 74

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

20 12 11 21 15 23 30 40 40 65 11 37 4 17 4 4 10.4 10.4 KDM 14 41 M 13 40.5 6 18.5 10 10 12.8 12.8 KB 8 A L 14 44.5 48.5 53.5 57 54 59.5 62.5 4.2 8 17 15.2 20.5 26 18 15.2 KR (R) Connection threads H 10 19 18.5 23 41 29 18.5 KA (R) 12 22 20.9 20.9 24 58 46 2 x Applicable tubing KQG2 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

reduces flow setting time

AS-FG AS301FS, AS311FS AS401FS, AS411FS AS-FP Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FM 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 AS-D 06, 07 1000 AS-T 500 ASP 500 ASN 0 0 5 0 10 5 0 10 AQ Number of needle rotations Number of needle rotations ASV Note) The numbers above the flow rate characteristic curves

VCL

40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 24 (25) 59 (66) 46 57 60 54.5 48.5 101 57 68 104 30 50 86 36.5 13.5 15 32 25 23 M5 8 1/2 26 (26.5) 64.5 (71.5) 48 62.5 62 60 50.5 103 62.5 70 107 22 45 90 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 26 (26.5) 66.5 (73.5) 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 94 41 13.5 17 36 25 23 M5 8 1/2 26 (26.5) 70 (77) 48 68 62 65.5 50.5 103 68 70 119

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Thread size M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.

Digital Flow Monitor

Remarks Sensor connector (For PFMB) ZS-28-C-1 Sensor connector (For PFMC and PF3A7) ZS-28-CA-4 Bracket A ZS-46-A1 Self tapping screws: Nominal size 3 x 8L (2 pcs) Bracket B ZS-46-A2 Self tapping screws: Nominal size 3 x 8L (2 pcs) Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5L 5 cores, 2 m Front protective cover ZS-27-01

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

CLK1

2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58 22 8.6 14 1/4 55 50 130 70 158 124 142 63 M10 x 1.5 9 M10 x 1.5 WA WB Bore size (mm) VB X XA XB XC XL YY YL Z st25 25

Modular F.R.L. Units

Note 11) : For thread type: NPT only.

ZQ-OM01401

0.25 31 29 24 46 0.35 44 39 31 60 0.45 54 48 38 74 0.05 11 11 9 16 0.15 24 22 18 33 4 0.25 34 32 27 48 0.35 46 42 35 62 0.45 57 52 44 76 0.05 12 11 9 16 0.15 25 24 20 33 6 0.25 37 34 30 47 0.35 49 45 39 63 0.45 61 56 48 77 3 39 - No.ZQ-OM01401-B 12. 12.1 12.2 0 40 - No.ZQ-OM01401-B 12.3 Assy ZQ VQ100 3 2 Assy Assy Assy () ZQA-K15LO--2 ZQA-K25LO--2 ZQA-J15LO--1 ZQA-J25LO--1 ZQA-Q15LO

MK

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.