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Contents 40 CA2Y40Z-PS Piston seal: 1 pc. 50 CA2Y50Z-PS Rod seal: 1 pc. 63 CA2Y63Z-PS Tube gasket: 2 pcs. 80 CA2Y80Z-PS Grease(10g): 1 bag 100 CA2Y100Z-PS When only grease for maintenance is required, order it by the following numbers. Net weight Part No. 5g GR-L-005 10g GR-L-010 150g GR-L-150 C a u t i o n 1 When replacing mounting brackets, use socket wrench.

Table of Contents

Series SZ3000 5 Port Solenoid Valve Serial Transmission Type. 52 53 54 55 56 57 57 59 60 60 61 62 63 64 65 66 67 67 69 70 70 71 72 73 74 75 76 77 77 79 80 80 81 82 83 84 85 87 89 91 97 97 98 100 101 101 102 103 104 105 106 106 107 111 111 114 121 125 130 130 132 134 137 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Process Pump

dB (A) or less (excluding the noise from the quick exhaust and solenoid valve) 80 dB (A) or less (Option: with silencer, AN20) Noise PA PB 0.75 MPa Withstand pressure 50 million cycles (for water) Service life 0 to 90C (No freezing) Operating fluid temperature 0 to 70C (No freezing) Ambient temperature Maximum viscosity 1000 mPas Recommended operation cycle 2 to 4 Hz Weight (without foot

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Select from Normal or Reversed output. 80 mA Switch output 28 VDC Internal voltage drop (Residual voltage) Response time Note 4) NPN output type: 1 V or less (at load current 80 mA) PNP output type: 2 V or less (at load current 80 mA) Select from 0.05 sec., 0.1 sec., 0.5 sec., 1 sec., or 2 sec.

PFxx-OMA1007

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below.

EX510

Hz with a 0.035 mm amplitude or 4.9 m/s2 in each X, Y, Z direction for 2 hrs (De-energized) EX Impact resistance 147 m/s2 in each X, Y, Z direction, 3 times (De-energized) Standard CE marking, UL (CSA) EX510-DX1: 90 g EX510-DX2: 110 g (including accessories) Mass Dimensions EX510-DX1 EX510-DX2 31 19.8 0.2 30 0.2 51 10.5 5.6 DIN rail 5 33.5 13 0.2 40 40 70 0.2 80 80 PWR 2 x M4 Mounting

70pvpump

As a general rule, mesh of about 80 to 100 can be used. 4. Be sure to observe the maximum operating pressure. Operation above the maximum operating pressure can cause damage. In particular, avoid application of pressure above the specifications caused by water hammer.

Suction Guard (Produced upon receipt of order) FHG Series

150 150 190 190 65 65 65 75 75 75 85 85 90 90 90 115 115 115 145 145 6 6 6 6 6 6 8 8 72 72 72 86 86 86 106 106 110 110 110 130 130 130 170 170 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150 150 120 120

76

80 (3B) flange Three-phase 200 VAC (50 Hz) Three-phase 200/220 VAC (60 Hz) IDF190D 1130 1342 190 IDF240D 1518 100 (4B) flange 1766 240 IDF370D 1907 150 (6B) flange 2295 370 IDF100FS 565.0 R2 663.8 100 IDF125FS 709.8 65 (2 1/2B) flange 836.9 125 IDF150FS 882.8 80 (3B) flange 953.4 150 Refer to the separate catalog.

Electric Rotary Table

Load A Displacement LER50 LER10 LER50 (Basic type) LER10 (Basic type) 200 Displacement (m) Displacement (m) 400 150 350 120 10 20 30 40 LERH50 (High precision type) 50 LERH10 (High precision type) 0 20 40 60 80 100 120 0 5 10 15 20 25 30 Load (N) Load (N) LER30 300 LER30 (Basic type) 250 Displacement (m) 200 50 130 150 LERH30 (High precision type) 0 10 20 30 40 50 60 70 Load (N) Deflection

IDU/IDF

P-80 (YG)

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Dimensions inside are for rubber seal. 6-1/2, 3/4 1, 3, 5 port 32 (35) 32 (35) 35 35 3-11-9 10 Series EVS7Dimensions EVS7-10-FG-S-M0 1/2, 3/4-5 port 1, 4, 2, 5, 3 port 200 124 124 45 (14 port) 76 39 37 2-8.5 mouting hole 45 (12 port) 5 1 3 22 (4 port) 22 (2 port) 22 12 2 4 14 14 80 26 33 80 95 50 B A 4 2 19 19 5 1 3 1/8-2 port 12, 14 port 47 47 Manual override 8 71 65 2-8.5 mounting hole

Low Differential Pressure Sensor

(not including sensor accuracy), Response time: 150 ms or less Accuracy (to display value) (25C) 1.0% F.S. or less 1.5% F.S. or less 2.0% F.S. or less 0.5% F.S.

PSE550/300

(Not including sensor accuracy), Response time: 150 ms or less Accuracy (To display value) (25C) 1.0% F .S. or less 1.5% F .S. or less 2.0% F .S. or less PF2 0.5% F .S.

Multistage Ejector Series ZL112.212

(l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure (kPa) Vacuum pressure (kPa) Suction flow rate 250 125 Suction flow rate 80 80 70 70 200 100 60 60 ZA Air consumption Air consumption 150 50 50 75 40 40 100 50 ZX 30 30 20 20 50 25 ZR 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6 ZM Supply pressure (MPa) Supply pressure (MPa) ZMA Flow Characteristics Flow Characteristics

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Positioning distance (mm) 1 10 100 300 600 10 0.5 1.5 10.5 30.5 60.5 100 0.5 0.6 1.5 3.5 6.5 Speed (mm/s) 150 0.5 0.6 1.2 2.5 4.5 300 0.5 0.6 0.9 1.6 2.6 Values will vary slightly depending on the operating conditions.

DOC1023126

(Unit: %) H 150 100 Sets the position loop P constant. *Please perform the actuator operation after changing this parameter setting under the responsibility of the user. Position loop P constant A 150 100 1 to 200 B 150 100 C 90 100 H 130 140 Sets the speed loop P constant.

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 32 to 50 25, 50, 75, 100, 125, 150, 175, 200 Manufacturing of Intermediate Strokes Refer to page 24 for cylinders with auto switches.

CE

Bore size (mm) Stroke (mm) Bore size (mm) Manufacturable stroke range Applicable auto switch Note D25 50 100 75 125 150 175 200 250 300 400 500 12 25 to 150 D-A7/A80 D-A7H/A80H D-A73C/A80C D-A79W D-F7V D-F7/J79 D-J79C D-F7WV D-F7W/J79W D-F7BAL/F7BAVL D-F79F/F7NTL Switch mounting screw (M3 x 0.5 x 8l ) Square nut 12 20 -X BQ-1 20 25 to 300 32 2025 to 400 40 25 to 600 32 40 50 63 Switch mounting

LG1H

Bottom Mount LG1H21/ With coupling 8(4) x Mounting hole 6.6 95() 95(170) A() B() 95(150) 10 Long positioning hole A B A B Stroke Stroke 100 600 480 555 200 80 155 700 580 655 30 300 180 255 800 680 755 M6 bolt 10 + plate thickness 400 280 355 900 780 855 500 380 455 1000 880 955 Positioning hole 2 x 8H10 Dimensions inside ( ) are for a 100 mm stroke. 57 Series LG1H Deflection Data Deflection