3 Port Air Operated Valve

566 550 607 591 648 632 689 673 730 714 771 755 812 796 853 837 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 VPA VPA VPA3 Type 42/Individual exhaust: VV3PA7-423-04 Stations (Pitch) P = 41 1/2 3(R) port 37 34 3R 3R 12 2 x 8.5 (For mounting) 127 N.C.

CS1

59 35 16 90 14 47 36 43 29 25 64 M30 X 1.5 Lube Non-lube Air-hydro 1/2 M14 X 1.5 36 to 1000 75 31 15 161 128 50 17 59 35 16 90 14 47 36 43 32 28 72 M30 X 1.5 3/4 M16 X 1.5 40 to 1200 80 36 18.5 17 182 144 56 53 20 40 90 59 43 14 39 36 32 80 M36 X 1.5 3/4 M18 X 1.5 50 to 1200 41 90 115 18.5 20 204 162 17 63 60 23 45 70 48 39 44 40 100 M40 X 1.5 Lube Non-lube 3/4 1 M20 X 1.5 50 to 1200 90

44

M L M 17 17 33.6 7.6 17 17 37 8.5 22 22 39.4 9.3 Union Tee: KFG2T Applicable tubing size (mm) O.D.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Outside diameter [mm] 0.88 Effective area [mm2] 0.15 Conductor Strand diameter [mm] 0.05 Minimum bending radius [mm] (Reference values) 17 Note 1) Refer to Best Pneumatics No. 2-1 for solid state auto switch common specifications. Note 2) Refer to Best Pneumatics No. 2-1 for lead wire lengths.

Prevents Micro-Bubbles

Refer to page 17-6-3 for Safety Instructions and 17-5-41 to 17-5-42 for High Purity Chemical Valve Precautions. Piping Caution 1. Connect tubing with special tools. Refer to pages 17-5-35 through 17-5-37 regarding tubing connection and special tools. 2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below.

•

ZPT25 (8.5) (8) (17) (16)I,S.5) (81 1 17l (16) (10) (10) (18) (17) (S.S) (8) (171 (16) ZPT~2 . 1(29) (27) (25) (30)1129) (27) (29),(27) (25) * On parentheses. 1 are figures fOf female thread connecllons.

2/3 Port Valve

N.O. 72 80 95 100 88 97 108.5 113.5 41 41 44 44 VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 DIN connector: D FN.C.E Normally closed EN.O.F Normally open VX VNl VQ Model N N.C. N.O. K P N.O.

15

) 20 20 17 17 Weight (g) Note 1) Refer to Best Pneumatics No. 2-1 for solid state auto switch common specifications.

Refrigerated Air Dryer

22 (0.15) to 150 (1.0) AT F (C) Ambient temperature 36 to 104 (2 to 40) Relative humidity of 85% or less Air flow capacity 37F (2.8C) 10 (17) 15 (25) 25 (43) 41 (70) 59 (100) 71 (120) Outlet air pressure dew point IDF IDU 45F (7.2C) 11 (19) 16 (27) 26 (45) 43 (74) 62 (106) 80 (136) Outlet air pressure dew point SCFM Note 1, 2) (m3/h (ANR)) 50F (10C) 12 (20) 17 (28) 28 (47) 45 (77) 65 (110

MXS

27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 3.11-29 Series MXS Dimensions MXS 8L/Symmetric style ZZ Z 0.5 22 24 Basic style 6 M 3H9 3 deep +0.025 0 +0.025 0 2.5(Stroke adjuster at retraction end) 3H9 3 deep N -1 X F 2 12 2-M4 X 0.7 thread 6 deep 12 4-M3 X 0.5 thread 4

CL

24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 198 215 218 241 20 25 32 40 0.25 stroke For long stroke refer to page 9-2-32. 9-2-30 Series CLG1 Fine Lock Cylinder Double Acting, Single Rod With Mounting Bracket Foot style

Round Type Hydraulic Cylinder

30 36.9 43.9 47.3 15.0 19.6 25.4 27.7 20 25 32 40 M22 x 1.5 M24 x 1.5 M30 x 1.5 M33 x 2.0 13 17 22 24 26 32 38 41 CHS CH2 Accessory Brackets (Optional) CHA I-type single knuckle joint Bracket Order bracket pin separately.

Table of Contents

RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed. Can designate 8 types of programs with a total of 3 bits. (Set by the binary system.)

CLQ

L D d m t d H B C C type 8 for shaft C type 10 for shaft C type 10 for shaft C type 14 for shaft C type 18 for shaft C type 22 for shaft 20 25 32, 40 50, 63 80 100 21 25.6 41.6 50.6 64 72 7.6 9.6 9.6 13.4 17 21 16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.55 1.55 2.05 2.55 2.55 0.9 1.15 1.15 1.15 1.35 1.35 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 5 6 8 11 13 16 13 17 22 27 32 41

Compact Cylinder with Lock Series CLQ

L D d m t d H B C C type 8 for shaft C type 10 for shaft C type 10 for shaft C type 14 for shaft C type 18 for shaft C type 22 for shaft 20 25 32, 40 50, 63 80 100 21 25.6 41.6 50.6 64 72 7.6 9.6 9.6 13.4 17 21 16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.55 1.55 2.05 2.55 2.55 0.9 1.15 1.15 1.15 1.35 1.35 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 5 6 8 11 13 16 13 17 22 27 32 41

0.4

VQ7 DIN rail clamp screw Stations 1 2 3 n D side U side 2 x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97 130 152

CLQ

L d l D m d H B C IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 Type C 8 for axis 16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.55 1.55 2.05 2.55 2.55 13 17 22 27 32 41 15.0 19.6 25.4 31.2 37.0 47.3 Type C 10 for axis Type C 10 for axis Type C 14 for axis Type C 18 for axis Type C 22 for axis 24 Series CLQ Compact Cylinder with Lock Double Acting, Single Rod Simple Joint

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

41 18.5 44.3 32.8 22 12 20.9 82 76 21.3 54.8 AS321F-N02-11SD AS321F-03-06SD 3/8" 17.9 31.8 43.3 21 39.3 27.8 17 6 12.8 77 80 AS321F-N03-07SD AS321F-03-08SD 1/4" 13.2 27.8 39.3 17 41 29.5 18.5 8 15.2 79 77 R 3/8 19 23 9.8 1.2 47.4 19.8 52.6 AS321F-N03-09SD AS321F-03-10SD NPT 3/8 19 23 9.8 1.2 47.4 5/16" 15.2 29.5 41 18.5 43.3 31.8 21 10 18.5 81 79 19.8 52.6 AS321F-N03-11SD AS321F-03-12SD

IDG

Drain Discharge With float type auto-drain With drain guide Drain Drain J H ( ) N.C.: Gray N.O.: Black Maintenance space 100 mm or more Thread size: 1/4 (Without valve mechanism) Purge air discharge tubing port for dehumidification Applicable tubing O.D.: 10 Hexagon width across flats 17 Applicable tubing O.D.: 12 (NPT threads: 1/2 inch) (NPT threads: 3/8 inch) 14-19-41 38 Series IDG Dimensions

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

75.7 51.9 77.2 58.3 70 77.2 34.3 76 44.1 80 40A 71.6 31.1 77.3 41 78.9 51.9 80.4 58.3 70 80.4 34.3 79.2 44.1 90 50A 77.1 31.1 82.8 41 84.4 51.9 85.9 58.3 70 85.9 34.3 84.7 44.1 34 Zero Differential Pressure Type Pilot Operated 2-Port Solenoid Valve JSXZ Series Differs depending on the voltage and electrical entry.