CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

16.5 10 17 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 12 17 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B

ASD

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

OFF: Lock is activated. 3 32 3.

Check Valve Series AK 1

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

AS-FPQ/AS-FPG

-17-4 5 Clean Speed Controller with One-touch Fitting Series AS-FPQ/FPG Construction Meter-out type M5 type Meter-in type M5 type AS ASP ASN AQ ASV AK ASS ASR ASF Component Parts No.

MXW Series Long Stroke Slide Table

Table Dimensions MXW 16 Stroke: 75, 100 Operating port 2-M5 x 0.8 (mm) Width across hexagon socket hole 3 116 14 Scale: 30% 8 Width across flats 10 Operating port M5 x 0.8 Operation direction A 6-M5 x 0.8 thread depth 9 (Helisert) 6H9 +0.03 depth 5.5 0 7 (Plug : M-5P) 74 36 59 32 5 8 Operating port M5 x 0.8 Y Y 33 34 33 6H9 +0.03depth 5.5 0 39 125 Operation direction B (Plug : M-5P) Operation

MY1

GA (Hexagon socket head plug) TT UU (Hexagon socket head plug) G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 1.1 (WW) QQ (Hexagon socket head plug) (WW) M5 x 0.8 M5 x 0.8 GA PP (Hexagon socket head plug) (Port) XX XX G Centralized piping type Centralized piping type 2 x M5 x 0.8 2 x M5 x 0.8 (Hexagon socket head plug) VV VV (Hexagon socket head plug) S WX 8.4 Bottom ported (Applicable

IDG

IN OUT 9 24 140 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 97 8.5 115 118 Purge air for dehumidification 5 M5 x 0.8 Drain Drain (Maintenance space 100 mm or more) 5.5 M5 x 0.8 With fittings for purge air discharge (Option: P) Purge air discharge tubing port for

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Indication of A B C D E F G H T VCKL1209-02F VCKL1008-02F VCKL1075-02F VCKL0806-02F VCKL0604-02F 19 9 to 12 Nm 12/9 13 43.5 33 30.5 10 18.5 17 6 to 9 Nm 10/8 11 42.5 33 30 9 18.5 17 6 to 9 Nm 1075 11 42.5 33 30 9 18.5 14 4 to 9 Nm 8/6 9 40 32 27.5 8 16 12 3 to 8 Nm 6/4 7 38.5 32 27.5 8 16 15 VCC Series Special Tools Tool for Attaching/Detaching Valve VCC-G-A Knurled 8 4 x 1.8 21 For attaching

Modular F.R.L. Units

Drain cock with barb fitting B B B B B B Dimensions Barb fitting applicable tubing: T0604 Width across flats 17 1/4 Width across flats 17 1/4 Width across flats 17 1/4 Standard specifications Model P1 P2 A B C E F G J K Bracket mount M N Q1 Q2 R S U V AC10-A M5 x 0.8 1/16 87 59.9 25.5 28 35 12.5 25 31 20 27 4.5 6.8 3 24.5 AC20-B 1/8, 1/4 1/8 126.4 87.6 35.9 41.6 60 28.5 2 1 30 43.2 24

Smooth Cylinder

22 19.5 17 32 10 13 8 45 6 8 33.5 5.5 15 30 M26 x 1.5 1/8 62 120 M10 x 1.25 26 22 19.5 17 32 12 13 8 45 6 8 37.5 5.5 15 34.5 M26 x 1.5 1/8 64 122 M10 x 1.25 26 24 21 22 41 14 16 11 50 8 10 46.5 7 21.5 42.5 M32 x 2 1/4 88 154 M14 x 1.5 32 (mm) Boss-cut ZZ Bore size (mm) 20 25 32 40 103 107 109 138 10 Smooth Cylinder Series CG1Y 20, 25, 32, 40, 50, 63, 80, 100 Specifications and auto switch

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

How to Order Manifold Example/Valve T C VV3QZ15 08 N7 VQZ215R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold VV3QZ25 Rc(PT) 06C6C R N NPT T NPTF F G(PF) External pilot specification Cylinder ports (1) Symbol N1 N3 N7 N9 N11 NM M5 01 02 External pilot port 3/8" 1/8" 5/32" 1/4" 5/16" Mix M5 1/8 Tube O.D.

Antistatic One-touch Fittings Series KA

M5, M6 Soft nylon Polyurethane KAH23-M5 17 8.5 14 13 2.1 M5 0.8 M6 1.0 7 17.5 12.5 8.5 3.4 2.9 4 3.2 1 8 KAH23-M6 KAH23-U01 8 10 KAH04-M5 M5 0.8 M6 1.0 17 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 KAH04-U01 18.5 13.5 5 14 10 16 10 5.6 5.6 1 4 KAH04-U02 16.5 10.5 10 Uni thread KAH06-M5 M5 0.8 M6 1.0 18.5 15 14 3 11.5 4 4 10 KAH06-M6 19 1 8 KAH06-U01 14.5 5 12 6 19.5 17 1 4 KAH06-U02 13 17 14 12

JXCx-OMT0023

COM3 15 LA Encoder A-phase pulse (differential line driver) Y004 CR 5 16 LAR (Note 15) COM2 17 LB Encoder B-phase pulse (differential line driver) 18 LBR X INP 10 19 LZ Encoder Z -phase pulse (Note 17) (differential line driver) 20 LZR X X RD 11 21 14 LG SD Control common OP LG Plate (Note 17) 14 SD Plate (Note 7) (Note 3, 5) Forced stop CN1 EM1 8 Servo-on SON 4 Reset (Note 10, 11) RES 3

7.4

. 20 stations 75 10 M5 thread SS0755-VC Page 742 Body Ported C2 (2) C4 (4) N1 (1/8") N3 (5/32") C2 (2) C4 (4) N1 (1/8") N3 (5/32") Connector kit Single Unit S076-5-Page 747 Base Mounted M5 thread M5 thread Connector kit 14 Note 4) S075-5-M5 Note 1) Maximum stations in the case of mixed single and double wiring (special wiring specifications) Note 2) Differs depending on the serial unit type

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 522 Series AS Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow characteristics are representative values.

CE

across flats 8 5 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7.5 2-M5 x 0.8 (Port size) 71.5 103 + Stroke 24 127 + Stroke 2 10-12-12 High Precision Stroke Reading Cylinder Non-rotating Piston Type Series CEP1 Foot style: CEP1L12 Stroke 4-4.5 (Positioning pin hole) 40 5.5 13 25 6 RE A B +0.05 +0.02 4 REC CX 66 54 CY MQQ M RHC MK

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

Electric Rotary Table

40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 11 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series LECP1 Series LECPA Series LECP6 Series LECA6 Control motor Control