5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

SZ3B60 [N.C. valve x 2pcs.] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3B60K/With back pressure check valve 4 (A) 2 (B) 5 (R) SOL.a SOL.b 3 (R) 1 (P) 5 (R) 1 (P) 3 (R) SZ3C60 [N.C valve, N.O. valve 1pc. each] SZ3C60 [N.C. valve, N.O. valve 1pc. each] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3C60K/With back pressure check valve 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) 5 (R) 1 (P) 3 (R

100

ZL1 Series RoHS How to Order ZL 1 12A Without valve ZL 1 5 M Z D A M L 12A K1 With valve Max. suction flow rate: 100 L/min (ANR) q w t o u i e r y !0 !1 !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

] 100 L/min type 100 L/min type Error display function When an error or abnormality arises, the location and contents are displayed.

Basic Type/Direct Mount Type

2 r i q @5 o u y t #0 @0 @8 !9 @2 @3 @7 18b @4 @9 @6 !5 !6 !3 !0 !1 !4 !2 y r i q 2b 3b CY3RG15 to 63 !9 @2 @0 @3 #0 @5 @8 @7 o u !7 t 18b CY3RG15 CY3RG15, 20 CY3B CY3R CY3B CY3R !9 !8 @2 @1 CY1S CY3RG15 CY1L Switch Rail Accessory CY1H CY1F Switch Rail Accessory Kit B 100 (N) CYR 15 E Bore size (mm) 6 10 15 Kit no.

ISA2

Leakage voltage Take special precautions if a resistor is used in parallel with the switching element or a C-R element (for surge voltage protection) is used for protection of the switching element. The valve may fail to turn off due to leakage current flowing through the resistor or C-R element. PF2 IF Data Switching element OFF Caution R C Leakage voltage Power supply 1.

Compressed Air Preparation Filter

Activated carbon filter Bracket B Bracket A Mounting screws Bracket mounting view Accessories Sold Separately/ International Standard Specific Product Precautions 22 AMK Series Dimensions AMK20 AMK30 AMK40 S N T J D M S N T U D J M U 2 x P 2 x P Q R Q R (Port size) (Port size) G B V C V C B IN OUT IN OUT Maintenance space A Maintenance space A E G AMK50 AMK60 D M J N T S U 2 x P R (Port size

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

r p g n i t a r e p o . x a M ) 7 . 0 ( 0 0 1 g i s p * e g n a r g n i t a r e p o l a i t n e r e f f i d e r u s s e r P ) a P M ( ) 6 . 0 ~ 1 . 0 ( 0 9 ~ 5 1 e g n a r . p m e t g n i t a r e p O F 0 4 1 ~ 0 4 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T l w o B e t a n o b r a c y l o P T L A N k n a T d e e F o t u A 5 T L A N 1 * S 1 5 T L A

SL5200

Ports 2 ports 3 ports 4 ports Code w q w q 2PW 3PW 4PW 2) Refer to gauge guide (P.94) for gauge specifications. 2PW 3PW Sample Order Number Port r e SL5502S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r qIN wOUT eGauge port (Inlet) rGauge port (Outlet) w q 2PW 3PW 3PW 4PW 0 1 1 MPA MPA 4PW 40 Specifications SL5502mmA SL5502 SL5510 SL5506 100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa) 1 to 30

JXCx-OMT0001CN

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position 2) 2) mode (mm/s) (mm) (mm/s (mm/s Selection (mm) (mm) (mm) 1 ABS 100 30.00 1000 1000 0 0 0 0.5 2 ABS 100 10.00 1000 1000 0 0 0 0.5 1 3 4 1 CIR-L 100 0.00 1000 1000 0 0 0.5 2 CIR-L 40.00 0 0 0.5 2 3 0.00 4 20.00 1 CIR-R 100 0.00 1000 1000 0 0 0.5 2 CIR-R 0.00 0 0 0.5 3 3 0.00 4 20.00 () 2 Step3

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

DSM-60S DSM-60S DSM-75S DSM-75S (H) Cast iron r t y u i o !

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

DOC1020530

Target position: 100.000[mm] (=10 [m] = 186A0h) Target speed: 100[r/min] (=10 [0.01r/min] = 2710h) Acceleration time constant: 100 [ms] (= 64h) Deceleration time constant: 100 [ms] (= 64h) The setup value is as follows.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

SZ3000

B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 X A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X,PE ports) Applicable tube O.D.: 6 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 Applicable connector: 26 pin MIL type with strain relief (L4) L3 (conforms to MIL-C-83503) Connector case attachment lever (both sides) 7.6 (3.2) 101.2 Horizontal connector

SFOD-OMT0009CN

0 0.5 2 ABS 100 10.00 1000 1000 0 0 0 0.5 1 3 4 1 CIR-L 100 0.00 1000 1000 0 0 0.5 2 CIR-L 40.00 0 0 0.5 2 3 0.00 4 20.00 1 CIR-R 100 0.00 1000 1000 0 0 0.5 2 CIR-R 0.00 0 0 0.5 3 3 0.00 4 20.00 () 2 Step3 90mm 50mm Step2 10mm Step1 30mm 1 69 No.SFOD-OMT0009CN-B () (1)No.1(IN0ON) (2)DRIVEON No.1 (3)No.1 ON (OUT0ON) (2)(6)(10)(14)(18)(22) DRIVE (4)INPOFF (1)(9)(17) IN0

Lubrication Equipment

Description Material Part No. # pieces 3 port switching valve (For operation control) VOA301-M VO307E, D-X56 1 e Relay valve Pressure gauge Diaphragm assembly Valve assembly NLP seal PNY seal Wear ring O ring VR4152-00-0 GA46-10-01 12702A 12705A NLP-100A PNY-25 SW-100 X 6 X 2 JIS B2401P3 1 1 1 1 2 2 2 1 r t y u i o !0 !

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Assembly 1) Terminal box e connected with housing r should be reinstated.

MGC

MXQ MXF MXW MXP MG MGP MGQ MGG MGCLl50-R Stroke MGC MGF CY1 MY1 3.20-7 Series MGC Allowable Tip Load and Deflection Slide bearing MGCMl20-R Stroke MGCMl25-R Stroke MGCMl32-R Stroke MGCMl40-R Stroke MGCMl50-R Stroke 3.20-8 Compact Guide Cylinder Series MGC Allowable Tip Load and Deflection Ball bushing bearing MGCLl20-R Stroke MGCLl25-R Stroke MGCLl32-R Stroke CL MLGC CNA CB CV/MVG CXW CXS

5 Port Solenoid Valve SY Series

rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

High Purity Fluoropolymer

P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)