KK/KK13

Body size Part no. 4 6 8 10 6 8 10 12 12 16 4 6 8 10 6 8 10 12 12 16 KK3P-04L -06L -08L -10L KK4P-06L -08L -10L -12L KK6P-12L -16L KK3S-04L -06L -08L -10L KK4S-06L -08L -10L -12L KK6S-12L -16L 1/8 1/8 1/4 1/4 1/2 1/2 Bulkhead type with One-touch fitting Bulkhead type with One-touch fitting Applicable tubing O.D. mm Applicable tubing O.D. mm Body size Part no.

Slider Type Ball Screw Drive/11-LEFS Series

ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEJ LEL 10 10 Suction flow rate: 0 L/min Particle concentration [particles/m3] Particle concentration [particles/m3] LEM ISO Class 5 upper limit Suction flow rate: 0 L/min LEY 10 10 LES ISO Class 5 upper limit Suction flow rate: 10 L/min LEPY LEPS 1000 1000 Suction flow rate: 20 L/min LER ISO Class 4 upper limit ISO Class 4 upper limit

ML1C

15 5 10 1 pc. 2 pcs.

PA300/500/700

VH 9 119.5 (Piping port) Rc 3/8, 1/2 VHS 42 31 9 3(R) 1(P) 3.5 108.5 (Breathing port) M5 x 0.8 A B Body ported: VPA742V41 31.5 NC NO 2(A) 33 40 4.5 2-5.2 52 Switch mark (Mounting hole) (PA port) Rc 1/8 (Mounting groove for M6 thread) 2-R 3.2 2-5.2 Bracket (Mounting hole) PA 63.9 63 63 56.5 38.5 5.5 31.5 2 52 31 74 60 9 119.5 (Piping port) Rc 3/8, 1/2 42 31 9 3(R) 1(P) 3.5 (Breathing port

Fieldbus System

End Plate Model EX600-ED2-l EX600-ED3-l Power specifications Power connector M12 (5-pin) plug 7/8 inch (5-pin) plug Power supply (for Control/Input) 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE Marking, UL (CSA), RoHS compliant Weight 170 g 175 g EX600-ED3-l EX600-ED2-l Handheld

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Description Material ML1C25G ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 TMY-32 RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 TMY-40 RCS-12 GMY40 O-ring O-ring O-ring Needle gasket O-ring O-ring O-ring Tube gasket Cushion seal Piston seal Scraper Bypass gasket O-ring $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Description Material ML1C25G ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 TMY-32 RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 TMY-40 RCS-12 GMY40 O-ring O-ring O-ring Needle gasket O-ring O-ring O-ring Tube gasket Cushion seal Piston seal Scraper Bypass gasket O-ring $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR

Basic Type/Direct Mount Type

60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121 M 3.5 4 5 5 6 7 8 10 10 Z 66 76 94 107 117 130 148 176 188 MM M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 Q 60 68 84 95 105 116 134 159 171 QW 10 14 18 17 20 26 34 48 60 T 14.5 17.5 19 20.5 21.5 24 26 30 32 TC 10.5

Fieldbus System

End Plate EX600-ED2-l EX600-ED3-l Power connector Model specification M12 (5-pin) plug 7/8 inch (5-pin) plug 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Control/Input) Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition Weight 0.4 lbs (170 g) 0.4 lbs (175 g) EX600-ED3-l

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

AS231FG-N02-05 31 48.4 42.6 21 23.9 38.7 31.1 10 18.5 3/16" 11.4 40 33 17 20.2 NPT 1/4 AS331FG-02-06 AS231FG-N02-07 40.4 35 34.4 29.4 25.2 47 45.6 17 25.6 38.5 34.2 6 12.8 1/4" 13.2 60 19 36 18.5 17.5 12.9 18.3 20.6 AS331FG-02-08 AS231FG-N02-09 28.2 50 48.4 18.5 28.2 39.7 35.2 8 15.2 5/16" 15.2 63 12.9 39 48.8 43.8 R 1/4 23 21 19 42.8 37.8 AS331FG-02-10 AS231FG-N02-11 32.6 54.4 47 21 31

Secondary Batteries

, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.

Modular F.R.L. Unit

Model Description AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 G36-10-01 GC3-10AS G36-2-01 GC3-2AS G36-10-01 GC3-10AS G36-2-01 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G-27-10-R1 Note 1) Pressure gauge

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

0.1 ASS 0.2 10 ASR 0 0 0 0 0 0 10 20 5 10 5 10 ASF Number of needle rotations Number of needle rotations Number of needle rotations 15-9-65 Series AS-FM Construction Component Parts No.

Precision Cylinder Series MTS

x 0.5 (port size) 2-M3 x 0.5 (port size for axial piping type MTS8-P) 9 2-M3 x 0.5 Effective length 5 0.2 5 +0.035 +0.025 4 16 0.2 22 12 M2.5 x 0.45 12 41 + Stroke 53 + Stroke 9 15 0.2 9 4-M3 x 0.5, effective length 5 10 15 0.2 Rod end male threads Width across flats 3.5 +0.035 +0.025 4 M3 x 0.5 3.9 M3 x 0.5 6.4 7 8 4 24 5.5 2.4 Stud bolt part number: MT-S8 Rod end nut part number: NTJ-006A

5 Port Solenoid Valve SY Series

SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN202-02 AN200-02 AN200-02 Conditions [When using SGP (steel pipe)] Conditions [When using SGP (steel pipe)] Body ported Base mounted Series CS1 SGP10A x 1 m AS420

VZ100/300/500

Air Fluid Operating pressure range (MPa) 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time (ms) (at the pressure of 0.5 MPa) (1) 10 to 50 (No freezing. Refer to page 4-18-4.) 20 or less Max. operating frequency (Hz) 10 Flow characteristics Refer to the table below.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Description Material ML1C25G ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 TMY-32 RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 TMY-40 RCS-12 GMY40 O-ring O-ring O-ring Needle gasket O-ring O-ring O-ring Tube gasket Cushion seal Piston seal Scraper Bypass gasket O-ring $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR

IDX-OM-W038

IDX-OM-W038 . (17) (17) mm IDH6IDHA6 ( ( 1.25 6.5 Rc1/2 N.C N.O M3 (N.C:) (N.O:) 2 6.5 :1.25m m :M3 Rc1/2 31 15 (N.O) (N O 10 2 244 35 184 392 17 2 1 80 223 321 300 1 485 70 372 568 ( 10) ( 10) 240 2 15 1 306 270 63 IDH Series IDX-OM-W038 . 6.3 6.2.

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 1 0 1 10 CE compliant Series 10-VV5Q11-08C6SV 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.