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M6x1 M5x0.8 M3x0.5 1/4-28 10-32 1/8 NPT M8x1.25 M6x1 M5x0.8 M3x0.5 1/4-28 10-32 1/8 NPT M8x1.25 M6x1 M5x0.8 M3x0.5 1/4-28 10-32 M8 to 1/8FL M8 to M8FL M8 to M6FL M8 to M5FL M8 to M3FL M8 to 1/4-28FL M8 to 10-32FL M6 to 1/8FL M6 to M8FL M6 to M6FL M6 to M5FL M6 to M3FL M6 to 1/4-28FL M6 to 10-32FL M5 to 1/8FL M5 to M8FL M5 to M6FL M5 to M5FL M5 to M3FL M5 to 1/4-28FL M5 to 10-32FL 1/8 to

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (Female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc 1/8 Connection/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 20 to 32 Pad dia.

SZ3000

L 20 46 (7.5) L 14 1 8 55 47.04 (35) (25) 5.5 Approx. 10 25 13 2-M2.6 x 0.45 Socket side Rail mounting hole pitch 12.5 Plug connector HDB-CTF Terminal No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

: One-touch fitting for 4 C6: One-touch fitting for 6 10 10 (2) M5: M5 thread 53 13.8 6 A 2 10 16 4.3 2-3.2 mounting hole 24.5 7.8 (For C3, C4, C6) (For M5: 5.7) Manual override Cover dia. 1.6 Cross section 0.34 mm2 (Lead wire length) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

3 Port Air Operated Valve Series SYJA300 1

M5 x 0.8 Body side VZA222-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 Body side VZA214-1P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Sub-plate side VZA214-2P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Body side VZA224-1P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O. Rc 1/8 Sub-plate side VZA224-2P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Standard Specifications Weight Table (g) Pad diameter (mm) Vacuum entry (female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc(PT)1/8 Mounting/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 Pad diameter (mm) 20 to 32 Rc(PT)1/8 M8 x 1.25 40, 50 Rc(PT)1/8 Ball joint rotation 15 Pad Types Ball joint Pad

Vacuum Pad: Ball Joint Type

Vacuum entry (Female thread) Vacuum entry direction Vertical M5 x 0.8 1/8 (Rc, NPT, NPTF) Connection/Vacuum entry M8 x 1.25 Connection 10 to 16 20 to 32 40, 50 10 Female thread ZP3 14 19 M5 x 0.8 10 to 16 17 46 M5 x 0.8 47 ZP3E 20 to 32 M8 x 1.25 Pad diameter 1/8 (Rc, NPT, NPTF) ZP2 M8 x 1.25 40, 50 ZP2V 1/8 (Rc, NPT, NPTF) Ball joint rotation ZP ZPT ZPR ZPT ZPR XT661 711 ZPT Series B5

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Aluminum die cast Body q Stainless steel Spool/Sleeve Metal seal w Aluminum/NBR Spool valve Rubber seal Resin Piston e Pilot valve r 2.10-7 VQZ100/200/300 Body Ported Dimensions: VQZ100 Valve single unit C6: One-touch fittings for 6 C4: One-touch fittings for 4 C3: One-touch fittings for 3.2 2-C3, C4, C6, M5 Grommet (G): VQZ115-lGl-C3, C4, C6, M5-PR 10 10 (2) M5: M5 thread 53 13.8 6 A 2

MXH

-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M4 x 0.7 Depth 6 2-M5 x 0.8 CX 9 5.5 17 21.5 52.5 53.5 D25 25 27 5.5 26 27 -X 206.5 6.5 16 17 5 NS 10 12.5 25 Data 14 42 + Stroke 56 + Stroke 4-M4 x 0.7 Depth 6 12 10 + Stroke (mm) Stroke (mm) NS LA LB LT J 5 58 20 10 4 10 58 20 4 10 15 30 68 4 20 20 30 20 68 4 25 78 40 30 4 30 78 40 4 30 40 50 88 6 20 20 50 60 25 25 98

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Cam Style Series MHY2 MHY2-20D 2-M5 x 0.8 thread depth 8 (Mounting hole) Pin hole positioning 14 5 19 MHZ 42 4H9 + 0.030 depth 4 0 MHF 4-M4 x 0.7 MHL 8 4-M5 x 0.8, thread depth 10 (Thread for mounting attachment) 10 0.005 0.025 (Mounting hole) 5 9 MHR 25.5 2-M5 x 0.8 thread depth 10 (Mounting thread) 18 MHK (Mounting hole) (Limted area for mounting attachment) MHS MHC 38 48 36 36 37 MHT 25

