Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, SI UNIT FOR VQC, VALVE, EX500 SERIAL INTERFACE UNIT, 22, EX500 NO SIZE

V

F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly Stations (n) 2 3 4 5 6 7 8 9 10 L1 53 69 85 101 117 133 149 165 181 L2 40 56 72 88 104 120 136 152 168 L3 16 32 48 64

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

seal 2.0 (0.11) VQZ1320 20 or less 26 or less Closed center VQZ1000 61 Rubber seal 3.1 (0.17) VQZ1321 25 or less 33 or less VFS Metal seal 2.7 (0.15) VQZ1420 3 position 20 or less 26 or less Exhaust center Rubber seal 5.4 (0.3) VQZ1421 25 or less 33 or less VS Pressure center Rubber seal 3.1 (0.17) VQZ1521 25 or less 33 or less Metal seal 8.1 (0.45) VQZ2120 14 or less 18 or less VS7 Single 64

ZX

ZSE2-0X-15C, ZX1-VAK15LZ 13-2-64 64 Vacuum Module: Vacuum Pump System Series ZX How to order (3) Adsorption confirmation switch unit (For replacement) Phillips screw Manifold How to order (6) Digital vacuum switch unit (For replacement) M2.5 x 51 How to order (5) Vacuum switch unit (For replacement) Phillips screw M2.5 x 51 Phillips screw (M2.5 x 39 ) Filter unit (For replacement) ZX Phillips

Air Pilot Operated

A B c D E F H J K M N o P o R s 2.95 (75) 2.52 {64) o.75 {t 9) 2.24 157't 0.91 123l 't.06 {271 1.97 {50) 0.83 {211 0.94 124) 0.16 t4) 1.34 (34) (31) 0.55 114l o.12 {3) 0.47 112't 0.73 (18.6) 0.98 125) lrillimeters in Parenthes PARTS LIST NOTES 1 Sp.ing t AXB3& O-Fim f aRp56+!

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

piping type VV 2-ZZ (Hexagon socket head taper plug) 2-ZZ (Hexagon socket head taper plug) VV Centralized piping type S 1.1 WX 11.4 Bottom ported (ZZ) (Applicable O-ring) 2-d Y J M6 x 1 M8 x 1.25 M10 x 1.5 MM M5 x 0.8 M6 x 1 M6 x 1 A 120 150 180 B C 5.5 6.5 8.5 CH 25.7 31.5 34.8 G 17 19 23 GB 24.5 30.0 36.5 H 66 82 98 K 9.5 16.0 15.0 L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64

MY1

79 LW 100 122 138 M 10 13 13 MM MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 Bore size (mm) 25 32 40 09 11 14 09.5 16.0 15.0 120 150 180 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 PA 060 080 100 NW 60 74 94 P PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 PP2 12.7 18.5 20 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9 24.0 SS 5.1 4.0 9.0 TT 15.5 21.0 26.0 UU 16 16

IIIIIIIIII

VP-700 Series VALVE TYPE 3 WAY (Exhaust To Atmosphere) Air Assisted Servo OPERATING PRESSURE PILOT=Vacuum 1-30 InHg Valve=20-115psi [Pressure Only] OPERATING SPEED 64 MSEC @ 90 psi VALVE INPUT PORTING PILOT=See Ordering Info.

Electro-Pneumatic Proportional Valve Series VEF/VEP

99.7 VEX 21.5 SRH 28 SRP 25 13 50 SRF 122 3 x 1/4, 3/8 VCHR ITV Flow type: VEF2131 Flow type: VEF2141, VEF3141 Pressure type: VEP3141 IC 3 x 3/8, 1/2, 3/4 45 45 2 x 1/4, 3/8, 1/2 ITVX PVQ VEF VEP VEF VEP 129 Port 1 (P) VER 154.5 Port 1 (P) Port 2(A) Port 2 (A) Port 3 (R) P 95 120.5 Plug A VEA 65 P 36 35 51 35 VY1 9 53 12 R 64 64 VBA VBAT G1/2 Applicable cable O.D. 6 to 12 82 81 AP100 2 port

VCL

Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size A B C D E F H K L M N Model Note) Note) Q R Q R Q R S Q R S U 22 (23) 45 (52) 44 43 58 40.5 46.5 99 43 66 83 13.5 28 64 31 6.5 12.5 27 14 12.8 M4 4.5 1/8 VCL21 22 (23) 46 (53) 44 44 58 41.5 46.5 99 44 66 86 18 36 67.5 31 8.5 12.5 27 18 12.8 M4 6 1/4 24 (25) 56.5 (63.5) 46 54.5 60 52 48.5 101 54.5 68 99 22

One-touch Fittings

Applicable model Pipe nut KQ04-P01N KQ2E04-G01N1, KQ2E04-G02N1 KQ06-P01N KQ2E06-G01N1, KQ2E06-G02N1, KQ2E06-G03N1 63 Oval Type Metric Size M, R, Rc Inch Size UNF, NPT Inch Size M, R, Rc Metric Size G Metric Size R, Rc Inch Size NPT Inch Size R Metric Size Uni Inch Size Uni Sealant/Gasket Seal Face Seal Gasket Seal 64 Metric Size One-touch Fittings Oval Type Applicable Tubing: Metric Size,

IZT40/41/42

0 Bar bracket Symbol Length [mm] 16 160 22 220 34 340 40 400 46 460 58 580 64 640 Symbol Length [mm] 82 820 112 1120 130 1300 160 1600 190 1900 232 2320 250 2500 Symbol Inch size 5H 3/16" Straight 7H 1/4" Straight 9H 5/16" Straight BH 3/8" Straight 5L 3/16" Elbow 7L 1/4" Elbow 9L 5/16" Elbow BL 3/8" Elbow Symbol Type Nil Without bracket B With bracket 1 F With bracket 2 The number of intermediate

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, INPUT BASE *LQA, VALVE, EX500 SERIAL INTERFACE UNIT, 22, EX500 NO SIZE

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, OUTPUT MFLD, VALVE, EX300 SERIAL INTERFACE UNIT, 22, EX300

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, POWER CONNECTOR CABLE, VALVE, EX500 SERIAL INTERFACE UNIT, 22, EX500

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, POWER CONNECTOR CABLE, VALVE, EX500 SERIAL INTERFACE UNIT, 22, EX500

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, EXTENSION INPUT BLOCK *LQA, VALVE, EX500 SERIAL INTERFACE UNIT, 22,

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, M12 INTERCONNECT CABLE, 0.3M, VALVE, EX500 SERIAL INTERFACE UNIT, 22,

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, M12 INTERCONNECT CABLE, 0.5M, VALVE, EX500 SERIAL INTERFACE UNIT, 22,

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, POWER CONNECTOR CABLE, VALVE, EX500 SERIAL INTERFACE UNIT, 22, EX500