Vacuum Ejector Series ZM Maximum Ejector Stations (Max. operable nos. simultaneously) Ejector model ZMA053 ZMA054 ZMA073 ZMA074 ZMA103 ZMA104 ZMA133 ZMA134 ZMA153 ZMA154 Manifold model R L 10 8 5 4 3 ZZMA Stations 06 10 10 8 6 5 ZZMA Stations 06B R L 10 8 5 4 3 ZZMA Stations 04 10 10 8 6 5 ZZMA Stations 04B Effective area of external silencer is 160 mm2.
L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.
Ambient and fluid temperature Response time (1) 30 ms or less (at the pressure of 0.5 MPa) Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)
Piping Tube Connect a tube (applicable tube O.D. 6) to the air pressure supply (P) port. (Refer to the P.30 2 ) Tube attachment ) To remove the tube, push the release button and pull out the tube. Release Button Air pressure supply (P) port Applicable tubing O.D.: 6 Release valve V114 (N.C.) EXH. Pilot valve for supply V114 (N.C.)
ms 1 0.5m/s801000.4m/s 2 3 9. 1 2 3 3 4 5 1 5 10. 1 2 3 4 5 6 7 8 9 10 11. 1 (d=) 6 11-1. 1 1 2 3005mm 4 5 6 7 2d(MGPS1.5d MGP MGPS (d=) (d=) (mm) (mm) 7 11-1. 13 34 (mm) 3mm 20,25,32,40 16 JIS B46481.5 50,63 JIS B46482.5 80,100 JIS B4648 2 3) 12. 12-1. 2 12-2. 1) 1) 2 3) 1ISOVG32 8 4 0.7 12-3. 1 12-4. 1) 1.52 13. 1 2 1 1060
(mm) Mounting screw P L1 H2 D W1 L2 H1 W2 W3 Model (Nominal x Length) 6 4 TM-04 TM-06 TM-08 TM-10 TM-12 6 3.25 72.5 4.5 5.5 6 6.5 6.5 10 5 7.5 7.5 8 12 12 8 10 11 12 12 17 21 23 25 25 2.2 2.8 2.8 3.2 3.2 2 x 6 4.5 91.5 9.5 5.5 77.5 6 12.5 7.5 77.5 6 15 9 93 6.5 2.6 x 8 2.6 x 8 3 x 8 3 x 8 12 10 8 16.3 8.8 14.3 7.5 12 9.8 How to Use Caution 1.
ported VK3000-6-1A Manifold gasket Screw assembly VK3000-6-2A M3: 0.6 Nm M3: 0.6 Nm Note) Mounting direction is not flexible.
1A VK3000-6-2A M3: 0.6 Nm M3: 0.6 Nm Note) Mounting direction is not flexible.
6 No. Description Function 7 Offset function Use this function when there is a temperature offset between the discharge temperature of the thermo-chiller and users equipment.
Note 6) Note 6) Note 6) Note 6) Note 6) Note 1) When using a non-relieving type with a backflow function, if the inlet pressure is increased slowly, the inlet pressure may continue to the outlet side.
(max. 20 stations) 3 SX3000 5 SX5000 Connector mounting position Symbol Mounting position U U side D D side Valve stations A, B port size Note Symbol 02 Stations SX3000 SX5000 2 stations Port size 4 One-touch fitting 6 One-touch fitting Mixed Symbol Port size 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Mixed Symbol C4 C6 M Double wiring specification C4 C6 C8 M 08 02 8 stations
Ambient and fluid temperature Response time (at 0.5 MPa) (1) 10 ms or less (Standard), 15 ms or less (Low power consumption type) Non-locking push type Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)
or less (Standard), 15 ms or less (Low power consumption type) Non-locking push type Not required (Use turbine oil Class 1 ISO VG32, If lubricated.)
Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 Series MB 6 x 1 m AS2301F-06 AN110-01 VZ5120-01 3-3-55 Series VZ5000 Construction 2 position single 2 position double De-energized De-energized 3 position closed center/exhaust center/pressure center 3 position closed center De-energized De-energized 3
(max. 20 stations) 3 SY3000 5 SY5000 Connector mounting position A, B port size Symbol Mounting position U U side SY5000 SY3000 D D side Symbol Port size 4 One-touch fitting C4 Symbol Port size 4 One-touch fitting C4 6 One-touch fitting C6 Mixed M 6 One-touch fitting C6 Valve stations 8 One-touch fitting C8 Mixed M Stations Symbol Note Single wiring specifications (up to 16 solenoids are
K 20 m roll 100 m reel Model TRB0604 TRB0806 TRB1075 TRB1209 M 6 8 10 12 Inner tubing O.D. (mm) Inner tubing I.D.
(One Ethernet and one Power seal cap are attached to the MPC when shipped from factory as shown in figure 6-1.) Figure 6-3 Seal Cap Description Part No. Specification Seal cap EX9-AWTS For M12 connector socket: 10pcs. Seal cap UIUSP-C08-DUQ00833 For M12 Female Connector 1 pcs. Table 6-4 Seal Cap Part Numbers 14 - IN20267 Summary of Product Elements 7.
Tighten them with the cross recessed round head tapping screw 13 . 6. Mount the tube gasket 9 to the right cover 2 to mount to the body 1 . Tighten them with the hexagon socket head cap screw with washers 12 . 17 15 3 10 14 26 11 5 12 19 9 12 14 1 11 26 4 2 6 15 Cushion seal 4 Direction of the shaft(key) 38 - 7.
M MS Abbreviation of "module status". It shows whether the power supply of SI unit is turned on and the normal operation is available. N NS Abbreviation of "network status". It shows the status of EtherNet/IPTM communication. S An abbreviation of serial interface.