Air Fittings Fitting Series For Special Environment

12 25 20.5 17 23.3 10 17 28.5 23 29.0 1 2 KRT10-04S 39.5 67.3 32.5 42.5 22 1 4 3 8 KRT12-02S KRT12-03S 38 39.5 17 24 45.2 17 30.5 1 2 KRT12-04S 25.7 42 69.5 12 22 Note: Fitting cover ordered separately.

VM

1 Mechanical Valves Series VM Mechanical Valves Series VM Mechanical Valves SA VA Model VM1000 VM100 VM200 VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA Dimensions (mm) Side ported 11 x 36 x 16 Bottom ported 11 x 28 x 25 Side ported 17 x 44 x 25 Bottom ported 17 x 44 x 30 25 x 40 x 52 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM Courtesy of Steven Engineering

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

Slider Type Ball Screw Drive/11-LEFS Series

Note 2) Check SpeedWork Load Graph (Guide) on page 42 for details. Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for each 5 m. Note 3) A reference value for correcting an error in reciprocal operation.

Series KP/KPQ/KPG

17 12 50 20.9 40 31.4 25 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Series KP/KPQ/KPG

17 12 50 20.9 40 31.4 25 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

KP/KPQ/KPG

17 12 25 31.4 40 20.9 50 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Vacuum System Peripherals:

17 Date issued: Photo copying this page is recommended.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

17 12 25 31.4 40 20.9 50 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Sine Cylinder Series REC

26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Sine Cylinder Series REC

26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

SFOD-OMT0009CN

*ALARM3 17 1) 7 N.C. *ALARM4 37 1) 27 N.C. -COM3 18 1) 8 N.C. -COM3 19 -COM3 38 1) 28 N.C. -COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.

VXD21/22/23

53 23 25.5 25.5 35 40 40 12 14 14 41.5 44.5 44.5 ( ): N.O. 17-3-41

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 Parts included 11 Gasket 1 11 Gasket 1 11 Gasket 1 11 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 in seal kit 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 Please refer to P19 to 21 for the product construction.

VCA

LVQ LQ LVN TI/ TIL PA PAX PB 17-2-19

VXZ

Refer to page 17-3-65 for ordering a coil only.

IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

Self-seal Fittings Series KC

Nylon Urethane L1 L2 M 1 4 1 4 3 8 3 8 3 8 KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 2.6 32 36 42 79 105 2.6 6.8 16.2 25.6 35.4 M12 1 M14 1 M16 1 M20 1 M22 1 40.5 42.7 49.4 53.9 56.1 14 17 19 24 27 17 17 19 22 24 14.7 14.7 15 14.2 13.7 13 15 17 21 23 18 19 21.5 24 25.5 6.8 13.1 20.4 30.4 Straight: KCH Applicable tube O.D.

Process Valve

For DZ, the length is longer by 17 mm.

Coolant Valve

Refer to back page 50 for Safety Instructions and pages 17 to 19 for 2 Port Solenoid Valve for Fluid Control Precautions.