Vacuum

Flat vyilh rib 26 28 29 29 29 29 29.5 31 31 5 31.5 32 32.5 Deep type 95 95 95 95 107 IPI $enie ffi[r Bulfm Pad Diameters q2O . a25. s32 Pad Diameters a4O. sSO Ftat type Flai type Dep typeZPT4oD only Deep lypeZPT2sD only Flat typrg . Flat with rib Flat type.

Vacuum

Flat vyilh rib 26 28 29 29 29 29 29.5 31 31 5 31.5 32 32.5 Deep type ) 95 95 95 95 10 IPI $enie ffi[r Bulfm Pad Diameters q2O . a25. s32 Pad Diameters a4O. sSO Flai type Ftat type Dep typeZPT4oD only Deep lypeZPT2sD only Flat typrg . Flat with rib Flat type.

Digital Flow Switch (Manifold type)

S 95 Nil P 139 1/2 Remote sensor/ W 139 (symbol 04) 5 to 40 L/min Integrated display type 3/4 (symbol 40) Nil 106 (symbol 06) S 106 Yes P 150 W 150 B: Total length of the supply unit (mm) Unit construction Flow range Port size B Symbol Flow adjustment valve Stop valve Nil 51 1/2 S 51 (symbol 04) 5 to 40 L/min 3/4 (symbol 40) P 95 (symbol 06) W 95 -68No.PF-OMW0004-B Supply unit Unit

LEY-OM007

3 2.5 5 10 4.5 9 18 1 1.5 3 1.2 2.5 5 85% 65% 85% 95% 95% ,[] LEY16*/25*/32*100%LEY16A*150%LEY25A*200% 2mm a.

Refrigerated Thermo-chiller

P. 95 P. 95 P. 96 P. 96 P. 96 P. 97 P. 97 Options Analog Communication . DeviceNet Communication . NPT Fittings . DI Control Kit . Circulating Fluid Automatic Recovery . Specific Product Precautions . P. 98 P. 98 P. 98 P. 98 P. 99 P. 100 to 102 75 Series HRZ Model Selection Guide to Model Selection 1. How much is the temperature in degrees centigrade for the circulating fluid?

Modular F.R.L. Units

55.1 72.6 A3 57 74 74 95 A4 43.2 57.2 57.2 75.2 A1 41.6 55.1 55.1 72.6 77.6 A2 61 76 76 99 104 A1 41.6 55.1 55.1 72.6 77.6 A2 43.2 57.2 57.2 75.2 80.2 A3 57 74 74 95 102 A1 41.6 55.1 55.1 72.6 77.6 A2 61 76 76 99 104 A3 57 74 74 95 102 A1 41.6 55.1 55.1 72.6 77.6 A2 61 76 76 99 104 A3 43.2 57.2 57.2 75.2 80.2 AC20-A AC25-A AC30-A AC40-A AC40-06-A K KS V S KV KSV SV A3 43.2 57.2 75.2

LVQ

(mm) Dimensions H A B C D M N S T U V Model Vm Sm LVQ20m-3 LVQ30m-3 LVQ40m-3 LVQ50m-3 LVQ60-Vm-3 V S 64 77 25.5 46 31.5 58 7 15 83 34.3 10.6 7 V S 83 95 25.5 51 31.5 63 7 15 113.5 36.9 16.5 10 V S 95 109 25.5 51 31.5 63 7 15 119 37.9 22 10 V S 130 141 38 76 44 88 7 20 171.5 64 25 17 150 38 76 44 88 7 20 182.5 66 32 17 LVQ60 available only as V.