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Cam Style Series MHY2 MHY2-20D 2-M5 x 0.8 thread depth 8 (Mounting hole) Pin hole positioning 14 5 19 MHZ 42 4H9 + 0.030 depth 4 0 MHF 4-M4 x 0.7 MHL 8 4-M5 x 0.8, thread depth 10 (Thread for mounting attachment) 10 0.005 0.025 (Mounting hole) 5 9 MHR 25.5 2-M5 x 0.8 thread depth 10 (Mounting thread) 18 MHK (Mounting hole) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

CNG

(12) 18 5.5 6 4 8 5 M4 x 0.7 Up to 200 201 to 350 20 to 200 201 to 350 31 22 19.5 17 45 103 1/8 57 16.5 10 96 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 400 20 to 300 301 to 400 38 22 19.5 17 45 104 1/8 57 20 12 97 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 450 20 to 300 301 to 450 47 30 27 19 52 112 1/8 65.5 26 16 104 10 (13) 26 7 11 7 12 8 M6 x 1 Up to 300 301 to 800 20 to

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Refer to page 11-11-36 for detailed solid state switches with pre-wire connectors. 11-5-5 5 Series MSUA Specifications Model 2 MSUA3 MSUA7 MSUA20 MSUA1 Single vane Vane type Single vane Single vane Single vane Rotating angle 1 90 10 180 10 90 10 180 10 90 10 180 10 90 10 180 10 Air (Non-lube) Fluid 1.05 1.5 Proof pressure (MPa) Ambient and fluid temperature 5 to 60C 0.15 to 1.0 Operating

MHY2/MHW2

-20D 2-M5 X 0.8 Depth 8 Pin hole positioning (Mounting thread) 14 5 19 42 +0.030 0 4H9 Depth 4 2-M4 X 0.7 2-M5 X 0.8, 10 deep (Thread for mounting attachment) 8 10 0.005 0.025 (Mounting thread) 5 9 2-5.5 (Mounting hole) 2-M5 X 0.8 Depth 10 18 (Mounting thread) (Limted area for mounting attachment) 38 48 36 36 37 25 MHZ2 21H9 Depth 1.5 +0.052 0 Postioning pin hole 51 MHZJ2 16 69 26 MHQ 86

Rotary Gripper Series MRHQ

M5 x 0.8 (one each on three sides) Port B 47h9 0 0.062 4-M5 x 0.8 Depth 8 8 N I J E A D P A A M N 22 R R SMC 12 E O P T 25 P A I R 8 R G Y 11 A R I 6 6 29 Side A Side B Scale: 45% 10 Rotary Gripper Series MRHQ Dimensions (mm) 1in = 25.4mm Scale: 50% MRHQ20 A B 48 59 78 38.5 4-M6 x 1 Depth 10 0 0.074 54h9 26.3 opened + 2.2 0.2 8 0 0.1 M5 x 0.8 0 0.05 10 16.3 closed 0 0.7 4-M4 x 0.7 Finger

VDW Series

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

MRHQ

19 26 9 39 36 Misc. 6.5 2-6.5 through 2-11 depth of counter bore 2.8 D8 46 101 10 Angle adjustment bolt 20+0.030 0 3-5H9 depth 6 (one each on three sides) 3-R2.5 12 2 +0.030 0 3-5H9 long groove depth 4 (one each on three sides) 50h9 0 -0.062 M5 x 0.8 Port A M5 x 0.8 Port B 4-M6 x 1 depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 R SMC R E 16 8 O P P T A I R R G Y R A I 48 36 Side A

Low torque Metal seal type Rotary joint

* flange: MQR8-F (for MQRF8-M5) * flange: MQR12-F (for MQRF12-M5) * o 55 * o 45 * o 41 * o 50 * 4-4.5 mounting hole * 4-8 counter bore 5.5 4.5 mounting hole +0.05 4.1 depth10 54h8 24 x M5 x 0.8 10 counter bore depth1.5 30h8 (10 from end) 49h8 0 -0.033 25h8 16-M5 x 0.8 10 counter bore depth1.5 0 0.033 3 120 140 17 *7 (10 from end) 3 (87) 1 2 3 4 5 6 7 8 9 10 11 12 1 2 31 9 8.2 x 11 = 90.2

VDW

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.