REA/REB

80 3.

LEC-OM07605CN

[r/min] 100% [0.1%] [0.1%] (1 pulse) 1 [pulse] (100 pulses) 100 [100 pulses] [r/min] [V] 15 [0.1%] ABS [rev] 1 1 [16 pulses] 1 [] 2 1 [] UF/B U VF/B V % [0.1%] [1.125 kpps] () [r/min] (100 pulses) [100 pulses] [r/min] (100 pulses) [100 pulses] [] [] %[AL. 50 1][AL. 51 2]0% [0.1%] 0 pulse [pulse] 1 1INCZ 0ABS [pulse] 2 [pulse] 1 [] 2 1 [] 8 69 8.

Compact Manifold Regulator Series ARM5

100 0 50 100 150 Flow rate l/min (ANR) Flow rate l/min (ANR) ARM10F-07 ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.5 MPa Condition: Inlet pressure 0.7 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow

Cylinder with lock

Bore size (mm) Bolt Hexagon wrench size Tightening torque (Nm) 32, 40 MB-32-48-C1247 4 5.1 50, 63 MB-50-48-C1249 5 11 80, 100 Foot MB-80-48AC1251 6 25 Other MB-80-48BC1251 5) When replacing the support brackets, the tie-rod nuts on the cylinder body will be loosened.

CC

135 50 24 40 40 28 100 27 1 115 62 180.5 124.9 CCVL02-lG-S 3/4 66 107 116 135 50 24 40 40 28 100 27 2 135 80 180.5 132.8 CCVLl1-lG-S M6 X 1 10.5 to 12.5 3/4 66 107 116 135 50 24 40 40 28 100 27 1 135 80 115 180.5 124.9 CCVLl2-lG-S 3/4 66 107 116 135 50 24 40 40 28 CCVLl3-lG-S 100 27 1 135 80 115 180.5 124.9 3/4 66 107 CCVLl0-S 116 50 40 28 100 27 135 80 115 *Pitch of mounting

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load weight/MY2HT (Double axis) MY2HT/m1 MY2HT/m2 MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 MY2HT40 MY2HT40 MY2HT40 Load mass kg Load mass kg Load mass kg 10 10 10 MY2HT25 MY2HT25 MY2HT25 5 5 5 4 4 4 MY2HT16 MY2HT16 MY2HT16 3 3 3 2 2 2 1 100 200 300 400500 1000 1500 1 100 200 300 400500 1000

MHZ2/MHZJ2

Pressure 0.7MPa 0.6MPa 0.6MPa 50 80 0.5MPa Gripping force N 0.5MPa Gripping force N 40 60 0.4MPa 0.4MPa 0.3MPa 30 0.3MPa L 40 20 0.2MPa 0.2MPa 20 10 Internal gripping 0 20 40 60 80 0 20 40 60 80 100 MHZ2/Standard Gripping point L mm Gripping point L mm MHZ 2-25D MHZ 2-25D 160 100 Pressure 0.7MPa Pressure 0.7MPa 140 0.6MPa 0.6MPa 80 120 L 0.5MPa Gripping force N 0.5MPa Gripping force N 100

PFxx-OMY0005

(Displays 0 when the value is below 30 L/min) 80 to 2100 L/min 40 to 1050 L/min (Displays 0 when the value is below 80 L/min) 4.0 0 to 4%F.S. (Displays 0 when the value is below 40 L/min) 100 to 2100 L/min 50 to 1050 L/min (Displays 0 when the value is below 100 L/min) 5.0 0 to 5%F.S.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

to 200 2 phase to 200 5 phase to 100 2 phase to 30 5 phase to 30 2 phase to 80 5 phase to 80 2 phase to 100 LXSH5SB LXSH2SB LXSH5SA LXSH2SA LXSH5BC LXSH2BC LXSH5BD LXSH2BD LXSH5SB-B LXSH2SB-B LXSH5SA-B LXSH2SA-B LXSH5BC-B LXSH2BC-B LXSH5BD-B LXSH2BD-B 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Sanyo Denki Co., Ltd.

Electric Actuators

Ball screw 0.03 80 3 100 Slide screw 0.05 200 2 Guide rod type Series LXP 200 3 Slide screw 0.05 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 Sanyo Denki Co., Ltd. 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 High rigidity slide table type Series LXS 200 4.5 Slide screw

Modular F.R.L. Units

P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for all equipment!

SYJ3000/5000/7000

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.

MRQ

Size/Standard stroke (mm) Angle of rotation 32 40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 A B 80 to 100 170 to 190 Refer to p.1.5-18 and 1.5-19 for middle and long strokes other than standard stroke.

Compact 5-Port Solenoid Valve

Can drive 40*1 bore cylinders Can drive 50*1 bore cylinders Can drive 80*1 bore cylinders JSY1000 JSY3000 JSY5000 6.4 mm 10 mm 15 mm A, B port size: 2, 4, 6 A, B port size: 6, 8 A, B port size: 10, 12 6 One-touch fitting 12 One-touch fitting 8 One-touch fitting 540 550 520 63 25 40 Bore size [mm] Bore size [mm] Bore size [mm] 360 310 430 80 40 50 100 140 110 160 63 100 100 300 500 100 300

Sine Rodless Cylinder Series REA/REB

80 3.

MY1

Series: Bore size 10 16 20 25 32 40 50 63 80 100 M C Slide bearing guide type Cam follower guide type Stroke adjusting unit Combination Symbol Mounting pcs.

XL-OMY0002

30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002

High Vacuum L Type Valve

H 5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 200 VAC 800/40 1600/80 1600/80 2400/130 consumption (W) Item XL-80 XL-100 XL-160 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 2 pcs. 3 pcs.

LEY-OM007

g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 80.00 3000 3000 80 40 30 100 70.00 100.00 25.00 No.00[mm] 80[mm] 1AREA [mm] k [mm] c [mm/s] b [mm/s] h 100 30 0 g [%] 80 INP 0 [%] f 40 40[%] INPON ON INP OFF P.41 7.2 0 10 20 30 40 50 60 70 80 90 100 [mm] 102 2AREA AREA1 2 [mm] k [mm] c [mm/s] b [mm/s] h 100 30 0 g [%] 80 INP 40 0 [%] f 170[mm] 2100[mm] AREAON

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note 2) Refer to Manifold Option on page 100.