Series IDG

) With dew point indicator 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 5 S Standard equipment 10 20 30 50 60 75 100 Note) In case of two or more options, indicate them in alphabetical order.

Compact Cylinder with Air Cushion

+ Stroke Bore size (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 L1 N RR Rod end male threads 63 33.5 M10 x 1.5 14 80 43.5 M12 x 1.75 18 100 43.5 M12 x 1.75 22 Refer to page 11 for details on rod end nut and accessories.

RQ

(mm) CD hole H10 Shaft d9 CL CD CT CU CW CX CZ L A B 63 107 55 30 to 100 93 14 8 20 30 22 44 8 80 129.5 63.5 40 to 100 111.5 18 10 27 38 28 56 10 100 155 76 L CU CW RR 40 to 100 133 22 13 31 45 32 64 12 +0.4 +0.2 0.1 0.3 CX CZ B + Stroke CL + Stroke A + Stroke Bore size (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 L1 N RR Rod end male thread 63 33.5 M10 x 1.5

LG1H

Positioning distance (mm) 1000 500 100 10 1 10 100.5 50.5 10.5 1.5 0.5 100 10.5 5.5 1.5 0.6 0.5 Speed (mm/s) 500 2.7 1.7 0.9 0.6 0.5 1000 1.9 1.4 0.9 0.6 0.5 A B C D Values will vary slightly depending on the operating conditions.

Vacuum Unit

Model (Sensor unit: Standard model number) ZK2-PS1-A (PSE541) ZK2-PS3-A (PSE543) Rated pressure range 0 to 101 kPa 100 to 100 kPa Proof pressure 500 kPa Output voltage 1 to 5 VDC Output impedance Approx. 1 k Power supply voltage 10 to 24 VDC 10%, Ripple (p-p) 10% or less Current consumption 15 mA or less Accuracy 2% F.S. (Ambient temperature at 25C) Linearity 0.4% F.S.

JA/JAH/JB/JS

8-125 10-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

JA/JAH/JB/JS

8-125 10-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston

Auto Switch Guide

mA or less Load voltage 28 VDC or less Load current 40 mA or less Internal voltage drop 1.5 V or less (0.8 V or less at 10 mA) Leakage current 100 A or less at 24 VDC Indicator light Red LED lights when ON.

MVGQ

110 M8 x 1.25 11 17 25 90 26 54 44 16 8 51 CC 25, 50, 75, 100, Series VZ5000 50 140 44 M10 x 1.5 25 M10 x 1.5 32.5 40 120 56 138 10 124 M10 x 1.5 12.5 17 29 100 30 56 44 20 10 59 125, 150, 175, 200 63 150 44 M10 x 1.5 25 M10 x 1.5 29.8 50 130 69 148 10 132 M10 x 1.5 15 19 35.5 110 36.5 61 49 20 10 72 RB Note 1) It is possible to manufacture the intermediate strokes other than the standard

Rotary Table/Rack & Pinion Style Series MSQ

3 15.5 3H9 3 280 Rotary Table/Rack & Pinion Style Series MSQ Size: 10, 20, 30, 50, 70, 100, 200 How to Order CRB2 CRBU2 Size 10 20 30 50 CRB1 MSU CRJ MSQ A 10 A M9BW High Precision Type CRA1 MSQ B 10 A M9BW Basic Type CRQ2 Thread type MSQ Size End port type Size 10, 20 30, 50, 70, 100, 200 10 20 30 50 70 100 200 Nil Nil -XF -XN M 5 Rc 1/8 G 1/8 NPT 1/8 MSZ CRQ2X MSQX Side ports are all

MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

IZx-OMT0049

200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 1s 150 150 2s 200 200 0.5s 1s 2s 250

Rotary Clamp Cylinders

Operating range Cylinder model C D 8 8 8 8 Mounting bolt size M3 x 50 L M3 x 60 L M3 x 50 L M3 x 60 L M5 x 75 L M5 x 85 L M5 x 75 L M5 x 85 L M5 x 85 L M5 x 95 L M5 x 75 L M5 x 85 L M6 x 95 L M6 x 130 L M8 x 100 L M8 x 130 L 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20

Auto Switch Guide

mA or less Load voltage 28 VDC or less Load current 40 mA or less Internal voltage drop 1.5 V or less (0.8 V or less at 10 mA) Leakage current 100 A or less at 24 VDC Indicator light Red LED lights when ON.

Auto Switch Guide

mA or less Load voltage 28 VDC or less Load current 40 mA or less Internal voltage drop 1.5 V or less (0.8 V or less at 10 mA) Leakage current 100 A or less at 24 VDC Indicator light Red LED lights when ON.

5 Port Solenoid Valve Series VQZ1000/2000/3000

200 100 0 SV VQZ2121-C6 SYJ SZ 800 700 600 500 400 300 200 100 0 VP4 VQZ3121-C6 S0700 VQ Base Mounted Bore size VQ4 Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series VQ5 6 10 16 20 25 32 40 40 50 63 80 100 VQC 800 700 600 500 400 300 200

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Operation e [Specify Step No.1 to input the DRIVE signal.] 100 Absolute: 10 10 Operation r [Specify Step No.0 to input the DRIVE signal.]

Compact Cylinder/Guide Rod Type Series CQM

-15 -20 -25 -30 CDQMB165 -10 -15 -20 -25 -30 CDQMB205 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB255 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB325 10 15 20 25 30 35 40 45 50 75 -100 CDQMB405 10 15 20 25 30 35 40 45 50 75 -100 CDQMB5010 15 20 25 30 35 40 45 50 75 -100 CDQMB6310 15 20 25 30 35 40 45 50 75 -100 CDQMB8010 15 20 25 30 35 40 45 50 75 -100 CDQMB10010 15 20 25 30 35 40 45 50 75 -100

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Rod end thread Nil F Male rod end Female rod end Model Cushion Auto switch mounting Bore size (mm) Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-CG1RN20 10-CG1RN25 20 25 25, 50, 75, 100, 125, 150 25, 50, 75, 100, 125, 150, 200 Relief type Vacuum suction type 1/8 10-CG1RN32 10-CG1RN40 32 40 25, 50, 75, 100, 125, 150, 200, 250, 300 10-CG1RN50 10-CG1RN63 11-CG1RN20 11