76

Air dryer model IDF100FS-30-R IDF125FS-30-R IDF150FS-30-R Breaker capacity 20 A 30 A Sensitivity current: 30 mA Corrosion is not covered under warranty. Option symbol V With a timer controlled solenoid valve type auto drain Option symbol Float type heavy duty auto drain is changed to the solenoid valve type auto drain.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

XL-OMV0002

Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R Kalrez R dupont dupont Chemraz R Greene Tweed & Co ULTIC ARMOR R Nippon Valqua Industries, Ltd. 6 XL-OMV0002 3. 3-1.

XL-OMY0002

R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro Kalrez R R Greene, Tweed Technologies, Inc.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

R ZZM 06 06 R Multi-ejecter Common SUP port location Port and silencer location Series ZM Manifold Nil Both sides Number of stations R Right side L Left side B Both sides Right side Left side R L 01 1 station Right or left to the VAC port Right or left to the VAC port 05 5 stations Common EXH port size 10 10 stations (Max.) 04 06 1 2 3 4 Thread type S Silencer for ZZM (ZZM-SA) Nil Rc NPTF

Compact Cylinder with Solenoid Valve/

Eccentric distance Stroke Operating pressure: 0.5 MPa 1000.0 Plate allowable lateral load (N) 100.0 100 Load weight (kg) 63 63 50 10.0 50 40 32 40 1.0 32 10 0.1 10 100 1000 Maximum piston speed (mm/s) 0 10 20 30 40 50 60 70 80 90 100 110 120 Stroke + Eccentric distance (mm) Relationship between Number of Needle Rotations and Piston Speed 32, 40 50, 63 800 800 32 32 50 700 700 600 600 63 Piston

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Digital Gap Checker

.: 600 kPa 1: Compared with the ISA2 with 0.2 MPa pressure gauge.

PFxx-OMJ0005CN

L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2 m) + () 2 R

PF-OMN0009_C

90 ) () <> -5No.PF-OMN0009CN-F * 16 FG (49 N () M8 IN IN OUT OUT OUT OUT IN 40 -6No.PF-OMN0009CN-F * () 6 33 () () 10 m DC(-)() -7No.PF-OMN0009CN-F * ( ) () CE -8No.PF-OMN0009CN-F * 3 * -9No.PF-OMN0009CN-F * , *PVC PVC PVC () PVC PVC , -10No.PF-OMN0009CN-F PF3W5 48 () 3 A : 04 20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

ML1C

8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

ML1

, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

PSxx-OMM0006CN

X B(ZS-24-B) M45L B -16No.PS-OMM0006CN-E M8(3) (ZS-35-C/ZS-35-D) +(ZS-35-F/ZS-35-G) () ZS-35-C/D -17No.PS-OMM0006CN-E 79 Nm M5 (12mm) 1 2 1) 0.1 mm 2)0.1 mm 3)+0.15 mm -0.2 mm -18No.PS-OMM0006CN-E () TU0425 ( 4 2.5) -19No.PS-OMM0006CN-E (M8(3)22) Z/ISE40A--DC(+) -S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 OUT1 OUT2 DC(-) DC(+) -S/-R () NPN 2

ML2B

(ML2B) (CE1-R) DO-ring Parts sorting: To classify the different types of parts.

ML2B

(ML2B) (CE1-R) DO-ring Parts sorting: To classify the different types of parts.

CYP

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

R.

Series 12-REA Sine rodless cylinder

L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x 16 188 176 M14 x 1.5 x

Series AP3100

q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.