Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

HEC_001W-E

After the error is reset, the indication of [WRN] disappears. 8-1 Alarm 8.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.8-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.8-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C

Table of Contents

When separately ordering an individual SUP spacer, separately order a R block valve. R block valve Note) Individual EXH spacer VVQ1000-R-3-C6 Shut off label Individual EXH spacer (To be ordered using the no. of the standard valve.)

Cylinder with Lock Series MNB

Cylinder with Lock Series MNB Taper ring Steel ball P f R R High locking efficiency Improved locking efficiency, as well as stable locking and unlocking (unlocking pressure 0.25MPa. 0.05MPa compared to conventional P/A products) have been realized by arranging a large number of precision steel ball bearings in two circular rows.

Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

air-filter-e

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.

Air Preparation Equipment

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.

MGP

8 r !1 t !9 !2 !6e q u !4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !

VZ5000

Pressure 0.5 MPa Load factor 50% Stroke 500 mm VZS Average speed (mm/s) Series VFS VS4 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VQ7 VZ514--02 (Piping: 6 x 1 m) EVS VFN AS3301F-02-06/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 8 x 1 m) AS3301F

Air Tank Series AT 1

R 1/2 R 3/4 R 11/4 R 2 R 1 Accessory (2) Rc 1/2 Valve for drainage (1 pc.) Pressure gauge (1 pc.) R 3/8 x 100 M16 x l 250 M16 x l 300 M24 x l 500 M16 x l 500 Anchor bolt (4 pcs.) Note 1) Manufactured upon receipt of order Note 2) The accessories should be mounted by user.

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

MY2H40G-500 Average operating speed a 300mm/s Mounting orientation . Wall mounting 1. Horizontal mounting 2. Wall mounting z y Features 4 Wb: MGGLB25-200 (4.35kg) x y x z Wa: Connection plate t =10 (880g) MY2H40G-500 3. Ceiling mounting Features 4 4.

Sine Rodless Cylinder Series REBR Direct Mount Type

750 15 1 axis 200, 300, 400, 500, 600, 800 25 1200 25 200, 300, 400, 500, 600, 800, 1000 2 axes 1500 32 Note 1) Strokes exceeding the standard strokes are available as a special order.

energy saving effect

Applicable model Minimum operating flow rate [L/min] To circulating fluid outlet r t HRSH100-20 w HRSH150-HRSH200-HRSH250-W25 r q HRS-BP005 y HRSH250-AHRSH300-A40 To circulating fluid return port r t u r e Parts List No.

Plug-in/Plug Lead: Single Unit

Note) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP block plate EXH block plate 18.5 20.2 VVQ5000-16A-1 VVQ5000-16A-2 When different pressures, high and low, are supplied to manifold, a SUP block plate is inserted between the stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passage blocked

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Pin Cylinders Series CJP2/CJP

CS2 Panel mount type Embedded type i e u q r w t y Component Parts No.

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

2-Color Display Digital Flow Switch Series PFM

(with no condensation) Withstand voltage 1000 VAC for 1 min. between external terminal and case 50 M or more (500 VDC Mega) between external terminal and case Insulation resistance Without orifice: 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Use after putting the unit label other than l/min, l. r Unit display/Orange e OUT1 CH r t y u Displays the selected channel. Channel display/Red t u UP button ( button) Use to change the mode or to increase the set value.