AS

Inch size (mm) T D1 H D3 L1 L2 L3 M L4 Note 1) A Note 2) d Model Weight (g) Lock Unlock Lock Unlock AS22;1F-01-01(S)A 1/8" 7.2 19.1 26.1 (26) 9 (9) AS22;1F-01-03(S)A 5/32" 8.2 13.3 13 1/8 11.6 30.6 29.2 27.5 26.1 19.1 (12.7) AS22;1F-01-07(S)A 1/4" 11.2 20.8 27.8 (27.7) 10 (9) AS22;1F-01-09(S)A 5/16" 13.2 22.4 29.4 (29.3) 14.2 11 (10) AS22;1F-02-01(S)A 1/8" 7.2 20.9 30 (30.3) 18 (19) AS22;

AC

02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%

VM

4 NBR y u Brass 5-7-1 59 Series VR4151/4152 How to Order A 01 5 1 1 VR41 Indicator light 0 No 1 Yes Sub-plate Side piping B A Bottom piping Port size W/o sub-plate 00 Rc 01 1 8 NPT N01 1 8 G F01 1 8 Number of pilot ports Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (A, B port top ported) How to Order Applicable solenoid valve VK3120M5 VK312001 VK332M5 VK33201 A port: Rc 1/8, M5 x 0.8 VV5K3 21 05 A, B port: Rc 1/8, M5 x 0.8 VK3120 VK332 Thread type Valve stations Nil F N T Rc 01 1

5 Port Solenoid Valve Series SY3000/5000/7000/9000

-01, 1 8 For 8, 5/16" Applicable tubing O.D.: 6, 1/4" (A, B port) One-touch fitting (Pitch) (Pitch) 9 18 P=17.5 9 18 P=17.5 (A, B port) 1/8 7.5 23 7.5 23 B B B B A A A A L2 L1 5 (Pitch) P=17.5 21 + 13.8 15.2 + (4.9) 5.3 7.3 68.1 100.2 [102.4] (For mounting) 4 x 4.5 27.7 20 139.6 [144] 20 20 37.7 66.7 B B P EB EA B B B 127 [131.4] 100.5 A A A A A 16 Manual override (P , EA, EB port) 1/4 +

Table of Contents

F F E E B C Cross interface E: 4-Rc F: Without thread A D E (mm) Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC10 AC20 22 40 40 40 AC25, AC30 28 48 43 49 Caution on Mounting AC40 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use

Proposals for Energy Saving

accessories T0425 (0.5m) H04-01 (1 pc.)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

RD SD LRUN PW B B B B B SZ R5.5 31 11 SMC SMC SMC SMC VP4 50 67 S0700 81 1 2 3 4 5 6 7 n Stations D side U side VQ 1(P), 5(R1), 3(R2) port 6 x Rc 3/4 Manual override VQ4 VQ5 SMC 24(23) VQC 179 167 B B B B B B B 132 VQZ 70(71.5) 91 SQ 20 A A A A A A A 3(1) 3(1) 48.5 4(A), 2(B) port 2n x Rc 1/2, 3/4 VFS 51 80.5 EX123: 2 x G 1/2 EX124: 4 x G 1/2 VFR Electrical entry Use a dripproof plug assembly

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber EPR ZPX40H-01-B8 ZPX100H-01-B10 ZPX100H-01-B12 ZPX125H-01-B10 ZPX125H-01-B12 ZY ZPX40H-01-B10 ZPX50H-01-B8 ZPX50H-01-B10 ZPX63H-01-B10 ZPX63H-01-B12 ZPX80H-01-B10 ZPX80H-01-B12 40 50 63 80 100 125 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZF ZP SP Add or deduct the mass shown in the table on the left for order materials.

Table of Contents

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

VFS

Port Port size BP01 BP02 P, A, B Rc Rc , EA, EB M5 Rc 1 8 1 8 ( ): Port size P02 1 4 1 8 Sub-plate Compact: Non plug-in VFS210--(B) Sub-plate assembly part no.: VFS2000-CS-(B) (01: Rc , 02: Rc ) 1 8 1 4 01 02 S01 S02 5-bottom ported size (Refer to the below right.) 2-4.5 mounting hole Bottom ported Port Size Port Port size S01 S02 EA, EB Rc Rc P, A, B Rc Rc 1 8 1 4 1 8 1 8 1 (Center) Bottom

Table of Contents

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

Modular F.R.L. Unit

Y34-01 02 Y44-02 03 Y54-03 04 Y14-M5 Cross interface Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

Best Pneumatics Vol. 14

F F E E B C Cross interface E: 4-Rc F: Without thread A D E (mm) Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC10 AC20 22 40 40 40 AC25, AC30 28 48 43 49 Caution on Mounting AC40 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use

Modular F.R.L. Unit

F E E F B C Cross interface E: 4-Rc E A F: Without thread D Model Port size A B C D Applicable model Y14-M5 M5 23 16 14 25 AC10 Y24-01 1/8 40 40 22 40 AC20 Y24-02 1/4 Y34-01 1/8 49 43 28 48 AC25, AC30 Y34-02 1/4 Y44-02 1/4 60 48 36 54 AC40 Y44-03 3/8 Cautions in Mounting When mounting a cross interface directly on the IN side of the lubricator, be sure to use a series AKM check valve between

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type 40/41 How to Order 10--SS3YJ7-40 -05 --01 Applicable solenoid valve 10-SYJ714M10-SYJ724MR port 1/4 R port 1/8 Clean series Applicable blanking plate assembly SYJ700-10-2A Manifold P, R port thread 40 41 Type 40 Type 41 Stations Nil Rc G NPT NPTF A A A A 2 stations : 20 stations 02 : 20 F N T P Port 1/8 P Port 1/4 01 1/8 A port size A port 1/8 A port 1/8 Note) For more than 6 stations

EXxx-OMO0027

80x7:01 Channel 0 / ON-OFF frequency upper limit UINT 80x8:0 1 Slot x: Monitor open circuit USINT Number of channels 80x8:01 1 Channel 0 / Open circuit detection Enum0807 0=Disable 1=Enable 1 : x: Slot No. 1: Applicable to the open detecting digital input unit (EX600-DXC1). -79No.EX-OMO0027-A Digital output unit (EX600-DY) Table.

VZS

Non plug-in type N T F Symbol 24 24 stations NPTF G Option 1 5 2 VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) 1 5 VV5ZS3-50-071-01-M5 VZS3150-5G Embedded type One-touch

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Type 41SA (5 port/Base mounted) How to Order SS5YJ7 41SA 03 01 10 Clean series CE-compliant A, B port 1/8 Nil Q CE-compliant Valve stations A, B port size P port 1/4 Note 01 Stations Nil 1/8 Applicable solenoid valve 3 stations : 03 P, R, A, B port thread type : Double wiring Note 1) Refer to page 356.

13

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White