Air Slide Table Series MXP

Material of body and guide block is martensitic stainless steel. 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 Stroke adjuster 10 Three types (rubber stopper, metal stopper, shock absorber) are available. 20 With shock absorber 30 40 50 60 70 80 90 Auto switch attachable Highly flexible piping methods 100 Switch rail and magnet (Standard) Without switch rail and magnet

Electric Actuator Triple Axis P&P Unit

1000 1100 1200 1300 1400 1500 90 A0 B0 C0 D0 E0 F0 Matsushita Electric Industrial Co., LTD Mitsubisi Electric Corporation, Yaskawa Electric Corporation, OMRON Corporation Matsushita Electric Industrial Co., LTD Mitsubisi Electric Corporation, Yaskawa Electric Corporation, OMRON Corporation Standard strokes are available in 100 mm increments.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

MX MTS 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 MY With stroke adjuster for auto switches Stroke adjuster CY 10 Three types (rubber stopper, metal stopper, shock absorber) are available.

0.4

Example: -BKN Refer to pages 100 to 107 for manifold option parts.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

SV

200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600

SQ1000/2000

Metal seal Closed center SQ1000 SQ1331 33 or less 3.2 (0.18) 25 or less 100 Rubber seal SQ1430 26 or less 3.2 (0.18) 20 or less 100 Metal seal Exhaust center SQ1431 33 or less 4.5 (0.25) 25 or less 100 Rubber seal SQ1530 26 or less 2.9 (0.16) 20 or less 100 Metal seal Pressure center SQ1531 33 or less 3.2 (0.18) 25 or less 100 Rubber seal Dual 3 port valve A B C SQ1 31 33 or less 3.2 (0.18

IO-Link/ELECTRO-PNEUMATIC REGULATOR

Minimum pressure (F_1) adjusting range Maximum pressure (F_2) adjusting range 100% 120% 90% 100% 10% 0% 0% 0 50 100 0 50 100 (Note 1): F_1 is adjustable in a range from 0% to 90% of the rated value. (DEFAULT VALUE: 0%) (Note 2): The pressure of less than 0% is not output, even if F_1 is adjusted to less than 0%. (Note 3): F_2 is adjustable in a range from 10 to 120% of the rated value.

HRX-OM-M005

Table 7-1 Water Quality Standards Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max. 200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max. 100 Max.50 Total hardness (mgCaCO3/L) Max. 200 Max.70 Calcium hardness (mgCaCO3/L) Max. 150

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

Modular Type Lubricators Series AL

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 950

Digital Flow Monitor

L/min) Switch ON point 90 L/min or more Switch OFF point Below 90 L/min (0 is displayed) -50No.PF-OMU0007-D [F30] Accumulated value hold setting This function enables the accumulated flow value to be stored in permanent memory every 2 or 5 minutes.

Digital Flow Switch

The time from when the flow is applied as a step input (when the flow rate changes from 0% to 100% instantaneously) until the switch output turns ON (OFF) at 90% of the rated flow rate.

Counter/Extension Cable

/Binary code output Output type 5 ms or less (for normal output) Output delay time RS-232C Communication system NPN open collector Max 30 VDC, 50 mA NPN open collector Max 30 VDC, 50 mA 3 PNP open collector Max 30 VDC, 50 mA PNP open collector Max 30 VDC, 50 mA 3 Output transistor mode Power supply voltage 90 to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90.

PA3000/5000/PAX1000

74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 5 Process Pump Air

Series VQ Metal Seal/Rubber Seal Body Ported

See p.1.10-90 for details.

HRX-OM-I051

Table 7-1 Water Quality Standards for Fresh Water (Tap Water) Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) *Circulating fluid 1 to 500 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 2-/L) Max.200 Max.50 Sulfate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (mgCaCO3/L

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

XM, XY

80 40 50 65 70 88 90 P.C.D 27 70 P.C.D 58.7 6 x 6.6 114 P.C.D 92.1 8 x 8.4 95 110 XYA/In-line type C D XLA G Fd C XL (K flange) XLQ XM XY XM XY B DXSA XVD H 45 XGT A CYV E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2 130 178