AME

Air Flow Max. flow line Pressure drop (MPa) Max. air flow rate (m3/min (ANR)) Air flow rate (l /min (ANR)) Model Selection Select the model in accordance with the following procedure taking the inlet pressure and max. air flow into consideration. (Example) Inlet pressure: 0.6 MPa Max. air flow capacity: 5 m3/min (ANR) 1.

RZQ

Switch mounting screws (M3 x 0.5 x 10l) Switch spacer 32, 40 50, 63 RS H A Manufacture of Intermediate Stroke BQ-2 Method Spacers installed in standard stroke body. Switch mounting nut RZQ Ordering Refer to standard part number and ordering on page 10-10-2.

Pin Clamp Cylinder Series CKQ/CLKQ

Hexagon socket head cap screw Round head Phillips screw With spring washer, M3 x 0.5 x 14 L With spring washer, M3 x 0.5 x 16 L Switch mounting fitting Magnetic field resistant auto switch Mounting bracket kit number Items and number of each item Switch mounting bracket x 1 Switch mounting nut x 1 Round head Phillips screw x 1 Hexagon socket head cap screw x 2 Spring washer x 4 BQP1-

3 Position Cylinder Series RZQ

Switch mounting screws (M3 x 0.5 x 10l) Switch spacer 32, 40 50, 63 Manufacture of intermediate strokes BQ-2 Method Spacers installed in standard stroke body. Switch mounting nut Ordering Refer to standard part number and ordering on page 1.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

45 45 50 37 41 41 45 13 17 17 22 26 32 32 41 26 26 26 31 5 6 6 8 8 8 8 10 134 138 140 174 M8 x 1.25 M20 x 1.5 M10 x 1.25 M26 x 1.5 M10 x 1.25 M26 x 1.5 M32 x 2 M14 x 1.5 The bracket is shipped together.

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Ionizer

Recommended tightening torque Thread size 0.61 to 0.63 Nm M3 0.73 to 0.75 Nm M4 Never use this product in locations where the explosion of dust is likely to occur or flammable or explosive gases are used. This can cause fire. 1.3 to 1.5 Nm M5 5. Do not touch the emitter directly with fingers or metalic tools.

Compact Manifold Regulator

Panel cutout dimensions ITVX 28 SMC PVQ K P C U O S H L VY1 23 28 VBA VBAT Plate thickness: Max. 2.1 22 AP100 26 (Max. 28) 42 Through hole for M3 3.2 59.5 73.5 SMC 2 10.5 35 OUT IN 12 743 ARM10 Series Dimensions Panel cutout dimensions ARM10F1-06 08 28 4 x R1 or less 28 to 28.5 IN OUT 37 58 34 23 20 Plate thickness: Max. 2.1 22 5 15 34 14 31 SMC 62 Through hole for M3 3.2 SMC K P U C S O

VQC

Power connector: Franz Binder GesmbH Series723, 5 pins (72309-0115-80-05) Cable side connector example: Franz Binder GesmbH 72309-0114-70-15, etc. DIN type 5 pins No. Function (+) Sensor power supply Description 2 1 SW + Open 2 N.C. 1 Description No.

KR

17 12 57.4 22 45.4 17 28.5 20.9 1 2 KGY12-04 37 57.5 22 68 3 8 KGY16-03 26.5 38 20.9 34 25 81 (81) 113 (113) 65.5 112 16 22 1 2 KGY16-04 41 67 116 Reference dimensions after R thread installation.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M 13 40.5 6 18.5 10 10 12.8 12.8 KB 8 A L 14 44.5 48.5 53.5 57 54 59.5 62.5 4.2 8 17 15.2 20.5 26 18 15.2 KR (R) Connection threads H 10 19 18.5 23 41 29 18.5 KA (R) 12 22 20.9 20.9 24 58 46 2 x Applicable tubing KQG2 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

max (from 3 of graph MY2H/M3) = 60 (Nm) MX M3 = m3 x g x X = 7.525 x 9.8 x 140.1 x 10-3 = 10.33 (Nm) m3 M3 MTS Load factor 3 = M3/M3 max = 10.33/60 = 0.17 MY 5.

Compact

45 L 15 50 CQ-M3 x 50 L 20 55 CQ-M3 x 55 L 25 60 CQ-M3 x 60 L 30 65 CQ-M3 x 65 L 35 70 CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Meter-out Meter-in 0 1 Note) M3 and M5 sizes: s (with seal) is not necessary. Thread type Cylinder side R Tube side Rc Symbol Bore size Metric thread (M3, M5) Nil Symbol Bore size Applicable series Made to Order (Refer to page 523 for details.) Unified thread (10-32 UNF) NPT N G F AS1200-M3 AS1400-M3 M3 M3 x 0.5 Male thread comes with R thread.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

) M3 = m3 x g x X = 6.525 x 9.8 x 138.5 x 103 = 8.86 (Nm) m3 M3 Load factor 3 = M3/M3 max = 8.86/38.7 = 0.23 5.

Low Profile Guide Type

Find the value of M1 max at 300 mm/s in Graph (1). 2a =M1/M1 max =1.47/14 =0.105 M1 L1 M3 = m x g x L2 = 3 x 9.8 x 0.04 = 1.176 [Nm] m x g Investigate M3. M3 Find the value of M3 max at 300 mm/s in Graph (3). 2b = M3/M3 max = 1.176/14 = 0.084 L2 m x g 3.

IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

BA -06 BA -08 BA -10 BA -32 BA -02 BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant to be guaranteed.