Low torque Metal seal type Rotary joint Series MQR

C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa Ambient temperature and operating fluid temperature Note 1) -10 to 80C Allowable torque Note 2) 0.003 Nm or less 0.03 Nm or less 0.05 Nm or less 0.10 Nm or less 0.20 Nm or less Allowable rotation speed 3000 min-1 (r.p.m.)Note 3) 2000 min-1 (r.p.m.) 1500

Modular Type Filter Regulator Series AW

It must be operated manually. 0.1 0.1 0 600 800 400 200 0 1000 Flow rate L/min (ANR) 0 500 1500 0 Flow rate L/min (ANR) AW40K-06 Rc 3/4 AW40K Rc 1/2 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 Caution 1. Be sure to unlock the knob before adjusting the pressure and lock it after setting the pressure.

Air Cylinder CLA Series Fine Lock Model

21 286 12.5 a0 230 1 4 40 1 5 25 80 226 0 40 162 130 214 235 306 65 14.0 8 1 244 $et'ies CtA [ul0 $wllrh Standard ifications Reed oil 300m/S3 5Ol\rO or more under the test Nole l) 1500 VAC 1 min 14-1,10.F {Note 2) IEC spec 1P67, JlSC0920 Oil Prool Note l) Lead wire entry: conneclor type and D-9 type: 1000 VAC 1 min (Bet/veen case and cabte).

Single Axis Electric Actuator Series LJ1

Mitsubishi Electric Corporation Yaskawa Electric Corporation LJ1H202PA-K 100W to 500 LJ1H202NA-K 100W to 500 LJ1H303PA-K 200W to 500 LJ1H303NA-K 200W to 500 Standard stroke (mm) and Speed (mm/s) Model Motor type 200 300 400 500 600 700 800 900 1000 1200 1500 Capacity 100 LG1H202SC 100W to 500 LG1H202PA 100W to 500 Standard motor LG1H202NA 100W to 500 [Tamagawa Seiki Co., Ltd.]

Sine Rodless Cylinder Series REBR Direct Mount Type

to 600mm/s Piston speed Non-lube Lubrication 0 to 250st: +1.0, 251 to 1000st: +1.4, 1001st and up: +1.8 Stroke length tolerance 0 0 0 Direct mount type Mounting Standard Strokes Maximum stroke with switch (mm) Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 150, 200, 250, 300, 350, 400 450, 500 15 1000 750 25 32 200, 250, 300, 350, 400, 450 500, 600, 700, 800 2000 1500

Square Tube Type Air Cylinder Series MB1

25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 1500

Electric Actuators

Mitsubishi Electric 30 guide 100W 0.02 Ground ball screw Corporation 1000 Yaskawa Electric 100W 0.05 Rolled ball screw Corporation Features 1 Simplified Selection Flow Chart Series LJ1/LG1 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Clean room Dust seal Deflection TSUBAKI 100 200 300 400 500 600 700 800 900 1000 1200 1500 CABLEVEYOR LJ1S101SC 88

Series LX Acceleration Time Guide

L X P Table displacement (m) Table displacement (m) LXPB-200 LXPB-200 1500 1500 LXPB-175 LXPB-175 1000 1000 LXPB-150 LXPB-150 LXPB-125 LXPB-125 LXPB-100 LXPB-100 500 500 LXPB-75 LXPB-75 LXPB-50 LXPB-50 0 Weight (kg) 0 Weight (kg) 1 2 3 4 5 6 1 2 3 4 5 6 Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Flow Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa ARG20 Rc1/4 ARG30 Rc3/8 ARG40 Rc1/2 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 00 200 400 600 800 00 500 1000 1500 0 1000 2000 3000 0 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Conditions:

CNG

Low Voltage Directive This directive is applied to products, which operate above 50 VAC to 1000 VAC and 75 VDC to 1500 VDC operating voltage, and require electrical safety measures to be introduced. Simple Pressure Vessels Directive This directive is applied to welded vessels whose maximum operating pressure (PS) and volume of vessel (V) exceed 50 bar/L.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Signal Red Black Brown Blue 4 5 1 2 Lock (+) Lock () Sensor (+) Sensor () B-1 A-1 B-3 A-3 581 B LECP1 Series Options [Power supply cable] LEC CK1 1 (15.8) (6) (10.5) (13.3) (35) (60) (1500) Conductor size: AWG20 Weight: 90 g Terminal name Covered color Function 0V Blue Common supply (-) M 24V White Motor power supply (+) C 24V Brown Control power supply (+) BK RLS Black Lock release (+)

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

Environment

Top/Parallel 200 W /60 (Motor rotation speed) (3600 rpm) (2400 rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500

Compact 5-Port Solenoid Valve

unit p. 7 JSY3000 JSY3000 Ejector System JSY1000 JSY5000 Vacuum Unit ZK2 JSY1000/3000/5000 Series CAT.ES11-110B a Plug-in Compact 5-Port Solenoid Valve JSY1000/3000/5000 Series Series Map JSY1000 JSY3000 JSY5000 Valve width 39% reduction 36% reduction 35% reduction 6.4 mm b 10 mm 10 mm b 15.5 mm 15 mm b 24.6 mm 29% reduction 32% reduction 59% reduction 460 g b 650 g 770 g b 1140 g Weight 1500

Bag Filter

FGF3 35 58 85 90 95 100 Flow coefficient (%) 500 1000 1500 2000 2500 FGF5 These relationships between fluids and kinematic viscosity are for guideline purposes only.

AR20-B to AR60-B

200 400 600 800 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AR30(K)-B Rc3/8 AR40(K)-B Rc1/2 AR40(K)-06-B Rc3/4 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 00 0 0 1000 2000 3000 4000 5000 0 1000 2000 3000 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate

HRL

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 Read the operation manual completely before operation, and keep this manual where it can be referred to as necessary. 14) In locations where strong impacts or vibrations occur 15)

Lightweight and Compact

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 15. In locations where strong impacts or vibrations occur. 16.

energy saving effect

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 Handling Warning Thoroughly read the Operation Manual.

53

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 15. In locations where strong impacts or vibrations occur. 16.