C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

Electric Rotary Table

q Check the actuator label for model number. This matches the driver. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

Air Cylinder

2 q t w e u y CJP CJ2 JCM CM2 CM3 CG1 CG1 With air cushion CG3 o !4 !0 !5 !1 !3 !2 q t w e r i JMB MB MB1 CA2 CS1 CS2 Component Parts Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 20 CG1WN20Z-PS Set of the nos. !2, !3, !4 No.

LEC-OM069xx

Name Mid-execution Automatic Parameter changes changes Pn401 Torque Reference Filter Time Constant No Yes Pn408 Torque Related Function Switch Yes Yes Pn409 1st Notch Filter Frequency No Yes Pn40A 1st Notch Filter Q Value No No Pn40C 2nd Notch Filter Frequency No No Pn40D 2nd Notch Filter Q Value No No 6-29 7.

CKZ2N

N O P Q 85.0 Part no.

CJ2

(Refer to page 6-3-60.) Standard stroke (mm) Same as the standard. (Refer to page 6-3-60.)

SYJ3000/5000/7000

SYJ7000-22-1 SYJ7000-22-2 V111(T)No. q w e r t y Aluminum die-casted 1/8 1/4 Body Piston plate End cover Piston Spool valve assembly Spool spring Sub-plate u i Pilot valve How to Order Pilot Valve Assembly V111 5 G V115 5 D Rated voltage Coil specifications Light/Surge voltage suppressor 5 6 1 2 24 VDC 12 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 V AC 50/60 Hz] 220 VAC

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

C95

60 80 105 110 115 1, 2 A5 15 + 55 (n 2)/2 20 + 55 (n 2)/2 60 + 55 (n 4)/2 60 + 55 (n 4)/2 80 + 55 (n 4)/2 105 + 55 (n 4)/2 110 + 55 (n 4)/2 115 + 55 (n 4)/2 n A6 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 20 60 70 85 110 115 120 2 20 + 55 (n 2)/2 25 + 55 (n 2)/2 65 + 55 (n 4)/2 70 + 55

Rotary Table/Rack & Pinion Style Series MSQ

Load A Displacement CRB2 MSQB70 MSQB100 CRBU2 80 80 70 70 CRB1 Displacement m Displacement m 60 60 50 50 MSU 40 40 CRJ 30 30 20 20 CRA1 10 10 CRQ2 18 16 14 12 8 6 4 10 2 0 8 6 4 12 10 2 0 Load Nm Load Nm MSQ MSQB200 MSZ 90 80 CRQ2X MSQX Displacement m 70 60 MRQ 50 40 30 20 10 30 25 20 15 10 5 0 Load Nm Rotation Accuracy: Displacement Values at 180 (Reference values) Rotating amount of table

4/5 Port Solenoid Valve

Hz 25 2500 mm 2 200 VAC 50/60 Hz 30 3000 mm 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 50 5000 mm 3 M plug connector 220 VAC 50/60 Hz [230 VAC 50/60 Hz] 4 M8 connector For type W, DC voltage is only available.

Electric Actuators

D 4 4 6 6 Model LXFHAB25--X LXFHAB50--X LXFHAB75--X LXFHAB-100--X B 1 1 2 2 E 60 90 90 90 F 30 60 60 60 G 60 90 90 90 Note) The overall length of an actuator is Stroke + 105.5 + Motor dimension.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

0.4

w e q w VQC1100 VQC1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5

VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

MVGQ

With light: 87.5)] MI W S DC 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz [ ] 4.5 to 50 Hz, 4.2/60 Hz AC Start-up Apparent power (VA) [Current: mA] CEP1 Symbol Specifications (2) 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz [ ] 3.5/50 Hz, 3/60 Hz Tapped hole, drilled hole, pinned hole machined additionally Holding Surge voltage suppressor DC: Diode, AC: ZNR -XC79

Bernoulli Gripper

4 e r t y u q With stoppers i u w 30 40 Basic type With vibration suppression cover: Resin u t y r u q With stoppers i !0 w e 40, 60 20, 30, 40, 60, 80 Basic type With vibration suppression cover: Stainless steel q u t y r With stoppers o i w e u !0 !1 9 Bernoulli Gripper ZNC Series 80 Basic type e !2 q u t y With stoppers o i r w e Component Parts No.

CV/MVGQ

4 7 34 5 13 15.5 28 8 18 57.5 13 26 30 5 8 45 75 60 4 7 40 5.5 13 19.5 33.5 10 22 63.5 17 32 37 6 8 45 75 60 4 7 40 5.5 13 19.5 37.5 12 22 68 17 32 37 6 8 50 82 36 66 5 7 52 7 16 21 46.5 14 24 76 22 41 47.3 8 10 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Bore size (mm) Z NN NA N MM Symbol Q QY Bore (mm) 20

VQZ1000/2000/3000

pilot specifications, refer to page 2-7-60.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30