Valve Single Unit

SX3000-75-2A SX5000-76-2A SX3000 SX5000 Note) When mounting blanking plate, be sure to mount a short cap. Series SX3000 (8) Model AN203-KM8 AN200-KM10 AN300-KM10 Effective area 14 mm2 A 16 22 25 B 26 53.8 70 C Series Part no.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

CHEMRAZ VMQ FKM for Plasma ULTIC ARMOR To order something else Nil (standard), list the symbols starting with X, followed by each symbol for seal material and then changed parts at last. 3310-75 U1 UA4640 Ex.)

OMU0023

Address Description of bytes tion unit range Input Mode D0410 4 Target position [m] Note 1) 1 Note 1) No D0412 2 Positioning time [0.01s] 1 0 to 6000 No D0413 2 Speed [mm/s] 1 0 to 400 No D0414 2 Acceleration [mm/s2] 1 0 to 60 No D0415 2 Deceleration [mm/s2] 1 0 to 60 No 1 to 20, Pushing speed [mm/s] D0416 2 1 No 32768 to Note2) 32788 Thrust setting value Note 3) More than D0417 2 1 Yes [

CL

CL CL1 Rod Side Flange Style Bore size (mm) MLGC B BZ FT FD FX FZ FY Rod side flange style: CLG1FN Head side flange style: CLG1GN 25 30 30 36 65 75 75 82 38 45 45 52 52 60 60 66 5.5 5.5 6.6 6.6 57.5 6 7 7 8 20 25 32 40 CNG 69 69 76 MNB For long stroke, refer to page 9-2-32.

HRX-OM-Y098

fluid outlet 0.6 60 Pressure [MPa] 0.5 50 Lifting head [m] Usable flow rate range 0.4 40 0.3 30 Circulating fluid return 0.2 20 0.1 10 0 0 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow[L/min] Fig. 8-11 Pump capacity(HRL300-A-20 CH1) 8.5.4 HRL-A-20CH2 0.6 60 0.5 50 Lifting head [m] Pressure [MPa] 0.4 40 Usable flow rate range Circulating fluid outlet 0.3 30 0.2 20 Chiller display

HRX-OM-X037

75 71 Operation manual (for installation/operation) (English 1, Japanese 1) Particle filter set for CH1 Particle filter set for CH2 Accessories Anchor bracket 2pcs.

AC Servo Motor Driver (CC-Link Type)

Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 3000 2000 1000 3750 2500 1250 3375 5250 Feel length multiplication (STM) (Multiplier) PA05 0 0(Less than stroke 1000) / 0001(Stroke 1000 or more) Home position return type PC02 0 3Stopper type Home position return direction PC03 0001 1 (Motor side) Home position return Speed (rpm) PC04 500 75 113 225 60 90 180

IZx-OMT0049

to 150 50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to 2000 300 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 10 200 to 300 200 to 1400 200 to 2000 200 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 15 200 to 300 200 to 1400 150 to 2000 100 to 2000 50 to 125 50 to 1100 50

1.63

0 20 40 60 80 100 Load from lateral direction (N) Load from lateral direction (N) MGPWA25 MGPWA50, 63 0.5 0.5 Plate displacement amount (mm) Plate displacement amount (mm) MGJ 50 63 MGPWA -200 0.4 0.4 MGPWA25-200 JMGP 0.3 0.3 50 63 MGPWA -150 MGPWA25-150 0.2 0.2 MGP 50 63 MGPWA -100 50 63 MGPWA -50 MGPWA25-100 0.1 0.1 MGPW MGPW MGPWA25-50 0 0 MGQ 0 80 20 40 60 0 20 40 60 80 100 Load from

IZx-OMP0064

to 150 50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to 2000 300 to 2000 10 200 to 300 200 to 1400 200 to 2000 200 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 15 200 to 300 200 to 1400 150 to 2000 100 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 20 150 to 250 150 to 1300

AC Servo Motor Driver (Pulse input type/Positioning type)

