CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Digital Pressure Switch

0 Units selection function 30 F 1 Setting of OUT1 31 F 2 Setting of OUT2 34 F 3 Digital filter setting 36 F 4 Auto-preset function 37 F 5 FUNC terminal setting 39 F 6 Fine adjustment of display value 40 F10 Sub display setting 41 F11 Display resolution setting 47 F14 Zero cut-off setting 48 F80 Power saving mode 49 F81 Security code 50 F90 Setting of all functions 52 F96 Number of pressurizing

HEC_001W-E

, but must be in the order F, N, L.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

50 5000 mm 3 M With lead wire [115 VAC 50/60 Hz] M plug MN Without lead wire 220 VAC 50/60 Hz connector 4 MO Without connector [230 VAC 50/60 Hz] W0 Without connector cable M8 connector For type W, DC voltage is only available.

CV/MVGQ

4.5/50 Hz, 4.2/60 Hz Note) Holding 3.5/50 Hz, 3.0/60 Hz Note) At the rated voltage.

Plug-in/Plug Lead: Single Unit

Nil E Yes Without light, with surge voltage suppressor Seal Metal seal Rubber seal 0 1 Coil voltage Function 1 2 3 Stations 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC D side U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) Applicable to DC sepecifications.

MRHQ

60 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm MRHQ16D MRHQ16D Pressure 0.7MPa External gripping 60 50 0.6MPa 50 Pressure 0.7MPa Gripping force N Gripping force N 0.5MPa 40 0.4MPa 0.5MPa 0.6MPa 40 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal gripping Pressure

Digital Flow Switches

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

PSxx-OMM0006CN

ISE40A0.050 MPa ZSE40A5.1 kPa ZSE40AF5.0 kPa ON OFF [F 2] OUT2 31 [F 1]OUT1 OUT1 -25No.PS-OMM0006CN-E [F 3] 33 2.5 ms [F 4] 34 [F 5] / 36 [F 6] 38 0 [F11] 39 1000 [F80] 40 OFF [F81] 41 OFF [F90] 42 OFF [F97] 44 OFF [F98] 46 [F99] 48 OFF -26No.PS-OMM0006CN-E [F 0] (kPa/MPa) <> [F 0] ZSE ZSE [F 0] ZSE40AF ZSE40A ISE40A MPa 0.001 0.001 0.001 kPa 0.1 0.1 1 kgf/cm 2 0.001 0.001

Electrostatic Sensor Monitor

Set based on [F 1] operation of OUT1 (page 20 to 21). [F 3] Measured distance setting Input distance between charged object and the sensor. Measurement distance or 0.4 kV sensor is settable within 10 to 50 mm, 20 kV sensor within 25 to 75 mm. Distance can be changed by 1 mm. Upper/lower limit of measurement range depends on measured distance.

JA/JAH/JB/JS

x 1.5 M24 x 1.5 M30 x 1.5 M39 x 1.5 M48 x 1.5 16-150 20-150 24-150 30-150 39-150 48-150 40 50 63 80 100 40 50 63 80 100 CV Heavy load type MVGQ CC Precautions 2.

JA/JAH/JB/JS

x 1.5 M24 x 1.5 M30 x 1.5 M39 x 1.5 M48 x 1.5 16-150 20-150 24-150 30-150 39-150 48-150 40 50 63 80 100 40 50 63 80 100 CV Heavy load type MVGQ CC Precautions 2.

RLQ

Bore size (mm) 32, 40 50, 63 T2 T1 M F E D B Part No.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M H L M E W Y 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size VC 18.5 35 1/8" 16.5 14 15 14 L VDW 21.5

70pvpump

N T, F, N are options.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350

AIR COMBINATION

N Q1 Q2 R S U V AC20C-A 1/8 126.4 87.6 23.5 41.6 40 23.4 30 43.2 24 33 5.5 12 3.5 29 1/81/4 AC25C-A 1/8 167.4 115.1 23.5 30 55.1 50 30.5 41 57.2 35 7 14 4 41 1/43/8 1/43/8 AC30C-A 1/8 167.4 115.1 27 30 55.1 50 30.5 41 57.2 35 7 14 4 41 AC40C-A 1/8 220.4 147.1 33.5 38.4 72.6 75 36.1 50 75.2 40 9 18 5 48 1/43/81/2 AC40C-06-A 1/8 235.4 149.1 33.5 38.4 77.6 75 39.6 50 80.2 40 9 18 5 48

SV

-01-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -02-08 AS2200-02 100 200 50 100

High-precision Digital Pressure Switch

0 Display units and switch output specifications function 26 F 1 Setting of OUT1 27 F 2 Setting of OUT2 30 F 3 Digital filter setting 32 F 4 Auto-preset function 33 F 6 Fine adjustment of display value 35 F10 Sub display setting 36 F11 Display resolution setting 42 F14 Zero cut-off setting 43 F80 Power saving mode 44 F81 Security code 45 F90 Setting of all functions 47 F96 Number of pressurizing