Heatless Air Dryer ID Series

45 75 75 520 615 850 961 128.5 128.5 243.5 243.5 59.5 59.5 66.5 66.5 95 95 95 95 134.5 134.5 183 183 222 222 302 302 59.5 59.5 88 88 9 9 9 9 136 ID Series Specific Product Precautions Be sure to read this before handling the products.

High Vacuum L Type Valve

Vibration resistance allows for normal operation of up to 30m/s2 (45 to 250Hz). Be advised that continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibration or impacts. 5 XL-OMS0001-B High temperature type (temperature specification / H0 H4 H5) 1.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP 6 3 11-/22-MXP 6 5 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid state switch D-M9B, D-M9N Reed switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45

Tamper Proof and Flat Head Screw

Flow direction symbols on body Flow Rate and Effective Area Meter-out type Meter-in type ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 4, 6 8, 10 1/8 5/32 3/16 1/4 6, 8 6 Metric sizes Symbol JIS symbol 1/4 5/16 3/8 Tubing O.D. 3/16 1/4 Inch sizes 1/4 5/16 3/8 3/8 19.8 flow Flow rate l/min (ANR) {Nl/min} 1200 1300 175 295 350 600 9.1 700 75 500 Controlled (Free) Effective

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Standard strokes (mm) Bore sizes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Example) For CQ2XB40-57D, an 18mm spacer is installed inside a standard stroke CQ2XB40-75D cylinder. Specific Product Precautions Be sure to read before handling. Refer to pages 15 to 24 for safety instructions and precautions.

End Lock Cylinder Series CBG1

(Refer to series CG1 catalog E216-B page 45.) Minimum Strokes for Auto Switch Mounting Rod Boot Material Max. operating temp.

Compact Cylinder High Magnetic Field Design CDQ2BP Series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Max. operating frequency (cycles/min) 80 70 45 25 10 Extended 1.96 4.22 6.86 8.34 8.83 Spring force (N) Compressed 4.22 6.86 15.98 20.50 20.01 Operating temperature range (C) 5 to 60 Standard strokes Weights Unit: kg Stroke adjusting unit weight (per unit) Bore size (mm) Maximum manufacturable stroke (mm) Standard stroke (mm) Additional weight per 50mm of stroke Bore size (mm) Model Basic

IDX-OM-U010

Coefficient factors Inlet air temperature (oC) 35 40 45 50 55 60 65 70 75 80 1.58 1.46 1.09 1.00 0.79 0.64 0.55 0.51 0.49 0.47 Inlet air pressure (MPa) 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 to 1.6 0.67 0.79 0.88 0.91 1.00 1.02 1.04 1.09 Ambient temperature (oC) 20 25 30 35 40 45 1.19 1.13 1.06 1.00 0.90 0.77 Calculation example: The air flow capacity when the dew point of IDFC60 is set to 10 oC

PSxx-OMU0005CN

.=1.1000.01=0.011[MPa]) R.D. 1.000[MPa]5R.D.1.000[MPa]50.05[MPa] 0.800[MPa]5R.D.0.800[MPa]50.04[MPa] ON/OFF () (34 ) ON OFF 34 75 75 ON OFF Hysteresis / () () 25[]ON-OFF () -11No.PS-OMU0005CN-C NPN () () ()()( ) () ON ON 0 (1k1MA/D 5V A/D 5(V)1(M)/(1(k)+1(M)) 4.995(V)0.005V ) 34 ON-OFF ON ( )(P1L~P1H) ON (34 ) () "digit" () 0 -12No.PS-OMU0005CN-C () SI ON/OFF ON-OFF

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Metal parts Cable length (L) 6.4 M12 RJ-45 010 1000 mm 020 2000 mm 030 3000 mm 050 5000 mm 100 10 mm Type 1 Type 2 Type 3 Type 1 Type 2 47.3 44 L Core wire color Signal name Terminal no.

VCC

(O-ring part number: See page 658.) q Loosen the mounting nut with a tool to remove. w Remove the indicator lamp cover. e Turn 45 to 90 (idle turn) clockwise with a tool (to avoid O-ring adhesion). r Pull out the valve straight. How to Attach the Valve Apply vaseline. Apply vaseline (commercially available) on the O-ring surface, and insert straight.

AP500

psig (0.52 MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78

VXA21/22

Refer to p.4.1-74, 4.1-75 for specifications and models.

CDQ2BP series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

Direct Solenoid

(OptionsT& POnly) ParlNo, Portin9 No. of Ports "xx" sP01 'r 1 %,,NPTFSidE 5 4 1 sP0112 %"NPTFSidE 42 sPot 13 /s' NPTF SidLe (5); %" NPTF Ebtlom 1 0 43 sP0114 Ya" N PTF Bottom 5 44 sP0115 3,6" N PTF Side 5 45 MBA4010-02Y." NPTF Side 2 1 2 MBA40r r -02 %" NPTF Sid; 7." Bottom 1 4 MBA4210-02 %" NPTF Side (2); 7."

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

60 65 75 17.7 25 25 31.4 59 65 68 77 15 20.5 23 26.5 3.5 4.5 4.5 5.5 M5 0.8 8 10 10 12 M8 x 1 34 37 40 46 13 12 14 15 3H9 4H9 4H9 5H9 3H9 4H9 4H9 5H9 M5 x 0.8 19 24 28 33 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 M10 x 1.5 M5 x 0.8 M6 1 M10 x 1 M6 x 1 M10 x 1.5 Rc1/8 M6 1 M10 x 1 M6 x 1 M12 x 1.75 Rc1/8 M8 1.25 M14 x 1.5 M8 x 1.25 913

MY1

When exceeding the air cushion stroke ranges shown on page 28, the piston speed should be 100 to 200mm/s. 1500 Max. operating frequency (cycle/min) 70 45 25 80 Extended 4.22 6.86 8.34 1.96 Spring force (N) Note 2) The piston speed is 100 to 1000mm/s for centralized piping.

ML2B

Theoretical Output CE1 (N) Operating pressure (MPa) Bore size (mm) Piston area (mm2) 0.2 98 161 251 CE2 0.8 0.7 343 563 879 0.6 294 483 754 0.5 245 402 628 0.4 196 322 502 0.3 147 241 377 Stroke Adjusting Unit Specifications 25 32 40 490 804 1256 392 ML2B 643 25 RB1007 5.9 7 1500 70 4.22 6.86 32 RB1412 19.6 12 1500 45 6.86 15.98 40 RB1412 19.6 12 1500 45 6.86 15.98 5 to 60 Applicable bore

HRS100/150

Adjuster foot Unfixed caster (Caster O.D.: 75) Fig. 2 Caster adjuster-foot bracket (2 pcs.) Fixing bolt (M8) 118 A B Fig. 1 Mounting view Fig. 3 Fixing bolt (8 pcs.) 113 HRS100/150 Series e Electric Conductivity Control Set The set indicates and controls the electric conductivity of the circulating fluid. Refer to the Operation Manual for details. Part no.