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communication error 2 Alarms A.24 Main circuit error A.30 Regenerative error (Note 1) (Note 1) (Note 1) A.31 Overspeed A.32 Overcurrent A.33 Overvoltage A.35 Command frequency error A.37 Parameter error A.45 Main circuit device overheat (Note 1) (Note 1) (Note 1) A.46 Servo motor overheat (Note 1) (Note 1) (Note 1) A.50 Overload 1 (Note 1) (Note 1) (Note 1) A.51 Overload 2 (Note 1) (Note

occurred. 1: A warning has occurred. 7 W 8 The value at reading is undefined.

l (mm) A A' s i s .D I E I F GA I GsJ H I I Bore Size J MM NN 6 7 9 14 14 3 10.5 8 6 6 17 10 10 12 15 17 5 13 I 8 6 I 7 20 L .. 6 M3x O.5 MlO xlO 7 3.4 1.6 24 16 32 97 ; ~ 4.5 Hi ' 28 1S 10 5.5 1 2.3 36 22 49 ~ 7 I M4X O.7 M12X1 .. 0 15 12 14 20 1 19 6 15.5 I 10 6 I 7 24 9 I M5X O.8 MI4 X tO - Series CJP 2-M5xo.B z H s A F GA G8 A A' jI ~: 1=r=if1+ :' -,LitL*'ft ? .. =.'

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective

D-Y7 W N B D-Y7BA D-Y69 A B D-Y7 WV N B Protrusion [mm] In-line Perpendicular A B D-Y59 O MHW2-20D S 7 12 5 12 12 O MHW2-25D S 7 11 5 10 11 O MHW2-32D S 4 9 2 8 9 O MHW2-40D S 3 8 1 7 8 Hysteresis Switch operating position (ON) O MHW2-50D S 1 6 5 6 Switch return position (OFF) N B D-Y7BA Auto switch model No. Gripper model No.

10. 10-1. 2 2P5P6 16 XL-OMY0002 10-2 1 2 3 c b 1 S 2 O 4 M a S aa M 0.2MPa b S 0.3MPa c S 25,40,50,160 O 3 4 O O O O O O 17 XL-OMY0002 10-3. 1 2 3 2 3 O 4 1 M O M O O O O O O 4 5 O S M XLD-25 S XLD-40,50,160 S XLD-63,80,100 S S 25 4050160 O S 18 XL-OMY0002 6 7 c Nm c O XLD-25 0.360.1 S XLD-25 0.630.1 O S S 0.3MPa S c c O O O O O 8

Modular Type Lubricators Series AL AC-A Lubricator Series AL Model AF-A Port size Option AF-A AL10 M5 x 0.8 AR-A AL20 1/8, 1/4 AL-A AL30 1/4, 3/8 AW-A AL40 1/4, 3/8, 1/2 Bracket AC AL40-06 3/4 AF AL50 3/4, 1 AF AL60 1 Pages 508 through to 513 AR AL AL AW AG E AV AF 507 Lubricator AL10 to AL60 Symbol Lubricator AL20 AL40 How to Order AL 30 03 B Option/Semi-standard: Select one each for a

required flow rate to operate a 40 cylinder at a speed of 60mm/s is approximately 4.5l/min.

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

Reset (RES) Keeping RY(n 1)A or RY(n 3)A (RES) ON for 50ms or longer RY(n 1)A RY(n 3)A 1 allows an alarm to be deactivated. Some alarms cannot be deactivated by Reset RY(n 1)A or RY(n 3)A (RES). (Refer to section 10.4.1.) If RY(n 1)A or RY(n 3)A (RES) is turned ON with no alarm occurring, the base circuit will not be shut off.

Reset (RES) Keeping RY(n 1)A or RY(n 3)A (RES) ON for 50ms or longer RY(n 1)A RY(n 3)A 1 allows an alarm to be deactivated. Some alarms cannot be deactivated by Reset RY(n 1)A or RY(n 3)A (RES). (Refer to section 10.4.1.) If RY(n 1)A or RY(n 3)A (RES) is turned ON with no alarm occurring, the base circuit will not be shut off.

ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description

It is also possible to manufacture a bidirectional lock-up cylinder. For details, refer to Made to Order on page 9-6-113. Due to the nature of its construction, a lock-up cylinder has a play of approximately 0.5 mm to 1 mm in the axial direction.

AFJ AFJ r t y u w AMV q Body size 20 30 40 ZH -X185 Symbol Description Related Products w Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 + e Port size a Mounting Nil Without mounting option Option r B Note 1) With bracket + b Element 5 5 m 40 40 m 80 80 m + Nominal filtration rating t c Water drop removal type/ Large flow type S Water drop removal type Type y T Large

Fis. a (9o".18o') How To Read Diagram 270' 1.

1) 50.5 Thermal overload error 2 during a stop SD (Note 1) (Note 1) (Note 1) 50.6 Thermal overload error 4 during a stop SD (Note 1) (Note 1) (Note 1) 51.1 Thermal overload error 3 during operation DB (Note 1) (Note 1) (Note 1) 51 Overload 2 (Note 1) 51.2 Thermal overload error 3 during a stop DB (Note 1) (Note 1) (Note 1) 52.1 Excess droop pulse 1 SD 52.3 Excess droop pulse 2 SD 52 Error

Fittings & Tubing Air Cylinders Rotary Actuators BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch a e White (PBT) b Switch holder d Auto switch mounting screw c Auto switch mounting band Band

When closed 8.8 When open 22.8 7 Standard Type/Series MHZ2 Finger Position/Options Side Tap Mounting Type [1N1] Through Hole in Opening/Closing Direction [2N2] 4-MM Attachment mounting thread C C B A 4-H Attachment mounting hole S S O O B A Unit: mm Unit: mm Model A 3 4 5 6 Model A 3 4 5 6 B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 B 5.7 7 9 12 H 2.9 3.4 4.5 5.5 1