Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

527 547 n: Stations (11 stations max.)

CHKD/CHKG

Body mounting bolt tightening torques Tightening torque (Nm) 3.0 4.9 10 20 40 50 80 120 Bore size (mm) Mounting bolt size M5 M5 M6 M8 M10 M12 M14 M16 20 25 32 40 50 63 80 100 Magnetic body (steel plate, etc.) 283 CHKG Series Construction r !0 !1 q y !3 !5 o i !4 !2 u t e w 32 to 100 Without auto switch e 20 to 25 Parts List Replacement Parts/Seal kit Material Seal kit no.

VFR

M5 x 0.8 Rc 21 18.5 11 35 31 26 18.5 22 12 31 31 40 55 36 45 24 44 38 32 38 40 90 77 P A P B A EA B EB Effective area at supply side (mm 2) S at P1 = 0.7 MPa/P2 = 0.5 MPa 31 Effective area at exhaust side (mm 2) S at P2 = 0.5 MPa Note 1) Maximum operating pressure of solenoid valve is 0.9 MPa.

VEX1

cap screw (with spring washer) M5 x 0.8 x 10 (2 pcs.)

Compact Cylinder

1.5 23.5 C1 H1 27 26 11 33.5 M18 x 1.5 28.5 27 26 11 33.5 M18 x 1.5 28.5 X L1 (mm) Bore size (mm) Stroke range (mm) 32 40 50 63 B C D E F H J K L M N OA OB P1 P2 Q A 40 Note 1) 33 Note 1) 13 16 45 6.5 M8 x 1.25 22.5 14 7 34 5.4 5 to 100 M6 x 1 9 M5 x 0.8 M5 x 0.8 2.5 13 16 52 6.5 M8 x 1.25 26 14 7 40 5.4 46.5 39.5 5 to 100 M6 x 1 9 M5 x 0.8 M5 x 0.8 2.5 48.5 Note 2) 40.5 Note 2) 15 20 64

Rotary Cylinder Series MRQ Size: 32, 40 1

range (mm) 8 7 Linear motion parts 6 Linear motion parts Hysteresis (mm) 2 1 1 8.5(9) 11(11.5) 9 11.5 9 11.5 Proper mounting position A (mm) D-F7 /F7 V/J79/J79C/F7 W/ F7 WV/J79W/F7BAL/F7BAVL Rotary motion parts Rotating angle D-A7/A8 D-F79F 40 32 7 4 29 36.5 36 45.5 Rotary Size Rotary motion parts 55 46 10 7 24.5 (25) 32 (32.5) 31.5 (32) 41 (41.5) 28 27 4 3 25 32.5 32 41.5 32 40 32 40 Operating

CQM

M thread TN TF 32 to 50 12 to 25 32 to 50 NN Inch thread Note 3) M thread to be used for without auto switch type of 32, 5 stroke exceptionally. Applicable Auto Switch/Refer to page 7-9-1 for further inforrmation on auto switches.

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

Slider Type/Ball Bushing Bearing

Load Center Offset in Operating Direction (Lo) 25 32 40 Bore size (mm) 144 9 + Lo 275 11 + Lo 520 13 + Lo Allowable load mass (WA) (kg) Bore size (mm) Allowable load mass (WA) (kg) 2 Lo + 1.7 6 5.6 Lo + 2.8 13.34 Lo + 2.9 10 Lo: Distance from center of slide block to load's center of gravity (cm) 15 43.2 Lo + 6 20 46.15 Lo + 3.55 25 80 Lo + 4 32 188.1 Lo + 5.7 40 1514 Model Selection CY1L

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

tolerance Port size Vacuum port, relief port JIS class 2 +1.0 0 mm M5 x 0.8 M5 x 0.8 11 Clean Room Series Microspeed Cylinder Series 10/11 -CM2X Series 10/11 -CM2X How to Order Clean room series 10 11 Mounting Relieving type Vacuum type B L F G BZ Basic Type Axial foot type Front flange type Rear flange type Boss-cut basic type C(D)M2X L 40 10 150 C73 With auto switch (with built-in magnet

S070

lead type VQZ VZ VS 0.1 W with power saving circuit 150 (Lead wire AWG#26) 3.5 27 6 VFN 26 23.5 20.5 3 9.5 28.5 3.5 4-11-5 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 mounting hole 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1

MHZ2/MHZJ2

With Dust Cover Series MHZJ2 MHZJ2-20 Scale: 60% 35 27.6 0.05 18.6 (34.6) 2-M5 x 0.8 thread depth 8 (mounting thread) 4-M5 x 0.8 thread depth 10 (mounting thread) Prepared hole dia. 4.3 through (mounting hole) 4H9 depth 4 +0.030 0 7.50.02 8 0 -0.1 +2.2 0.2 (58) 30 42 32 0.02 16.8 29 +0.052 0 21H9 depth 3 0 -0.05 0 -0.7 18 20 43.5 When closed 16.3 When open 26.3 84.8 2-M5 x 0.8 thread depth

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

thread depth N 2 x M5 thread depth N G CS: Conduit D F K 500 NPT1/2 C H J E IN 2 x Port size 1(IN), 2(OUT) port A B G 2 x M5 thread depth N [mm] Size Port size A B C D E F G H N 20 1/8 14 30 69.2 36 9 18 15 17.5 6.4 1/4 19 40 67.7 22.2 22.2 7.6 3/8 22 48 70.7 11 19 20.6 6 30 1/4 19 40 76.7 42 9 21 22.2 22.2 7.6 3/8 22 48 79.7 11 19 20.6 6 Size Port size Grommet Grommet with PCB Conduit

Compact Cylinder/Guide Rod Type Series CQM

32 40 50 63 80 100 6 8.5 11.5 14.5 18 24 9 13 11 13 17 21 D-P4DWL type is compatible with bore sizes 40 to 100.

Floating Joint

32, 40 40 32, 40 50 50, 63 80 100 100 125 160 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07

Compact Vacuum Unit

Silencer cover (Detachable) V Vacuum pressure switch Release pressure SUP (PD) port 1 ZB0020-K1L(O)Vacuum pump system M5 thread depth 0.158 E F Air pressure SUP Vacuum pressure SUP (PV) port Port open to atmosphere M5 thread depth 0.158 Supply valve 1.28 0.394 PV Release valve 0.04 PD V Vacuum pressure switch 11 Compact Vacuum Unit Series ZB Dimensions: Manifold (inch) 01 M5 ZB31K1 Q1 L(O

Compact Cylinder with Air Cushion

O M J E D B K ( across flats) 11.5 depth 7.5 34 9 25 7 12 YB-03 32, 40 H (With locking) 14.5 depth 8.5 42 11 32 9 12 YB-05 50, 63 18 depth 12 52 13 38 11 16 YB-08 80 d1 d2 21 depth 14 62 17 50 14 19 YB-10 100 L UT Weight (g) Bore size (mm) Part no. RS W T1 T2 V C UA Material: Chrome molybdenum steel (nickel plated) 9 50 80 18 6.5 10 YB-03 32, 40 Part no.

2–4

-RA Both ends tapped (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33 7.5 10.5 45 43 34.4 Rc1/8 NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1