VS 8-2/VS 8-4

The dimension is added by 47 mm at 1 piece addition. 7/8 inch connector type 2 x Rc, G (According to ISO1179-1), NPTF 1/2" 3(R) port Rc, G (According to ISO1179-1), NPTF 1/8" Pilot port Rc, G (According to ISO1179-1), NPTF 1/8" Pilot exhaust port M4 x 7 earth thread 56.6 11.5 8 I E 95 65.4 41.2 3/5 3/5 2 2 2 2 14 12 39 4 4 4 4 30 21 1 1 181.5 33.5 24.5 13 17 64.5 27 (n-1) x 27 2 x Rc, G (

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

High Power Cylinder Series RHC

75 25 61 40 D100 0 16 80 10 800.074 26 13 95 90 30 63 25 20 40 37 116 LH LS LT LY LX LZ M MM NE NF S P X Y WH ZZ Bore size (mm) -X 50 M18 x 1.5 73 7.5 10 88.5 53 6.8 to 11.3 30 10 335 52 275 1/2 215 25 27 Individual -X 63 M18 x 1.5 60 80 7.5 342 55 289 10 95 1/2 215 37 10 24.5 27 80 M22 x 1.5 10 308 12 115 75 100 3/4 8.5 to 13.5 40 13 371 65 228 30.5 32 100 M26 x 1.5 139 90 118 10 13 391

Cylinder Speed Checker

DDM Battery powered: 2A dry cell battery x 2, continuous use for 15 hours or more. 1675 Cylinder Speed Checker IN574-95/-73 RoHS How to Order Sensor head + Display part IN574-95 Display part Sensor head IN574-73 Sensor head Speed Measurement Type IN574-95 Model q Sensor head (q Sensor head + w Display part) w Display part w Display part q Sensor head Application example Time Required for

RHC

40 37 65 0.074 0 100 16 110 80 10 13 95 20 25 63 30 90 Up to 1500 116 40 37 80 0.074 0 Data ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 27 ND 25 MM 31 M M18 x 1.5 LZ 7.5 LX 73 LY 53 LT 88.5 LS 10 LH 275 Bore size (mm) 50 52 63 342 10 37 1/2 215 27 24.5 31 M18 x 1.5 7.5 80 60 95 10 289 55 80 371 8.5 to 13.5 13 40 3/4 228 32 30.5 37 M22 x 1.5 10 100 75 115 12 308 65 100 391 13 47 3/4

XL

XLC, XLCV Dimensions (mm) 1in = 25.4mm (b) XLC/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) H J Heater (optional) B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95

Process Pump

PB PAF PAF 4 x 7 mounting hole (Option is selected) Bottom view of body Air operated reset port Rc, NPT, G 1/8" PA PB FLUID OUT Rc, NPT, G 3/8" (102) AIR SUP Rc, NPT, G 1/4" 16 119 106 97 77 43 13 14 Foot (Option) FLUID IN Rc, NPT, G 3/8" AIR EXH Rc, NPT, G 1/4" Silencer: AN20-02 (Option) 63 74 Tube extension: PAF3410P13 P13N P13F 139 152 2 x M5 x 0.8 Thread depth 9 Reset button 139 114 95

High Power Cylinder Series RHC

40 37 80 65 0.074 0 250 to 1000 16 110 80 10 13 95 20 25 63 30 90 116 40 37 100 80 0.074 Bore size (mm) ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 24 ND 25 MM 27.7 M M18 x 1.5 LZ 7.5 LX 73 LY 53 LT 88.5 LS 10 LH 275 52 50 342 10 37 1/2 215 24 24.5 27.7 M18 x 1.5 7.5 80 60 95 10 289 55 63 371 8.5 to 13.5 13 40 3/4 228 32 30.5 37 M22 x 1.5 10 100 75 115 12 308 65 80 391 13 47 3/4 236

High Vacuum Angle Valve, XL Series

XLC, XLCV Dimensions (mm) 1in = 25.4mm (b) XLC/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) H J Heater (optional) B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

Brake mechanism added

12, 16 ) Note 2) 65 + 30 (n 4) 2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 95 100 D-M9A 85 15 80 (n 2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 95 + 40 (n 4) 2 100 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 15 + 40 n (n = 2, 4, 6,

XM, XY

110 XYA/In-line type C D XLA G Fd C XL (K flange) XLQ XM XY XM XY B DXSA XVD H 45 XGT A CYV E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2 130 178 209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65