MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

CC-LINK compliant (32 points), T-branch type Mitsubishi Electric Corp. CC-LINK compliant (32 points), Straight type DeviceNet compliant (32 points), T-branch type DeviceNet compliant (32 points), Straight type The asterisk denotes the symbol for assembly. Prefix to the part no. of the solenoid valve, etc.

CRQ2

(Example) For M4: L2 = 8 mm Applicable shaft types; S, W L1 L1 = L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1 = L1 L1 = Q2 = M Q2 = M L2 = L2 = Q1 Q1 Size 10, 15 Size 20, 30, 40 Size 10, 15 Size 20, 30, 40 (mm) (mm) (mm) Size 10, 15 Size 20, 30, 40 Size Size Size 10 15 20 30 40 10 15 20 30 40 10 15 20 30 40 Thread Thread Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M3

51

Symbol Foot (mm) A AL D I B B1 C H1 H W GA GB H2 J KA LC LD LH LS LT LX LZ M MM NA P S X Y Z ZZ Bore size (mm) 20 25 32 40 50 63 80 100 12 20 5 12 14 4 33 10 14.5 34 13 8 6 4 26 M4 x 0.7 6 20 (3) 32 44 3 M8 x 1.25 24 M5 x 0.8 57 15 7 32 83 Width across flats 6 length 3.5 12.5 23 6 15 16.5 4 36 10 17.5 38.5 17 10 7 4 31 M5 x 0.8 6 22 (3) 36 49 3.5 M10 x 1.25 29 M5 x 0.8 60 15 7 35 89.5 Width

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

fitting [X: External pilot port] Applicable tubing O.D.: 4 5/32" One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 4 5/32" L3 (L4) U side D side (C6: 3.2) (N7: 7) (4.9) 37.3 8 58.4 36.9 5.5 42.3 16.6 B B B B B 35 4 5 1 2 3 6 7 8 9 10 92.2 A A A A A 18 19 20 21 22 18 16 17 83.7 28.8 26 24 25 A B A B 13 14 15 23 11 12 Air Preparation Equipment Pressure Control Equipment Flow Control

Compact

High speed transfer Workpiece direct mounting Long stroke Light load transfer Combining with external guide Long stroke LEC S LEC SS-T Size Work load [kg] Size Work load [kg] Size Work load [kg] Size Work load [kg] 25 25 25 25 6 10 10 10 LEC Y 32 32 32 32 11 20 20 20 Motorless LAT LZ Size Size Size Size 25 32 25 32 25 32 25 32 LC3F2 Stroke [mm] Stroke [mm] Stroke [mm] Stroke [mm] 2000

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Internal Pilot Manifold L Dimension n: Stations L n 2 110.5 100 86 12 3 123 112.5 96.5 13 4 135.5 125 107 14 5 148 137.5 117.5 15 6 160.5 150 128 16 7 173 162.5 138.5 17 8 173 162.5 149 12 9 185.5 175 159.5 13 10 198 187.5 170 14 11 210.5 200 180.5 15 12 223 212.5 191 16 13 235.5 225 201.5 17 14 235.5 225 212 12 15 248 237.5 222.5 13 16 260.5 250 233 14 17 273 262.5 243.5 15 18 285.5 275

Stainless Steel 316 Fittings

Hexagon Socket Head Male Connector: KQG2S (M5) Applicable tube O.D.

LX

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

Electric Actuator

25 32 40 25 32 40 16 25 32 40 1 5 14 20 45 60 5 15 25 Up to 1000 Up to 2000 Up to 2000 Up to 600 Up to 800 Up to 1000 Up to 2000 Up to 2500 Up to 3000 Up to 400 Up to 600 Up to 800 Up to 1000 10 20 45 60 Guide Rod Slider High Rigidity Slider Type Step Motor (Servo/24 VDC) AC Servo Motor Belt drive Belt drive Series LEJB Ball screw drive Series LEL Series LEJS CAT.ES100-101 CAT.ES100-104