PA07 1 20 12 6 24 16 8 30 20 10 Feel length multiplication (STM) (Multiplier) PE02 0 0 ((<1000 stroke)/0001 (>1000 stroke) Home position return type PE03 0010 3 (Stopper type) Home position return direction PE03 0010 1 (Motor side) Home position return Speed (rpm) PE04 500 90 150 300 75 113 225 60 90 180 Home position return/JOG operation Accelerationeration/Deceleration time constants (msec

Ejector Valve Unit Series ZYY/ZYX 1

60 60 60 60 60 Air consumption Air consumption 40 40 40 40 40 40 Suction flow rate Suction flow rate 20 20 20 20 20 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 0 0 10 20 30 40 50 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) How to Read Flow Characteristics Graph The flow rate characteristics

AC Servo Motor Driver (CC-Link Type)

Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 3000 2000 1000 3750 2500 1250 3375 5250 Feel length multiplication (STM) (Multiplier) PA05 0 0(Less than stroke 1000) / 0001(Stroke 1000 or more) Home position return type PC02 0 3Stopper type Home position return direction PC03 0001 1 (Motor side) Home position return Speed (rpm) PC04 500 75 113 225 60 90 180

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

However, the piston speed at this time should be adjusted to the minimum speed. 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) 15 + 50 n 2 2 D-B5 D-B6 15 75 10 (n = 2, 4, 6 ) Mounting 75 + 55 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 Caution D-B59W 20 75 15 (n = 2, 4, 6 ) 1.

Ejector Valve Unit Series ZYY/ZYX

Exhaust Characteristics Flow Characteristics -100 -100 -100 -100 Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) -80 -80 -80 -80 Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure Vacuum pressure -60 -60 60 -60 60 -60 Air consumption -40 -40 Air

Mini Free Mount Cylinder

l M5 x 65 l M5 x 70 l M5 x 75 l C D CUJS12-5 -10 -15 -20 -25 -30 CUJS16-5 -10 -15 -20 -25 -30 CUJS20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CUJB12-5 -10 -15 -20 -25 -30 CUJB16-5 -10 -15 -20 -25 -30 CUJB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 25 30 35 40 45 50 25 30 35 40 45 50 30 35 40 45 50 55 60 65 70 75 20 8.5 8.5 M4 x 20 l 7.5 9.5 25 M4 x 25 l 10.5 7.5 25 M5 x 25 l With Auto Switch (Built-in

High Purity Fluoropolymer

36 3/4" 75 M 25 1 49 36 46 39.5 44.5 1" 78.5 Class 6 Inch sizes Connection threads Rc/NPT Model Applicable tubing O.D.

V

Hz 3 110 VAC 50/60 Hz 115 VAC 50/60 Hz 2 200 VAC 50/60 Hz 4 220 VAC 50/60 Hz 230 VAC 50/60 Hz E L E C T R I C A L E N T R Y M A N U A L O V E R R I D E G Grommett (Lead Wire Length: 300mm) H Grommett (Lead Wire Length: 600mm) L L Type Plug with Lead Wire LN L Type Plug without Lead Wire LO L Type Plug without Connector M M Type Plug with Lead Wire MN M Type Plug without Lead Wire MO M Type

Compact Manifold Regulator

Pressure gauge indication range Indication unit ARJ GC3-4A-X2101 0 to 0.4 MPa MPa GC3-10A-X2101 0 to 1.0 MPa Fitting type One-touch fittings for regulator Symbol Nil L1 AR425 to 935 GC3-P4A-X2101 0 to 60 psi Type Straight Elbow psi GC3-P10A-X2101 0 to 150 psi ARX Specifications Fitting size AMR 3% F.S.

Step Motor Driver （ Pulse input type ）

60 60 Moving force 100 100 100 Area1 0.00 0.00 0.00 Area2 0.00 0.00 0.00 In position 1.00 1.00 1.00 90 - LEFB Basic parameter default Model LEFB16 LEFB25 LEFB32 Lead[mm] 48 48 48 Controller ID 1 1 1 IO pattern 1 1 1 Acceleration/ Deceleration pattern 1 1 1 S-motion ratio 0 0 0 Storoke(+) Storoke +2 Storoke +2 Storoke +2 Storoke(-) -2 -2 -2 Maximum speed 1100 1400 1500 Maximum acceleration