VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

Shuttle Valve/AND Valve with One-Touch Fittings

How to Order VR 12 1 1 F 06 Body size Applicable tubing outside diameter Metric sizes Inch sizes 1 1/8 standard 3.2 23 04 06 01 03 07 1/8" 5/32" 1/4" 4 6 Use 1/8" tubing for 3.2.

Precision Regulator

5 to 100C) For low temp. environments (30 to 60C) T Note 4) Semi-standard Type of setting L Note 5), 6) 0 1 Note 1) Basic type (Knob) Air operated type Suffix 2 Set pressure range Nil For IR1000/2000 series Port size Bracket, Name plate, Mounting on the opposite side R Note 7) 0 1 2 0.005 to 0.2 MPa 0.01 to 0.4 MPa 0.01 to 0.8 MPa Application Size Symbol IR1000 IR2000 IR3000 01 02 03 04

90

Flow Rate Characteristics Relief Characteristics IR3020-04-A Supply pressure: 0.7 MPa IR3020-04-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 5000 6000 0 0 1000 2000 3000 4000 5000 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure

HEP500-04 Liquid Collector Ejector Type

When the nozzle is clogged : If the nozzle is clogged, loosen the set screw (M3 x 0.5 hexagon socket head screw), remove the nozzle from the body and clean it. 4.Use a nylon tube to connect the liquid collector with the strainer.

HRX-OM-X084

MT.04 Cumulative use time: It occurs at 5,000 hours. (It can be changed within the range of 1 to 9 hour) Notice of dust-proof filter Maintenance MT.05 Cumulative use time: It occurs at 5,000 hours.

HRX-OM-W002

MT.04 Cumulative use time: It occurs at 5,000 hours. (It can be changed within the range of 1 to 9 hour) Notice of dust-proof filter Maintenance MT.05 Cumulative use time: It occurs at 5,000 hours.

HRX-OM-X071

MT.04 Cumulative use time: It occurs at 5,000 hours. (It can be changed within the range of 1 to 9 hour) Notice of dust-proof filter Maintenance MT.05 Cumulative use time: It occurs at 5,000 hours.

VQC

AN400-04 Conditions (With SGP (Stainless steel gas piping)) Direct piping Series CS1 Series MB, CA SGP10A x 1 m AS420-03 AN400-04 VQC4000 Tube x Length Speed controller Silencer 2-2-10 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

ZCUK

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Indicator: S, Control Method: E (Meter-out), Stud Position: A (Right Side), Tube Diameter: 04 (ø4), Thread: R, Port Size: M3 (M3 x 0.5)

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Made to Order Specifications (For details, refer to page 14-20-55.) 01 B 06 B 1 8 3 4 1B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Caution Accessory/Option Combinations Available Not available Depends on model Be sure to read before handling.

Compact Cylinder with Air Cushion

Auto switch mounting Follow the procedures below to mount auto switches. 20 to 100/Direct mount 32 to 100/Rail mount Watchmakers screw driver Auto switch mounting screw (M3 x 0.5 x 10l) Auto switch mounting screw Auto switch spacer Auto switch Auto switch mounting nut Use a tightening torque of 0.5 to 0.7 Nm for auto switch mounting screws.

RQ

Mounting of Auto Switch Follow the procedures below to mount auto switches. 20 to 100/Direct mounting 32 to 100/Rail mounting Watchmakers screwdriver Auto switch mounting screw (M3 x 0.5 x 10l) Auto switch mounting screw Auto switch spacer Auto switch Auto switch mounting nut Use a tightening torque of 0.5 to 0.7 Nm for auto switch mounting screws.

Indicator: S, Control Method: E (Meter-out), Stud Position: B (Left Side), Tube Diameter: 04 (ø4), Thread: R, Port Size: M3 (M3 x 0.5)

PFxx-OMS0001CN

(2 ) (71 ) 0.50.7 Nm M3 -16No.PF-OMS0001CN-A IN8cm 2F.S.

Control Method: E (Meter-out, Gray), Stud Position: A (Right Side), Tube Diameter: 04 (ø4), Thread Type: R, Port Size: M3 (M3 x 0.5)

Control Method: E (Meter-out, Gray), Stud Position: B (Left Side), Tube Diameter: 04 (ø4), Thread Type: R, Port Size: M3 (M3 x 0.5)

Control Method: S (Meter-in, Light Blue), Stud Position: A (Right Side), Tube Diameter: 04 (ø4), Thread Type: R, Port Size: M3 (M3 x 0.5)