Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Maintenance check Model Connect(Flange) 2B/3B 8B C 2B/3B/4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 X l 400 Anchor bolt Caution M20 X l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 q The replacement interval for the element for models AMD150 to AMD850 is when the pressure drop reaches 0.1MPa or after 2 years of operation, whichever comes first.

AMF

Maintenance Caution Model Connection (Flange) 2B 8B C 2B/3B/4B 500 A 330 B 300 D 1070 E 1200 F 1290 G 20 H 720 M16 X l 400 Anchor bolt M20 X l 500 AMF800 AMF900 400 550 560 745 300 300 1070 1090 1230 1320 1335 1450 24 24 q It is not possible to indicate a definite replacement interval for the element because it varies with the odor concentration of the compressed air.

ML1

, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3 MPa 0.1 MPa 0.3 MPa 30 30 0.5 MPa 0.5 MPa 20 20 0.7 MPa 0.7 MPa 10 10 0 0 200 400 600 0 0 200 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 2 Series ZFC Construction Component Parts Description Material Quantity PC Resin PBT Sintered resin HNBR Resin PBT OUT No. 1 2 3 4 5 Case Cover Element Seal Bracket

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes Bore size [mm] Standard stroke [mm] Note 1) Long stroke [mm] Note 2) 40 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500 800 Refer to pages 18 to 23 for cylinders with auto switches. 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500, 600 1200 Minimum stroke for auto switch mounting Auto switch proper mounting position (detection at

Magnetically Coupled Rodless Cylinder: Basic Type Series CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40, ø50, ø63

mm Standard Stroke Standard stroke (mm) Maximum available stroke (mm) Bore size (mm) 300 50, 100, 150, 200 6 500 50, 100, 150, 200, 250, 300 10 15 20 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 3000 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke specification

Cylinder with Lock Double Acting, Single Rod ø40, ø50, ø63, ø80, ø100 Series CNA2

Bore size (mm) Standard stroke (mm) Note 1) Long stroke (mm) Note 2) Minimum stroke for auto switch mounting Auto switch proper mounting position (detection at stroke end) and mounting height Operating range Auto switch mounting bracket/Part no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

32 1000 Outside of cylinder tube with hard chrome plated 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 Auto switch rails on both side faces (with 2 pcs.) 1500 Made to Order Specifications Click here for details 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 900, 1000 40 1500 Symbol Specifications -XB9 -XB13 -XB22 Low speed cylinder (15 to 50 mm/s) Note) Intermediate

Mechanically Jointed Hy-rodless Cylinder with Brake ML1C Series ø 25, ø 32, ø 40

Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) 25 32 40 2000 2000 2000 Stroke adjustment unit symbol Refer to page 1109 for stroke adjustment unit. 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 When stroke is required, which is longer than the standard stroke, refer

Digital Flow Switch (Integrated display type)

S16 200 Y Setting range 0 to 4400 Setting of OUT1 output value (Lower limit of window comparator mode) 3 R/W Lower limit of window comparator S16 1200 Y Setting range -200 to 4200 OUT1 setting 1220 0x04C4 Setting of OUT1 output value (Upper limit of window comparator mode) 4 R/W Upper limit of window comparator S16 2400 Y Setting range -200 to 4200 5 R/W Window comparator hysteresis S16 400

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Made to Order: Individual Specications (For details, refer to page 491.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) For CE compliant models, DC-type only. 10 Clean series Thread type Copper/Fluorine/Silicone free + Low particle generation 21 Nil Rc Enclosure N NPT Nil Dust-protected T NPTF W Note 1) IP65 (Dust-tight, Water-jet-proof) F G Note 1) Valves are IP65 specifications. Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.

76

Dimensions [Separately installed power transformer] C E IDF-TR7000-8 G B D 4 x F A Specications/Dimensions in (mm) Transformer Applicable dryer Capacity Type Inlet voltage Outlet voltage A B C D E F G Weight 14.2 (360) 21.3 (540) 15.7 (400) 10.2 (260) 11.8 (300) 0.43 (11) 1.18 (30) 207 lb (94 kg) IDF-TR7000-8 IDF100FS 7 kVA Three-phase Compound winding 220, 240 380, 400, 415 440 V (50/60

SMC Pneumatic Clean Series

Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) For CE compliant models, DC-type only. 10 Clean series Thread type Copper/Fluorine/Silicone free + Low particle generation 21 Nil Rc Enclosure N NPT Nil Dust-protected T NPTF W Note 1) IP65 (Dust-tight, Water-jet-proof) F G Note 1) Valves are IP65 specifications. Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.

AMD

A 280 B 760 D 150 E 270 F 1033 G 3 H 887 J 6B C 620 AMD801 AMD901 445 795 300 520 1318 3 972 12B AMD800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B, 3B 8B C 2B, 3B, 4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer

Compact Rotary Actuator

0.20.7 20 25 120 40 0.2 30 48 250 40 0.2 40 81 400 40 0.2 Allowable kinetic energy of cushion type is the max. adsorbing energy when the cushion needle adjustment is optimum.

3

DSince there are other applicable auto switches than listed, refer to page 400 for details. For details about auto switches with pre-wired connector, refer to pages 1014 and 1015. Auto switches are shipped together, (but not assembled).

MRQ

(PT)1/8 CRA1 Rotary motion Output torque (At 0.5 MPa) 1Nm 1.9Nm 0.2 to 1s/90 CRQ Stable rotation time regulation range Cushion MRQ Allowable kinetic energy 0.023J 0.028J Order Made P.1.5-18 to 1.5-19 Port size Rc (PT)1/8, M5 X 0.8 (The port is plugged for delivery.)

ALF400 to 900, ALT-5/-9

5 IR Note 2) ALT IS-1 VEX Auto Feed Tank Option AMR IS-1 IS-2 W/float switch (Bottom limit ON) W/float switch (Bottom limit OFF) Precautions Thread Type Tank capacity ITV Nil N E 5 9 Rc NPT G 5000 cm3 tank 9000 cm3 tank Be sure to read before handling. Refer to pages 14-21-3 to 14-214 for Safety Instructions and Common Precautions.