Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1 320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point
XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.
320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point
X165US inch rod option dimensional changes R V Integral clevis type (E)/CG5ENS Dim.
Part numbers indicating changed seal material and leakage Changed part Note 2) Leakage (Pam3/s or less) Note 1) Symbol Nil N1 Symbol 1349-80 2101-80 Internal External FKM EPDM Barrel Perfluoro w, e, r, t w, r, t e 1.3 x 10-10 (FKM) 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310
Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R
Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] HRS012--10 HRS018--10 1-phase 100V AC(50Hz) 100 200 15 15 or 30 HRS01--10-T 1-phase 3 cores x Sharing 100V to 115V 14AWG (High pump head AC(60Hz) [Optional]) (3 cores x 2.0mm2) HRS012--20 HRS018--20 HRS024--20 1-phase 10 30 (including ground) 200, 200-230V AC 230 HRS0--20-T (50/60Hz) 15 30 (High pump head
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
(Adjustable) Hysteresis Data ON: when output is ON (Red) ON: when output is ON (Red) ON: when output is ON (OUT1: Red, OUT2: Green) Indicator light Trimmer adjustment 3 turns 200 degrees 3 turns 200 degrees 3 turns 200 degrees None 1 to 5 V 5% F .S.
Display LCD LED LCD with backlight 101 to 0 kPa 101 to 10 kPa Pressure setting range 200 kPa Maximum operating pressure Operation indicator light (Lights up when ON) OUT1: Green OUT2: Red Green Response frequency 200 Hz (5 ms) Hysteresis mode Variable (3 digits or more) Variable (can be set from 0) Hysteresis Fixed (3 digits) Window comparator mode Fluid Air, Non-corrosive gas Temperature
When the motor mounting position is right side parallel (LEFS*R) or left side parallel (LEFS*L), the rotation direction selection is 0(+: Counter motors side).
4 e r t y u q With stoppers i u w 30 40 Basic type With vibration suppression cover: Resin u t y r u q With stoppers i !0 w e 40, 60 20, 30, 40, 60, 80 Basic type With vibration suppression cover: Stainless steel q u t y r With stoppers o i w e u !0 !1 9 Bernoulli Gripper ZNC Series 80 Basic type e !2 q u t y With stoppers o i r w e Component Parts No.
Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500
Note Material Rod cover White anodized Aluminum alloy q RZQ Head cover White anodized Aluminum alloy w Cylinder tube Hard anodized Aluminum alloy e MI W S Piston rod Hard chromate plated Carbon steel r Piston Hard anodized Aluminum alloy t CEP1 Bumper Urethan y Plastic magnet u CE1 Bushing i Relief valve assembly L o CE2 Relief valve assembly R !0 Plate !
q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
CCT40-200 SCCS, #1 CCT63-200 SCCS, #2(#2+#13) CCT100-200 SCCS, #3(#3+#14) CCT63 SCCS, #13 CCT100 SCCS, #14 CCT100-200 SCCL, #1(#1+#12) CCT160-200 SCCL, #2(#2+#13) CCT100 SCCL, #12 CCT160 SCCL, #13 4.12-7 Air-hydro Converter Series CCT How to Order CCT 63 100 Effective oil level stroke (mm) Air-hydro converter Converter nominal size/stroke (mm) 63 100 160 50, 100, 200, 300, 400, 500
Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
Tube bore size B, #2(#2+#3) 40 125, 150, 175, 200, 250, 300 55 14 14 3.8-9 Series CXT Auto Switch Specifications Refer to p.5.3-2 for details on auto switch.