JXCx-OMU0026

cable Orange 9 B B-6 Black 8 B A-6 3 Actuator side Controller side (14.2) (b) 2 1 (8) (a) B 1 A1 (14) B1 (17.7) 6 5 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 12.4 Actuator cable (8-20m) (a) (b) L E C P Signal name Terminal Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 8 8mNote) Yellow 5 B A-2 Green 3 COM-A/COM B-3 A 10mNote) Blue 4 COM-B/ A-3

Precautions 1

Height D-M9 D-M9W D-A9 Reed auto switch Solid state auto switch 16.5 16.5 B A Hs Hs B A 22 22 (24.5) ( ): For D-A93 type D-H7/H7W/H7NF D-C7/C8 8.5 16 16 29 Hs Hs 26 B A B A D-B5/B6/B59W D-G5NTL 12 24.5 24.5 Hs B A 33 Hs 33 A B D-H7C D-C73C/C80C CV MVGQ 16 16 Hs Hs B A 36.7 B A 36.7 Auto Switch Proper Mounting Position (Detection at Stroke End) and Mounting Height Auto Switch Proper

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

Compact Type Dual-Rod Cylinder Series CXSJ

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

HRX-OM-X071

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 31 Circulating fluid display temperature 30 Heat radiation Circulating fluid set 1 temperature 30 Offset temperature 30 1 To switch the offset mode, press the [ENT] key. "OFF" flashes, press the [], [] key, select "OFF", "MD1", "MD2", "MD3" and confirm with [ENT] key.

EX120/121/122

EX510-VSS EX510-VSQ L 20 20 L 20 20 2.8 2.8 B C A How to Order EX510-V + 10 S S EX510-VWS EX510-VWQ Output Valve connector L 20 20 L 20 20 S W 1 point 2 points Nil S Q None For SY, SYJ series For VQ, VQZ series Note) Cable length (L) 2.8 2.8 10 30 1 m 3 m B C A + Note) VQ is compatible with the positive common only.

CLQ

locking Double end taps 63 80 100 Features 2 Compact Cylinder with lock Double Acting: Single Rod Series CLQ 20, 25, 32, 40, 50, 63, 80, 100 How to Order B 40 30 D F CLQ Without Auto Switch B 40 30 D F A73 S CDLQ With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S n 2 pcs. 1 pc.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

(PT)1/8 Width across flats 13 Additional dimensions by stroke (mm) H I J Stroke M14 x 1 20 +10 +38 6.2 +28 Width across flats 19 30 +20 +48 40 +30 +84 5 5 D C +54 50 +40 +94 I J Width across flats 7 Width across flats 12 M8 x 1.25 H F Width across flats 12 Width across flats 3 3 2 A B With a stroke of 20 to 50mm Dimensions/10mm stroke A (mm) B C D F H I J Model ZPT20F10-B01-A14 20 22 12.5

%silltr

Supply NC output NO output Exhaust of NC exhaust of NO Pilot tor NC Pilot for NO P A B R s z Y P A B R1 R2 z Y P A B EA EB PA PB 1 2 4 3 5 12 1 4 Table 7.2 Typical port identitications M O N O S T A B L E A N D B I S T A B L E Spring returned valves are monostable. They have a defined prefened position to which they automatically retum.

SMC Basic Pneumatics

Supply NC output NO output Exhaust of NC exhaust of NO Pilot tor NC Pilot for NO P A B R s z Y P A B R1 R2 z Y P A B EA EB PA PB 1 2 4 3 5 1 2 1 4 Table 7.2 Typical port identitications M O N O S T A B L E A N D B I S T A B L E Spring returned valves are monostable. They have a defined prefened position to which they automatically retum.

High Purity Chemical Valve

T) (mm) W Model LVC20 LVC30 LVC40 LVC50 LVC60 Dimensions 64 (mm) S T Model LVC3m LVC4m LVC5m 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Unit type) Suck back (Single type) 50 3.5 4.5 37 30 44 37 30 44 4 x 3.5 20 (Max. 11.5) (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 51 51 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 466 Series LVC Manifolds Manifold Specifications

SYJ300/500/700

circuit (24, 12 VDC only) SY100-30-2AFor 200 VAC: T VQZ For other voltages of AC: SY100-30-3APower saving circuit is not available in the case of W type.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Adjustment bolt (A) Adjustment bolt (B) For 90 rotation Single vane (S): 80 to 100 adjustable Double vane (D): 85 to 95 adjustable A B 180 Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 10 10 22.5 Size Allowable radial load (N) Allowable thrust load (N) Allowable moment (Nm) 1 10 15 20 0.3 A B Positioning pin hole 3 15 30 40 0.7 7 30 60 50 0.9 Adjustment bolt

Guide Cylinder/Compact Type Series MGC

A B A 20 (28) A B A B A B A B A B 16 (24) A B Hs Hs Hs Hs 24 (32) 21.5 (29.5) 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5) 20 20 24 24.5 27 27.5 29 33 30.5 29.5 23.5 26.5 28.5 25 24 (32) 20 (28) 21.5 (29.5) 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 25 26.5 27 29.5 30 29 33 30.5 29.5 23.5 26.5 28.5 25 25 (33) 21 (29) 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5

7

Hs Ht A B Hs A B Hs A B Hs Ht B D-P4DW D-M9 D-M9W D-M9A 12 D-A9 Hs D-B54 Note) The above drawing is the switch band mounting example for the D-P4DWS.

3

shaft Shaft support Y seal Cap seal Stainless steel 304 PPS PPS Function Details Stainless steel 304 10 11 12 PPS FKM FKM 6 Series PF3W Dimensions PF3W704/720/740/711/721 Integrated display Y 1.4 D A E J F 50 Connector pin number Example W 30 B V Pin no.

SV

is mounted) 7.5 B B B B 102.9 111.4 118 100.4 91.9 A A A A B A B A B A B A Dimensions are the ones for SV1300--.

KQ2

22.5 24 28.5 30 1 4 33 9 3 8 1 2 22.23 22 9.6 30 1 2 17 25 28 Reference dimensions after Uni thread installation.

ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B Note) 1 Dimensions for mounting bracket B 2 2 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.

Compact Cylinder with Lock Series CLQ

Remove the unlocking bolt according to the steps prescribed in the section of Preparing for Operation. 814 Compact Cylinder with Lock Double Acting, Single Rod Series CLQ 20, 25, 32, 40, 50, 63, 80, 100 How to Order CLQ B F D 30 40 M9BW 30 40 B CDLQ F D With auto switch With auto switch (Built-in magnet) Made to Order Refer to page 817 for details.