RHC

25 1500 up to 700 250 Made to Order (Refer to page 1882 for details.) 32 1500 up to 1000 250 40 1500 up to 1000 250 Symbol Specification Made of stainless steel XC6 50 1500 up to 1200 250 63 1500 up to 1200 250 80 1500 up to 1400 250 100 1500 up to 1500 250 Note 1) Strokes shorter than the recommended minimum stroke (1 to 249 st) can be manufactured, but cushion capability may not be satisfied

AC Servo Motor Driver (CC-Link Type ）

OPERATION 5 1 to 5 -60 5.1 Switching power on for the first time . 5 2 5.1.1 Startup procedure . 5 2 5.1.2 Wiring check . 5 3 5.1.3 Surrounding environment . 5 4 5.2 Startup . 5 5 5.2.1 Power on and off procedures . 5 5 5.2.2 Stop . 5 5 5.2.3 Test operation. 5 6 5.2.4 Parameter setting . 5 7 5.2.5 Point table setting . 5 8 5.2.6 Actual operation . 5 8 5.3 Driver display . 5 9 5.4 Automatic

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

5 !

Table of Contents

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

SYJ3000/5000/7000

For SYJ5000, refer to page 1-5-41, and for SYJ7000, refer to page 1-5-64.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

5/16'' EX510 Gateway-type Serial Transmission System Type 20SA 5 port body ported 10-SYJ5000 R P R P. 325 Type 21SA 5 port body ported 10-SYJ3000 P. 297 10-SYJ7000 R P P. 355 Type 32SA 4 port base mounted 10-SYJ3000 R P P. 298 Type 41SA 5 port base mounted 10-SYJ5000 P. 326 10-SYJ7000 P R P. 356 Type 42SA 5 port base mounted 10-SYJ5000 R P P. 326 Type 43SA 5 port base mounted 10-SYJ5000 P

LX

bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction

LX

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

5 !6 No.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

station 5 station 5 station 5 station VFS Connector terminal no.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Mass (g) D-B30 D-B30J D-B31 D-B31J D-B35 D-B35J Auto switch model 190 250 190 250 190 250 0.5 Lead wire length (m) Auto Switch Internal Circuit 3 368 368 368 D-B30 5 462 462 462 Contacts protection resistance Brown (Terminal 1) Blue (Terminal 2) Contacts (Magnetism detection) Lead wire length In case of the grommet type (J type), the lead wire length is 0.5 m.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

-APm-S M12, 5 pins, A-coded, Socket, Straight 1 m, 5 m PROFINET @7 EX500-APm-A M12, 5 pins, A-coded, Socket, Angle EtherCAT K @8 PCA-140180m M12, 5 pins, A-coded, Socket, Straight, SPEEDCON 1.5 m, 3 m, 5 m DeviceNet EX260 PROFIBUS DP CC-Link @9 EX9-ACm-1 M12, 5 pins, B-coded, Socket, Straight 1 m, 3 m, 5 m K #0 PCA-140180m M12, 5 pins, B-coded, Socket, Straight, SPEEDCON 1.5 m, 3 m, 5 m DeviceNet

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

). 5 15 5.

Stability of suction position,

/With Male Thread Adapter: Vacuum Inlet Lateral Pad form Bellows type with groove ZP3E-Y32BMl-AL14 ZP3E-Y40BMl-AL14 ZP3E-Y50BMl-AL14 M14 x 1 Width across flats 19 Width across flats 19 M14 x 1 M14 x 1 Width across flats 19 M5 x 0.8/ Effective thread depth 5 5 5 26.5 44.1 69.1 25 M5 x 0.8/ Effective thread depth 5 23 40.6 65.6 25 5 5 M5 x 0.8/ Effective thread depth 5 21 38.6 63.6 25 5 5 M10

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

Solid State Auto Switches

250 250 Lead wire length D-B31 3 m (L) 268 268 268 5 m (Z) 462 462 462 Contacts protection resistance () () Reed switch Neon bulb Current limiting resistance Lead wire length In case of the grommet type (J type), the lead wire length is 0.5 m.

4/5 Port Air Operated Valve Series SYJA3000

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

IIIIIII

0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40) 1 4 2 (36) 1 2 6 (321 1 m (30 s) o24 r6t Millimaters in Parentheses Millimetsrs in Parenthess N\rzM450-N01-00 M5 xo.8 F O F 3.53 lbs (1 6 Ko) P.T. 0.04 in. (1.0 mm) A ts IJ E r G H K M N P R 5 T U X 3 7 2 94 5) 3.58 (91) 0.50 128 1 5 0 (38) 0 8 9 '22 5) 1 0 5 267 1 4 2 (36) 0.54 0 6 7 (17\ 0 9 2

Mechanical Valves Series NVM, NVFM, NVZNI

0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40) 1 4 2 (36) 1 2 6 (321 1 m (30 s) o24 r6t Millimaters in Parentheses Millimetsrs in Parenthess N\rzM450-N01-00 M5 xo.8 F O F 3.53 lbs (1 6 Ko) P.T. 0.04 in. (1.0 mm) A ts IJ E r G H K M N P R 5 T U X 3 7 2 94 5) 3.58 (91) 0.50 128 1 5 0 (38) 0 8 9 '22 5) 1 0 5 267 1 4 2 (36) 0.54 0 6 7 (17\ 0 9 2