VFR

(4) Weight (kg) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size Type of actuation C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv (B) (A) 4 2 (B) (A) 4 2 Plug-in Non plug-in 2 position 3 position 4.73 (4.56) VFR611 VFR610 40 0.12 9.1 41 0.15 9.6 2 Single 3 4 100 or less (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 2 100 or less 4.78 (4.61) 40 0.14 9.2 41 0.17 9.7 VFR621 VFR620 3 4 Double Double Exhaust

Step Motor Driver （ Pulse input type ）

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

Combination Cylinder

Note) Contact SMC if the fine lock-up unit must be disassembled. 3.1-54 Lock-up Cylinder/Double Acting Single Rod Series CL1 Basic/(B) A Lock-up at piston forward B Lock-up at piston backward 40 to 100 With rod boot CL MLG CNA CNG MNB CNS CLS 125 to 160 CB CV/MVG With rod boot CXW CXS CXT MX MXU MXH MXS MXQ MXF MXW (mm) MXP Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 AL B B1

MB1

to 800 to 1000 to 1000 to 1000 to 1000 B FD FE FT FX FY FZ Fd Port Cushion valve 32 40 50 63 80 100 4-FD 50 55 70 80 100 120 3 3 2 2 4 4 10 10 12 12 16 16 64 72 90 100 126 150 32 36 45 50 63 75 79 90 110 120 153 178 25 31 38.5 39.5 45.5 54 7 9 9 9 12 14 Fd B FY FT FE FX FZ Without air cushion Rear flange type/(G) Bore size (mm) ZZ Cushion valve Port 4-FD 32 40 50, 63 80, 100 147 151 172

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

(4) Mass (kg) Type of actuation Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Plug-in Non plug-in (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 2 position 3 position 2 position 3 position 4.73 (4.56) VFR610 VFR611 0.12 9.1 41 0.15 9.6 2 40 Single 3 4 100 or less Double Exhaust center 2 100 or less 4.78 (4.61) VFR620 VFR621 0.17 9.7 0.14 9.2 41 40 3 4 Double

Dual Rod Cylinder Series CXSJ/CXS

90 40 35 30 25 20 15 100 10 45 50 60 70 75 80 90 Model CXS10 CXS15 CXSJ 30 40 50 97 92 87 82 102 107 112 117 122 132 142 147 95 90 85 80 75 70 65 100 105 115 125 130 55 45 25 35 45 99 94 89 109 114 119 124 129 139 149 154 104 159 169 179 95 90 85 80 75 70 105 110 120 130 135 100 140 150 160 CXS D-X Individual -X 567 Series CXS Dimensions: 20, 25, 32 ZZ Stroke J SS K B M 1 D I Z L C 1

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

How to Order CP96S B W J 32 100 C CP96SD B W J S 32 100 M9BW C With auto switch With auto switch (Built-in magnet) Number of auto switches Mounting B Basic L Axial foot F Rod flange G Head flange C Single clevis D Double clevis Bore size Nil 2 S 1 3 3 n n 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm * Mounting brackets are shipped together, but not assembled.

Environment

LEFS16/Ball Screw Drive Horizontal Vertical 16 6 14 Lead B Lead B 12 Work load: W [kg] Work load: W [kg] 4 10 Lead A 8 Lead A 6 2 4 2 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 700 800 Speed: V [mm/s] Speed: V [mm/s] LEFS25/Ball Screw Drive Horizontal Vertical 20 30 Lead B 25 15 Work load: W [kg] Work load: W [kg] Lead B 20 10 15 Lead A Lead A 10 5 Lead H Lead H 5 0 0 0 100 200

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 80 16 14 12 10 9.5 7.5 11.5 9.5 9 7 6 4 6.5 4.5 12.5 10.5 8 6 10 8 17.5 15.5 100 17.5 16.5 13.5 12.5 11 10 13 12 10.5 9.5 7.5 6.5 8 7 14 13 9.5

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

4/2 (P A/B) 4, 2 (A, B) 1, 5, 3 (P, EA, EB) 4/2 5/3 (A/B EA/EB) M8 connector 90 108 L/M plug connector 86 100 DIN terminal 107 142 Grommet Cv C [dm 3/(sbar)] Cv C [dm 3/(sbar)] b b Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust

NCQ8

for Stroke End Detection In-line D-A9 D-M9 D-M9W Perpendicular D-A9V D-M9V D-M9WV 056 B A B A HS HS B A B A 075, 106 HS B A B A 150, 200, 250, 300, 400 Note) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

C95

125 100 Without auto switch 125 C95SD B 100 Number of auto switches A53 S With auto switch 2 pcs. 1 pc. 3 pcs. n pcs.

NCM

PILOT B-DIA.

Guide Cylinder Series MGG

C D 4 x O T Q 2 x P (Rc, NPT, G) S W K L E B U AA A R AP I X AB Y + Stroke J V Z + Stroke MGJ AC AD 8 x AF MGP MGQ AE MGG MGC 100 piston rod end connection MGF MGZ MGT (mm) Bore size (mm) 63 80 100 Stroke range (mm) A AA AB AC AD AE AF AP B C D E F G H I J K L M N 75, 100 125, 150 200, 250 300 200 25 25 15 170 50 60 228 30 140 200 13.5 65 117 135 180 66 100 M12 x 1.75 depth 24 M16 x 2 depth

LEC-OM07605CN

(100 pulse) AL.51 CSON EMG ALM2 INP MBR RD STO IPF (100 pulse) AL.52 CSON EMG ALM2 INP MBR RD STO TLC 2 1 1 2 AL.71 CSON EMG ALM2 INP MBR RD STO IPF 2 1 1 2 AL.72 CSON EMG ALM2 INP MBR RD STO IPF 8 68 8. 2.3 [r/min] 100% [0.1%] [0.1%] (1 pulse) 1 [pulse] (100 pulses) 100 [100 pulses] [r/min] [V] 15 [0.1%] ABS [rev] 1 1 [16 pulses] 1 [] 2 1 [] UF/B U VF/B V % [0.1%]

MNB

9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

MNB

9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 80, 100 80, 100 Description Material Note Component Parts No.

CJ2

D-C7 D-C8 D-C73C D-C80C D-H7 D-H7C D-H7W D-H7BAL D-H7F D-A7/A8 D-A79W Bore B A B A B A B A B A 2 (8.5) B 2 (0.5) A 1 (7.5) B 1 (0) A 6 0 0.5 0 0.5 3 3.5 3 3.5 3.5 4 3.5 4 7.5 8 7.5 8 0.5 1 0.5 1 10 16 2.5 3 2.5 3 1.5 2 1.5 2 ( ) in the table: In case of double rod style, series CJ2W.

CG1

CG1 Low friction B L F G U Basic Axial foot Front flange Rear flange Front trunnion Rear trunnion Clevis MB MB1 Bore size 20 25 32 40 50 63 80 100 T Low friction direction When pressurized on head side When pressurized on rod side F B 20mm 25mm 32mm 40mm 50mm 63mm 80mm 100mm D CP95 Not available for bore sizes 80 and 100. Mounting brackets are included, not mounted.

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65