CNA

n = 4, 8, 12, 16, 100 + 50 n = 4, 8, 12, 16, 110 + 50 n = 4, 8, 12, 16, 75 + 50 (n 2) n = 2, 3, 4, 90 + 50 (n 2) n = 2, 4, 6, 8, 100 + 50 (n 2) n = 2, 4, 6, 8, 110 + 50 (n 2) n = 2, 4, 6, 8, 15 + 50 n = 2, 4, 6, 8, Different sides MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258

VFR

100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 3-5-94 95 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR6000 Cylinder Speed Chart Use as a guide for selection.

CV/MVGQ

(n 2) 2 n = 4, 8, 12, 16 90 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 (n 4) 2 n = 4, 8, 12, 16, 110 + 50 (n 4) 2 Different sides n 75 + 50 (n2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n2) n = 2, 4, 6, 8 Same side 1 90 100 110 20 90 100 110 75 90 100 110 10 Different sides 2 Same side n = 2, 4, 6, 8 20 + 50 (n 2) 2 n = 4, 8, 12, 16 90 + 50 (n

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Same side 75 90 100 110 90+50 (n4) 2 n=4, 8, 12, 16, 100+50 (n4) 2 n=4, 8, 12, 16, 110+50(n4) 2 n=4, 8, 12, 16, 20+50(n2) Dif. sides Additional Weight of Lock (kg) D-B59W n=2, 4, 6, 8, n (n2) 2 40 50 63 80 100 Bore size (mm) 75+50 n=2, 3, 4, 90+50(n2) n=2, 4, 6, 8, 100+50(n2) n=2, 4, 6, 8, 110+50(n2) n=2, 4, 6, 8 , Same side Rear end lock (H) 0.02 0.03 0.03 0.10 0.12 Manual release

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Same side 75 90 100 110 90+50 (n4) 2 n=4, 8, 12, 16, 100+50 (n4) 2 n=4, 8, 12, 16, 110+50(n4) 2 n=4, 8, 12, 16, 20+50(n2) Dif. sides Additional Weight of Lock (kg) D-B59W n=2, 4, 6, 8, n (n2) 2 40 50 63 80 100 Bore size (mm) 75+50 n=2, 3, 4, 90+50(n2) n=2, 4, 6, 8, 100+50(n2) n=2, 4, 6, 8, 110+50(n2) n=2, 4, 6, 8 , Same side 0.02 0.03 0.03 0.10 0.12 Rear end lock (H) Manual release

CV/MVGQ

Material: Free cutting sulfur steel Applicable bore size (mm) 40 50, 63 80 100 A A1 R1 U1 E1 L1 MM NX NDH10 Part no.

ZP

. 50 50 B Bellows ZL Flat (U) Flat with ribs (C) ZY ZP02U to 08U ZP10C to 50C ZQ ZF ZP ZCU AMJ Misc.

Step Motor Controller

-50 for the LEPY10K-50U-R16NI.

JXCx-OMT0023

20 Vibration suppression control vibration frequency setting 50 60 50 Vibration suppression control resonance frequency setting 50 60 50 7 19 7.

C92

125 160 1.12-7 Series C92 Accessories Counter pivot E Bore (mm) R1 d2 CK S5 K1 K2 L3 G1 L1 G2 EM G3 CA H6 10 11 13 15 15 18 22,5 31 10 10 11 11 15 15 18 20 10 12 12 16 16 20 25 32 5,5 5,5 6,6 6,6 9 9 11 14 38 41 50 52 66 76 94 118 51 54 65 67 86 96 124 156 10 10 14 14 18 20 28 34 21 24 33 37 47 55 70 97 4 4 6 6 6 6 18 23 18 22 30 35 40 50 60 88 26 28 32 40 50 60 70 90 31 35 45 50 60 70 90

Hydraulic Filters

(50) P AE E (Rc) K L-type block R Q Weight (kg)* d K W Y AE (mm) (75) (50) W J Port size (mm) W (mm) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 62 62 62 65 65 65 65 65 9 9 9 9 9 9 9 9 70 70 70 85 85 85 105 105 47 47 47 50 50 50 50 50 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 Weight (kg)* E J P Q Weight (kg)* E 69 69 74

48

Series Variations Model Bearing Bore size Stroke [mm] Cushion Piston speed Port size Mounting direction JMGP 12 (10 x 2) 10, 20, 30, 50, 100 M3 x 0.5 16 (12 x 2) 20 (16 x 2) 20, 30, 50, 100, 150 M5 x 0.8 25 (20 x 2) 50 to 300 mm/s Top 32 (25 x 2) Rubber bumper on both ends Slide bearing Bottom 40 (32 x 2) 1/8 (Rc, NPT, G) 50 (40 x 2) Rear 25, 50, 100, 150, 200 63 (45 x 2) 80 (56 x 2) 50 to

33

/60 Hz 230 VAC 50/60 Hz 191 Thermo-chiller Basic Type HRSE Series Circulating Fluid Temperature Controller Simple function and performance Cooling capacity 1.2, 1.6, 2.2 kW (60 Hz) Power supply 100/200 VAC (50/60 Hz) 230 VAC (50/60 Hz) Triple control Compressor, fan and electronic control valve can be controlled depending on the heat load from the user s equipment.

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 25, 50, 100, 150, 200 Intermediate strokes are available as a special order. Refer to pages 10 and 11 for cylinders with auto switches.

3

40 30 20 10 Measurable within this range PF3W 0 0 10 20 30 40 50 60 70 80 90 Aqueous solution temperature [oC] Wetted Parts Construction o !

Step Motor Controller

motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

polarity protection) 50 mA or less (Current consumption for sensor is not included.)

Series PF2W Digital Flow Switch For Water

Also, combination of equal parts water/ethylene glycol (50/50%) can be used if its temperature is high. Please note that accuracy cannot be guaranteed when other fluids are used.

100

40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply pressure: 0.35 MPa/0.37 MPa (With valve) ZL6H (

Industrial Filters

) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 500 20 115 37 400 267.4 230 510 915 1250 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 750 20 130 50 400 267.4 230 510 1175 1510 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 1000 20 150 64 400 267.4 230 510 1440 1775 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 500 20 150 54 445 318.5 240 560 935