7

3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

Aluminum High Vacuum Angle Valve

100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Rotary Actuator

3 !3 !3 !3 !3 !3 !3 !3 y r r y A port B port A port B port A port B port A port B port e (Output shaft) (Output shaft) !8 Parallel key for size 40 i e u !2 i u w !4 w q !2 !6 !0 !4 !7 !1 o q !5 !1 Component Parts Description Material Note Description Material Note No. No.

ZP

3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5

NCQ8

3 !1 y q e u o w i Male thread Parts List Remarks Remarks Description Material No.

Stability of suction position,

Arrival time to stable Pv 95% after adsorption [sec] QL : Leakage volume during workpiece adsorption [L/min (ANR)] Note 1) Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q [L/min (ANR)] Ejector Select the ejector with the greater maximum suction flow rate from the Qmax indicated above.

LVQ

Size Symbol 2 2 2 3 3 4 4 5 5 6 6 A B C A B A B A B A B 2 2 3 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" LVC LVA LVH LVD With reducer Basic size LVQ Note 1) Select a fitting the same

High Power Cylinder:

Q Q Q Connector 5V 12V 24V IC C80C Q Q Q No Q A33 PLC Q 12V Terminal conduit A34 Q 100V 200V 12V Yes DIN terminal Relay PLC A44 Q Grommet Diagnostic indication (2 color) B59W Q Q 3 wire (NPN) 3 wire (PNP) H7A1 Q q Q 5V 12V IC H7A2 Q Grommet q Q H7B Q q Q 2 wire 12V H7C Q Q Connector Q Q Solid state switch 3 wire (NPN) 2 wire 5V 12V G39 IC Q Terminal conduit K39 12V 3 wire (NPN

Thermo-chiller

Laser output power 3 [kW], conversion efficiency 30% The oscillators power consumption is, 3 [kW] 0.3 = 10 [kW] The cooling capacity required for the oscillator is, 10 [kW] 3 [kW] = 7 [kW] Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] W Efficiency Q = P = In this example, using an efficiency of 0.7: 5.1 0.7 = = 7.3 [kW] Q: Heat generation amount Cooling capacity = Considering

Electric Actuator

8 y q w t !7 r e i u !3 @3 !4 D 25 32 In-line motor type/LEY !6 u @3 #4 #3 When rod end male thread selected !0 #0 #1 #2 #1 @9 Component Parts No. Description Material Note No.

Modular Type Air Filters Series AF

Modular Type Air Filters Series AF Air Filter Series AF Filtration (m) Model Options Port size AF10 M5 x 0.8 AF20 1/8, 1/4 AF30 1/4, 3/8 Bracket AF40 1/4, 3/8, 1/2 5 Float type auto drain AF40-06 3/4 AF50 3/4, 1 AF60 1 Page 328 through to 336 Mist Separator Series AFM AFM20 1/8, 1/4 AFM30 1/4, 3/8 Bracket 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Page 338 through to 344 Micro

2/3 Port Valve

VN5-A4BB-3 VN5-A4BC-3 VN6-A3BA VN6-A3BB VN6-A3BC VN6-A4BA VN6-A4BB VN6-A4BC VN6-A3BA VN6-A3BB VN6-A3BC VN6-A4BA-3 VN6-A4BB-3 VN6-A4BC-3 VN7-A3BA VN7-A3BB VN7-A3BC VN7-A4BA VN7-A4BB VN7-A4BC VN7-A3BA VN7-A3BB VN7-A3BC VN7-A4BA-3 VN7-A4BB-3 VN7-A4BC-3 Plate assembly Valve material e(1) FPM EPR NBR (2) Valve element Valve material r(1) SF4--23 VO301-00 Pilot solenoid valve u L: Aluminum, S:

Vacuum Unit

3 q t i u w !5 With Pressure Switch for Vacuum with Energy Saving Function !7 !1 e o !0 r !2 With Pressure Sensor With Pressure Switch for Vacuum !6 Component Parts No.

VS7-6

Model Effective area (With sub-plate) (mm 2) (Nl/min) Response time (2) (sec) Weight (3) (kg) 0.025 or less 0.015 or less 0.045 or less 0.045 or less 0.05 or less Max. operating rate (1) No. of positions Model 1 4 (cycle/sec.) 20 20 10 10 10 VS7-6-FG-S--Q VS7-6-FG-D--Q VS7-6-FHG-D--Q VS7-6-FJG-D--Q VS7-6-FPG-D--Q 2 (Single) 2 (Double) 3 (Closed centre) 3 (Exhaust centre) 3 (Pilot check) 27

Magnetically Coupled Rodless Cylinder

0i q !4 !2 r @3 @7 o u y t @8 !8 !9 @2 CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t @0 !8 !9 @2 CY3R15 to 63 2a 3a @0 @4 @9 @6 !5 !6 !3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !

JIS Standard Hydraulic Cylinder

0 @3 w @5 q i @8 t y @7 @2 @0 !2 !5 !4 CHQ CHK CHN CHM CHS CH2 CH2 !3 @1 #1 #3 #2 u o @9 e r @6 @4 !1 CHA Related Products DParts List Replacement Parts: Seal Kit Description Material Note Bore size (mm) Seal kit no. Content No.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Required fluid volume for extension (l/min) Required fluid volume for retraction (l/min) Bore size (cm) Piston rod diameter (cm) Piston speed (mm/s) Q: Q: D: d: : Q = D __ 4 6 _ 1000 .. Formula (1) Q = (D d) __ 4 6 _ 1000 .

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

Series AP500

Number Port No code MPA w q AP1410T e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 3) Pressure gauge unit MPa or psig/bar selectable.