Rotary Cylinder Series MRQ Size: 32, 40 1

snap ring R-shape snap ring R-shape snap ring Bearing Bearing Electroless nickel plated Zinc chromated Zinc chromated Zinc chromated Hard anodized Hard anodized Electroless nickel plated Chromated Shell type needle roller bearing Thrust needle roller bearing Bearing ring Hexagon socket head cap screw Plastic magnet Switch mounting nut Switch spacer Plug Rod packing Piston seal Chrome molybdenum

0.01

Arrange pneumatic piping and confirm that there is no air leakage from new joints. 877 Series ISA2 Parts List End plate R ISA-6-B Terminal block box Switch mounting bracket ISA-3-A Left Right Right ISA-7-B Seal for additional station ISA-6-A End plate L Throttle 2 port solenoid valve Spacer Regulator Y200-A Terminal block box ISA-11-L (Centralized wiring/Supply port left) ISA-11-R (Centralized

Compact Cylinder

R O1 thread Both Ends Tapped [mm] Bore size O1 R 50 M6 x 1.0 10 63 M6 x 1.0 10 80 M10 x 1.5 18 100 M10 x 1.5 18 Auto switch Minimum lead wire bending radius 10 F Q 2 x P (Rc, NPT, G) (Port size) 4 x N through H thread effective depth C I D M E Z A + Stroke B + Stroke L W E M K J 2 x P (Rc, NPT, G) (Port size) 100 Auto switch Minimum lead wire bending radius 10 H thread effective depth C 4

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Assembly 1) Terminal block e connected with housing r should be reinstated.

Micro-Mist Separator with Prefilter Series AMH

=.:.:.::.".'" .' . " . ' O~>-/ 0 0 50 100 150 200 250 0 1000 2000 3000 4000 5000 Air flow rate Qlmin (ANR) Air flow rate Qlmin (ANR) AMH650 AMH250 I I I f-j--+Inlet air pressure 0.3MPa r I I 0.5MPa .'_ ",0.06 Air pressure 0.3MPa /' /0.7MPa a. L ~ ::;; '" O.06I---+--+---+---:>I"--+-::-::c:-::!-l ~ / /o~la ~ / /v 0.7MPa ~ /-Y ~0.04 V ~ 0.04 f-i-,I"''---c,..

HRX-OM-X084

Model number Serial number Type and quantity of refrigerant How to read the serial number y R 001 April 2020 W R 001 Year Symbol Remarks Month Symbol Remarks Serial no. 4 R Repeated from O to Z in alphabetical order, with O for January and Z for December 2020 y 2021 Z 5 S Repeat ed from A to Zin alphab etical order 2022 A 6 T Fig 1-1 Position of product label HRR Series 1.4 Product Label

XL-OMV0002

Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R Kalrez R dupont dupont Chemraz R Greene Tweed & Co ULTIC ARMOR R Nippon Valqua Industries, Ltd. 6 XL-OMV0002 3. 3-1.

XL-OMY0002

R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro Kalrez R R Greene, Tweed Technologies, Inc.

AMF

Accessories (Options) Applicable model Bracket assembly AMF150 AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 Symbol BM51 BM52 BM53 BM54 BM55 BM56 BM57 spring washer With cap bolt, AMF Refer to ''Precautions" on p.4.6-33. 4.6-27 Odor Removal Filter Series AMF AMF150 to AMF850 How to Order AMF 250 03 R B Option R IN, OUT reversal Body size Accessories (Optional) 150 1 8 250 1 4 350 3 8 450 1 2

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

CKZ25 53B781EL R 1) Mount the top cover to the clamp cylinder, then tighten to the specified tightening torque below. The top cover kit includes a top cover and mounting brackets.

AMD

Nil Rc Thread type F G N NPT Accessory/Option Combinations Available Not available Depends on model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Optional specification C C D J R D J T AMD150 R AMD250 AMD350 AMD450 Applicable model Accessory (Option)

RHC

Note Material Rod cover White anodized Aluminum alloy q RZQ Head cover White anodized Aluminum alloy w Cylinder tube Hard anodized Aluminum alloy e MI W S Piston rod Hard chromate plated Carbon steel r Piston Hard anodized Aluminum alloy t CEP1 Bumper Urethan y Plastic magnet u CE1 Bushing i Relief valve assembly L o CE2 Relief valve assembly R !0 Plate !

Electro-Pneumatic Positioner Series IP8000/8100

D. 9 to 11:P368010-27 View A 100 46 30 2 14 IP8000-01 (With terminal box) OUT2.Rc1/4 With plug 110 38 192 218 23.5 110 40 35 OUT1.Rc1/4 SUP.Rc1/4 2 x M8 x 1.25 depth12 (Female thread for side mounting) 43 23.5 58 38 39 11 9 39 OUT2 MPa 42 162 117 16 6.1 MPa 20 50 65 A 122 ELECTORO PNEUMATIC IP8000 P O S I T I O N E R 22.5 125 At accessory E: 110 At accessory F: 110 { } 5 150 125 12 168 8

Series HAW Water Cooled Aftercooler 1

473 130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1 1 1 2 2 3 1 1 1 4 14-15-8

MU

3 MUB40-PS Hard anodized Aluminum alloy Cylinder tube e MUB50-PS Chromated Aluminum alloy Piston r MUB63-PS Hard chrome plated Carbon steel Piston rod t Seal kit includes !1 to !3. Order the seal kit, based on each bore size.

Hydraulic Filters

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model Flange port size Note) Rated flow rate (L/min) Model/Rated Flow Rate FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA-24 FHIA-28 FHIA-32 1/2B 30 3/4B 50 1B 95 1 1/4B 150 1 1/2B 220 2B 350 2 1/2B 550 3B 770 3 1/2B 1000 4B 1300 The symbol represented by indicates the type of applicable hydraulic fluid.

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

MU

3 MUB40-PS Hard anodized Aluminum alloy Cylinder tube e MUB50-PS Chromated Aluminum alloy Piston r MUB63-PS Hard chrome plated Carbon steel Piston rod t Seal kit includes !1 to !3. Order the seal kit, based on each bore size.

Precision Cylinder Series MTS

8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty. Note Material Qty.