Rotary Clamp Cylinders

Example) M5 x 75 L (MK2B) 6 Moment of inertia (kgm2) 4 MK220/25 2 Mounting bolt 103 6 4 Operating range Flat washer 2 104 Note) Be sure to use a flat washer to mount cylinders via through-holes. 50 100 200 66 120 D 75 85 80 90 90 100 80 90 105 135 105 135 Cylinder model C Mounting bolt size M5 x 75 L M5 x 85 L M5 x 80 L M5 x 90 L M5 x 90 L M5 x 100 L M5 x 80 L M5 x 90 L M6 x 105 L M6 x 135

AC

VE Description 0 1 M5 01 0 1 VY110 01 02 0 1 VY120 01 02 0 1 VY130 02 03 04 0 1 02 03 04 0 1 04 06 10 0 1 VY140 VY170 10 12 0 1 VY190 14 20 0 1 VY1D00-M5 VY1A0 -M5 VY150 VY1B0 VY VEX1-18-1 VEXA-18-2 VEX3-32 VEX5-32 VEX7-32 VEX9-32 B Braket (with bolt, washer) G VEX1-18-2 VEXA-18-3 F G36-10-01 G46-10-01 G G27-10-01 Pressure gauge G27-10-R1-X207 AL Pilot EXH. port silencer N AN120-M5 AN101-

Fieldbus System

CC-Link Protocol Applicable system Volume 1(Edition 3.5) Volume 3(Edition 1.5) DP-V0 Ver.1.10 Version Note 1) GSD file EDS file Configuration file Note 3) SMJ1: 32/32 SMJ3: 32/32 (1 station, remote I/O stations) SMJ2: 32/32 SMJ4: 32/32 (1 station, remote I/O stations) I/O occupation area (Inputs/Outputs) SPR1: 0/32 SPR3: 0/16 SPR2: 0/32 SPR4: 0/16 SPR5: 0/32 SPR7: 0/16 SPR6: 0/32 SPR8:

21

40 Width across flats 6 length 3.5 17.5 15 17 32 10 26 13 10.5 6 34 6 33.4 Width across flats 8 length 3.5 M10 x 1.25 30 17.5 15 17 32 12 26 13 10.5 8 34 6 37.4 Width across flats 10 length 3.5 M10 x 1.25 34.5 23.5 20.5 22 41 14 32 16 13.5 8 42 8 46.4 Width across flats 12 length 3.5 M14 x 1.5 42.5 NN M20 x 1.5 P S 55 TD 8 TT 10 TX 32 TY 32 TZ 52 Z ZZ 101 Bore size 20 25 32 40 M5 x 0.8 91

VQC

With 4 (5/32") One-touch fitting C4 (N3) Cylinder port sizes Note 3) Side port C6 (N7) With 6 (1/4") One-touch fitting Side port Side port M5 M5 thread Dual flow fitting VVQ1000-52A-C8 Single wiring Special wiring Note 4) specifications Double wiring Description/Model Stations 2 1 3 4 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 Note 1) Indicate the shutoff position.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Stopper Cylinder

1 i o w Mounting e Bore size r Port thread type t Cylinder stroke [mm] q With auto switch 12 12 mm 16 16 mm 20 20 mm 32 32 mm 40 40 mm 50 50 mm B Through-hole A Both ends tapped Nil M thread 12, 16 Rc 20 to 50 TN NPT TF G F Built-in One-touch fittings*2 Nil Without magnet for switch*1 12 10 16 10, 15 20 10, 15, 20 32 10, 15, 20 40 20, 25, 30 50 20, 25, 30 D With auto switch (Built-in magnet

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

CDL1 MGQ MGG MGC MGF MGZ MGT CX2 CXT 40, 63, 100 10, 15, 25 10, 15, 20 125 to 160 125 to 160 125 to 200 12 to 100 80 to 100 63 to 100 40 to 100 32 to 100 40 to 100 32 to 100 32 to 100 20 to 63 20 to 50 20 to 80 16 to 32 10 to 32 12 to 25 20 to 40 20 to 40 20 to 40 20 to 40 32 to 63 25 to 50 25 to 40 25 to 40 6 to 32 32, 40 Bore size 6, 10 10 16 20 25 20 25 D-H7 D-H7C D-H7BAL D-H7NF D-H7W

LX

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

SMC

depth 3.5 +0.030 0 NN-M5 x 0.8 thread depth 10 B A 5 1 20 9 9 8.5 4.2 B A 8.5 18.5 8.5 18.5 H (NN1) x H G Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 N