Model: 11 (800 l/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 3 (Voltage Style 0~10VDC), Monitor Output: 1 (Analog Output 1~5VDC), Thread: N (NPT), Port Size: 2 [1/4 (1100, 2100, 3100)], Bracket: None, Cable Connector: N (w/o Cable Connector), Pressure Display Unit: 4 (PSI)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: T (High-pressure Pump)

High-precision Digital Pressure Switch ( compatible)

adjusted within 5%R.D. 0.1% increments FSC (Display value fine adjustment ratio) S16 0 Y Settable values -50 ~ 50 1060 0x0424 0 R/W -68No.PS-OMV0004-H Product individual parameters (continued) Access 1 Parameter Data Data Index Sub Initial value storage 3 Set value Remarks index type 2 dec hex 0: Std 1: dUAL (2 value display) Setting of lower level screen U8 0 Y 2: o1Lv (OUT1 level bar) 1100

Digital Pressure Switch ( compatible)

. (-50 ~ 50) 0.1% increments 0x0424 (1060) 0 R/W N S16 0x0 (0) 0: Std 1: dUAL (2 value display) 2: o1Lv (OUT1 level bar) 3: o2Lv (OUT2 level bar) 4: LinE (Line name) 5: oFF (No display) Setting of lower level screen 0x044C (1100) 0 R/W Y U8 0 During Std setting Selection of display item Y U8 0 Refer to Table "selection of display items during std setting". 0x044D (1101) 0 R/W Lower level

High-precision Digital Pressure Switch

adjusted within 5%R.D. 0.1% increments FSC (Display value fine adjustment ratio) S16 0 Y Settable values -50 ~ 50 1060 0x0424 0 R/W -72No.PS-OMV0009-E Product individual parameters (continued) Access 1 Parameter Data Data Index Sub Initial value storage 3 Set value Remarks index type 2 dec hex 0: Std 1: dUAL (2 value display) Setting of lower level screen U8 0 Y 2: o1Lv (OUT1 level bar) 1100

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

24 VDC) Max. number of step data 64 points Power supply voltage 24 VDC 12 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Specifications Battery-less Absolute (Step Motor 24 VDC) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Work load [kg]*1 Horizontal 12 25 30 20 45 50 25 55 65 Vertical 0.5 7.5 15 4 10 20 2 2 23 In-line Stroke range Up to 500 20 to 1100

25

silicon 100 m/s2 Ambient and fluid temperature Ambient humidity Material Impact resistance Standards/Directive CE (EMC Directive: 2004/108/EC) Note) When the air purge is performed between a charged object and an ionizer at a distance of 300 mm Number of emitter cartridges/Bar weight 340 5 590 740 860 Bar length symbol 400 6 640 790 910 460 7 690 840 960 580 9 790 940 1060 640 10 830 980 1100

Compact 5-Port Solenoid Valve

connector: IP40 IP65 IP67 I/O unit: partially IP40 Unit: g w Wiring Terminal block box Lead wire Serial wiring T type TC type L type (0.6 m) L type (1.5 m) L type (3 m) S6m type (EX600)*4 SAm type (EX245)*4 Sm type (EX250)*4 Sm type (EX260) S3m type (EX120) 680 471 404 514 698 829 520 448 367 689 480 413 523 707 838 529 457 367 709 500 433 543 727 858 935 549 477 391 914 705 638 748 932 1063 1100

KT10

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Industrial Filters

30 36 28 42 04 FGDTA 110 1000 13 32 36 46 32 57 06 FGDFA FGDCB 200 600 17 25 26 28 26 30 03 FGDEB 200 840 21 35 37 41 38 44 04 FGDTB 210 1200 23 46 50 56 50 63 06 FGDFB FGESA Note 2) 410 3000 45 90 120 140 100 160 10 FGELA Note 2) 410 3600 50 120 140 170 110 210 20 FGETA FGESB Note 2) 800 3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100

energy saving effect

HEB Anchor bolt fixing position A Anchor bolt fixing position B HED 1100 (Dimension of anchor bolt fixing bracket) 756 136 1020 (Dimension of anchor bolt fixing bracket) HEA 12 x 12 670 43 670 138 8 x 12 IDH (850) (Thermo-chiller dimension) 700 (715) (Thermo-chiller dimension) 627 43 617 752 50 (954) (Thermo-chiller dimension) 19 76 984 19 (1035) (Thermo-chiller dimension) 1064 View A-A View

Refrigerated Air Dryer For Use in North, Central and South America

pressure dew point 50F (10C) 177 (300) 251 (426) 353 (600) 459 (780) Inlet air pressure [psi (MPa)] 100 (0.7) Inlet air temperature [F (C)] 100 (37.8) Ambient temperature [F (C)] 100 (37.8) Single-phase 115 VAC (60 Hz) Single-phase 230 VAC (60 Hz) Power supply voltage (Frequency)4 Maximum air flow capacity Air flow capacity calculated with the correction factors Power consumption5 [W] 1100

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Use flexible tubing in between to avoid such an effect. 1100

Slider Type Ball Screw Drive/11-LEFS Series

Operating condition Model LC3F2 A LEC-MR-RB-032 B LEC-MR-RB-12 Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm

•

(A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 . N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

AZ1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

BP1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

BP1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

C76

can be used according to buckling strength 100.0 Nominal symbol C76 Mounting bracket diagram 32 40 (MPa) Lateral load applied to the rod end fR (N) Foot: L Rod side flange: F Head side flange: G 0.3 58 54 10.0 L C7640 44 0.5 40 W W W F 36 0.7 33 C7632 24 0.3 23 G 17 0.5 16 1.0 13 0.7 13 Clevis: C, D Rod side trunnion: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100

ISO Cylinder

93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1 0.3 38 79 0.1 (40)1 (40)1 Head ( side ) 0.5 37 29 60 76 600 500 400 300 1000 1100