P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Standard motor LJ1H202NF-K 100W to 250 [Tamagawa Seiki Co., Ltd.]

LX

LJ1 LG1 LC1 LX LC6D/LC6C Switches Series LXS Lead screw lead mm Series Brake Page Model Motor type Ball screw Slide screw Guide type LXF 2 5 6 12 LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250

CC

Data A Volume of cylinder/Capacity of converter 180 160 140 125 100 300 250 800 700 600 How to Select 200 10,000 8,000 6,000 5,000 4,000 3,000 500 400 qSelect the bore size of air-hydro cylinder 80 First of all, select a bore size from data .

Series IDG

Standard performance conditions Standard performance Inlet air pressure 0.3 to 0.85MPa (43.5 to 123psi) 0.3 to 1.0MPa (43.5 to 145psi) 5 to 55C (23 to 131F) 5 to 50C (23 to 122F) 5 to 55C (23 to 131F) Inlet air temperature Note 1) Ambient temperature IDG10 5 to 50C (23 to 122F) Outlet air atmospheric pressure dew point 20C (-4F) IDG30 JIS symbol 12.5 (0.44) 625 (22.07) 62 (2.19) 125 (4.14) 250

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L n Formula: L1 = 11.5n + 55.5, L2 = 11.5n + 73 n: Stations (Maximum 16 stations) Dimensions 16 239.5 257 287.5 298 15 228 245.5 275 285.5 14 216.5 234 262.5 273 13 205 222.5 250

SYJ3000/5000/7000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1-5-42 43 5 Port Solenoid Valve Rubber Seal Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-

VZS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D side VZS 2-C6, C8 VFS A 2 VS4 B D-sub connector VQ7 10.7 31.5 EVS (Port size: One-touch fitting type) VFN n: Stations L Stations Formula 20n + 21 20n + 30 16 341 350 15 321 330 14 301 310 13 281 290 12 261 270 11 241 250 10 221 230 9 201 210 8 181 190

Table of Contents

with check valve 300 250 Insertion force N KKA4 without check valve 200 KKA4 with check valve 150 100 KKA3 without check valve 50 KKA3 with check valve 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Charging pressure MPa 15-2-97 26 26 S Couplers Specific Product Precautions 3 Be sure to read before handling.

CC

Data (A) Volume of Cylinder/Capacity of Converter 160 140 180 125 300 250 800 700 600 200 Selection Step 100 10,000 8,000 6,000 5,000 4,000 500 400 Step (1) Select the bore size of air-hydro cylinder 80 300 First of all, select a bore size from data (D) .

Plate Cylinder

Optimum operating position D-M9A(V) D-M9W(V) Series Variations Standard stroke (mm) Rod end configuration Action Type Size 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 Single rod 25 32 Double acting 40 Double rod 50 Male thread, Female thread 63 Spring return, Spring extend 25 32 Single acting 40 50 63 Features 1 Series MU Rod End Allowable Load Y axis X axis In case of a plate

CJ2X/CUX/CQSX/CQ2X/CM2X

to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient and fluid temperature REC Cushion Rubber bumper CX Piping 20 to 32: Rc 1/8, 40: Rc 1/4 Screw-in type Standard Stroke Lubrication Not required (Non-lube) CY Thread tolerance JIS Class 2 +1.4 0 Stroke length tolerance Bore size (mm) Standard stroke (mm) Note) MQQ M Piston Speed 20 RHC 25 25, 50, 75, 100, 125, 150 200, 250

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Maximum flow rate under positive pressure [L/min (ANR)] Inch size Metric size 100 200 300 Series ZFC5 4 5/32" 45 6 1/4" 100 ZFC7 6 1/4" 120 8 5/16" 250 10 3/8" 300 12 350 Flow rate (positive pressure) conditions: Supply pressure 0.1 MPa, Differential pressure 30 kPa Metric size: 5 sizes Inch size: 4 sizes Light gray Orange CAT.ES100-103A Series ZFC Series ZFC 2 types of transparent case

Air Catch Sensor

Station L1 L2 2 110 3 145 36 4 180 71 5 215 106 6 250 141 Unit Manifold With DIN rail Deflection level indicator Terminal block box 35 40 L1 Deflection level indicator 75 40 Terminal block box Rc1/8 SUP. 25 DIN rail center 70 (94.4) 90 25 (94.4) SUP 70 4.5 90 40 (4.5) 30 4.5 Adjusting knob Gauge Electrical entry Applicable O.D. 6.5 to 8.5 12 L2 L3 Gauge 105 Electrical entry Applicable O.D

α PneuAlpha HARDWARE MANUAL

These default values can be changed in the Offset FB Overall Accuracy +/5% (0.5V DC) Input Impedance 150 kOhm or higher Input Voltage 0 10V DC Conversion Speed 10 ms Resolution 10/250 mv Analog Input Range 0 250 ECC-PNAL-20M*-D 8 Channels: I01 I08 ECC-PNAL-10M*-D 6 Channels: I01 I06 Description Analog Input Specication 7 2.4 Output Specication PneuAlpha Hardware Specification 2 Table 2.7

ARM10/11

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.30 0.35 0.6 0.7 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure

IC

Note) If the set pressure is 250 kPa and the output pressure on the pressure sensor is 245 kPa, the deviation is 250 245 = 5 kPa. In order to correct the deviation, the controller increases the output signal until the pressure on the pressure sensor converges at 250 kPa. Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

SMC Electronic Switch Series Variations

ZSE4 ISE4 ZSE5 ISE5 Detection nozzle: 1.0 Piping: 6 X 4 tubing Supply pressure: 0.1MPa Detection distance: 100m ZSE6 ISE6 Detection nozzle: 1.0 Piping: 6 X 4 tubing 5m Supply pressure: 0.2MPa ZSE3 ISE3 4.0 2.5 Set value 50m 300m 100m 200m GS 2.0 3.5 PS Response time (sec) 1.5 3.0 ISA 1.0 2.5 ZSE1 ISE1 Response time (sec) Piping length 0.5 ZSE2 ISE2 2.0 10m 8m ZSP 50 150 0 1.5 100 200 250

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Stations L1 L2 3 74 56 6 122 104 8 154 136 10 186 168 20 346 328 2 58 40 4 90 72 5 106 88 7 138 120 9 170 152 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1.2-45 Series SYJ5000 40 Type Manifold: Bottom Ported/SS5YJ5-40Station -M5 Grommet (G), (H) (Lead wire length) G: 300 H: 600 4-4.5 (Mounting holes) 13 (Pitch) P=16 21 103.2 (GZ, GS

Multistage Ejector Series ZL112/212 1

1 EJECTOR MULTISTAGE Multistage Ejector Series ZL112/212 Energy-saving, large flow rate, 3 stage diffuser construction ZX Suction flow rate increased 250% and air consumption reduced 20% with 3 stage diffuser construction (Versus 1.3, one stage model) 1 stage perf stage perfor ormance mance 1 stage performance Vacuum pressure ZR Q1 Q2 Q3 ZM Q1 Q2 Q3 Maximum suction flow rate (l/min (ANR))

Siiiil"Tivrc

AMG 650 s5o) AMG 250 N I Body Size.