LINEAR GUIDE SINGLE AXIS SLIDER ACTUATOR, ELECTRIC ACTUATOR, A22, 6.71000 lb

HEC_001W-E

C 10 20 30 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. Fig. 5-6 Cooling capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 1000 Cooling capacity W 5 Radiating water flow rate L/min 800 1 3 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.

Table of Contents

mm 2) Number of needle rotations Number of needle rotations Number of needle rotations 15-9-32 2 Speed Controller: Standard Type Large Flow In-line Type Series AS Construction: AS420/500/600 Construction: AS800/900 Component Parts No.

SV

-02 AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800

125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

New

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to be described by L (liter). 1 dm3 = 1 L 31 Series VXZ C : Sonic conductance [dm3/(sbar)] b : Critical pressure

AC Servo Motor Driver (Network card type ）

However, when "0" is set, it will be switched after 600 s. When "-1" is set, the drive recorder function is disabled. Setting range: -1 to 32767 [s] 5 72 5. PARAMETERS Initial value Network No./ Setting digit Function symbol/name ECT EIP PNT [unit] Set a filter readjustment sensitivity of [Pr. PB13 Machine resonance suppression filter 1] and [Pr.

Electric Actuator Triple Axis P&P Unit

700 800 Stroke (mm) 900 1000 1100 1200 1300 1400 1500 Weight of body without motor (kg) 650 Stroke(mm) X axis 100 13.6 150 200 15.7 250 300 17.8 350 400 19.9 450 500 22.0 550 600 24.1 1500 43.0 Stroke(mm) X axis 700 26.2 750 800 28.3 850 900 30.4 950 1000 32.5 1100 34.6 1200 36.7 1300 38.8 1400 40.9 Weight of body for side mount without motor 650 Stroke(mm) X axis 100 17.1 150

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

.: 8 (L4) L3 8 U side D side 52.9 <53.6> 2n1-M5 x 0.8 (ports A, B) [46] [54.5] 22.5 1 4.1 32 5.5 P B B B B B B 4.7 35 44.4 <45.1> 10.2 23.5 26 3 R A A A A A A DIN rail (VZ1000-11-1-) G: Approx. 300 H: Approx. 600 [46] [54.5] ( ) lead wire length ( ) lead wire length DIN rail holding screw (Voltage rating indication) 33.2 (Port M5) (Pitch) P = 10.5 13.5 24.3 2n2-One-touch fitting (ports A,

Compressed Air Preparation Filter

pressure 0.3 MPa Inlet pressure 0.3 MPa 14 12 10 Inlet pressure 0.5 MPa 12 Inlet pressure 0.5 MPa 10 Inlet pressure 0.5 MPa 8 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 10 Max. flow capacity line 8 Max. flow capacity line Max. flow capacity line 8 6 6 6 4 4 4 2 2 Inlet pressure 0.7 MPa 2 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 150 0 0 300 50 250 200 150 100 300 600

AZ1000

psig (4.1 MPa) 1.5 (38.1) 80 0.55 0.48 70 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 0.41 60 0.34 50 0.27 40 0.69 (17.5) 0.21 30 0.14 20 2.5 (63.5) 0.07 10 A 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA Inlet pressure: 2 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg) -21 600 Delivery

CXS

Compact Type: CXSJ Vertical Mounting l l Mounting orientation m m Max. speed (mm/s) Up to 200 Up to 400 Up to 600 Up to 800 All strokes Stroke (mm) 6 10 15 Selection graph (1) (2) (3) (4) 20 25 32 Horizontal Mounting l Mounting orientation m m Refer to the caution notes below.

New

P2 + 0.1 When b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t P2 + 0.1 When > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 293 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 273 + t Q: Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are allowed to be described by L (liter). 1 dm3 = 1 L 28 Solenoid Valve Flow-rate Characteristics Series VXN/VX2 C : Sonic conductance

3

500 400 300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.

CXS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Max. speed (mm/s) Up to 200 Up to 400 Up to 600 Up to 800 All strokes Stroke (mm) 6 10 15 Selection graph (1) (2) (3) (4) 20 25 32 Horizontal Mounting l Mounting orientation m m Refer to the caution notes below.

MY1

Horizontal mounting Cylinder MY1HT50-600 Average operating speed a 700 mm/s Mounting orientation Vertical mounting CusionShock absorber ( = 1/100) 2. Wall mounting z y P. 8-11-36 P. 8-11-6 MY1HT50-600 x y x z Wd: Workpiece (500 g) x 3. Ceiling mounting 4.

Series: LEFS, Accuracy: H (High-precision Type), Size: 25, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 400mm, Motor Option: w/o Option, Auto Switch Compatibility: C (with Includes 1 Mounting Bracket), Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator

Size: 25, Motor Mounting Position: Top Mounting, Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 150mm, Motor Option: W (w/Lock/Motor Cover), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Series: LEFS, Accuracy: Basic Type, Size: 16, Motor Mounting Position: R (Right Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 350mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: N (w/o, Roller Specification), Positioning Pin Hole: K (Body Bottom 2 Locations

Size: 16, Bearing Type: M (Sliding Bearing), Motor Mounting: D (In-line Type), Motor Type: Step Motor (Servo/24VDC), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 30mm, Motor Option: B (with Lock), Guide Option: w/o Guide, Actuator Cable Type: R (Robotic Cable - Flexible cable), Actuator Cable Length: 5 (5m), Controller Type for (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct