Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Refer to the dimensions on page 562 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimension [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 398 410.5 423 435.5 448

Step Motor Controller

Refer to the dimensions on page 52 for the mounting dimensions. (35) (25) L Dimensions No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 L dimension 110.5 135.5 160.5 185.5 210.5 235.5 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 273 298 323 348 373 398 423 448 473 498 L dimension 285.5 310.5 335.5 360.5 385.5

Slider Type Ball Screw Drive/11-LEFS Series

24 66 6.5 M4 x 0.7 thread depth 8 (F.G. terminal) 6 13.9 Vacuum port Rc1/8 +0.025 0 3H9 ( ) depth 3 n x 4.5 4 48 120 F B D x 120 (= E) 10 Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more because of round chamfering.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

47.9 41 41.6 31.1 23.9 AS331F-02-06ST AS231F-N02-07ST 1.5 34.7 7 NPT1/4 17.5 19 1/4" 13.2 17 38.5 17 25.2 6 12.8 73 46.5 44 42.5 40.2 34.2 25.6 12.9 20.6 18.3 AS331F-02-08ST AS231F-N02-09ST 5/16" 15.2 39.7 18.5 18.5 28.2 8 15.2 76 49.5 47 12.9 45.1 35.2 28.2 9.5 23 1.5 49.3 R1/4 19 54.8 AS331F-02-10ST AS231F-N02-11ST 3/8" 17.9 20.2 43.7 21 21 32.6 10 18.5 80 53.9 48 47.9 38.7 31 16.2 23

ISO Standard Hydraulic Cylinder

18.5 13.5 15 10 20 15 12 7 48 47 48 52 51 48 46.5 46 8.5 6 12.5 10 66.5 58 18.5 15.5 15 12.5 20 17.5 12 9.5 57.5 59 57.5 62.5 63.5 58 59 57 D-A5/A6/A59W cannot be mounted to 40, 50.

CL

56 16 20 22 30 28 28 28 30 47.6 53 67.7 78.7 Clevis style: CLG1DN Clevis Style Bore size (mm) BZ CZ L RR TE TF TH TT TV TW TX TY TZ CDH10 8 0.058 0 10 0.058 0 12 0.070 0 14 0.070 0 20 25 32 40 44 52.5 57.5 66 29 33 40 49 14 16 20 22 11 13 15 18 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 3.2 3.2 4.5 4.5 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 43.4 48 59.4 71.4 Clevis pin and

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

T79 Grommet 2-wire 12 V T79C Connector S79 3-wire (NPN) IC circuit Grommet 5 V, 12 V Relay, PLC Heavy-duty cord S7P 3-wire (PNP) For 20, 24 V 30 and 40 R73 100 V Grommet R73C Connector 2-wire R80 48 V, 100 V 100 V or less IC circuit Grommet R80C 24 V or less Connector Lead wire length symbols: 0.5 m Nil (Example) R73C 3 m L (Example) R73CL 5 m Z (Example) R73CZ None N (Example) R73CN

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

CLQ

52 39 42 20 25 28.5 32.5 60 64 27 31 40.7 44.2 MLU Head side flange style: CLQG/CDLQG ML1C DFV S -X Head Side Flange Style Stroke range Without auto switch With auto switch Bore size (mm) 20A + Stroke B + Stroke L G 8 FZ FX 2-6.6 B A A B 5 to 50 5 to 50 29.5 32.5 69 76.5 19.5 22.5 59 66.5 20 25 Data Bore size (mm) FZ FX FV G L L1 S Rod end nut 60 64 27 31 48 52 39 42 4.5 5 18.5 22.5 40.7

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Fig. (1) Correct position Fig. (2) Incorrect position Example of 15 with holding force type L 8-15-48 48 Series CY1S Model Selection 1 Operating Conditions E: Kinetic energy of load (J) W V 2 E = () 2 1000 Es: Allowable kinetic energy for intermediate stop using an air pressure circuit (J) Ps: Operating pressure limit for intermediate stop using an external stopper, etc.

PF-OMN0009_C

28 18 3.5 14 S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0009CN-F PF3W521 2X A AA B DD E F G H J K L N P 11/4,11/2 104 74 31 52 39.5 G 11/4 108 76 33 54 41.5 PF3W521 56 76.6 71.6 28.5 54 25 27.5 3.5 14 G 11/2 112 78 35 56 43.5 -42No.PF-OMN0009CN-F PF3W504/520/540/511/521()

JXCx-OMT0023

When fabricating the motor lock cable LE-CSB-RA, refer to section 11.1.4. 3 48 3. SIGNALS AND WIRING (2) When cable length exceeds 10m When the cable length exceeds 10m, fabricate an extension cable as shown below on the customer side. In this case, the motor brake cable should be within 2m long.

Electric Actuator / Low profile slider type

Check the actual stroke range, and then command Stroke study again. / Refer to the LECP2 controller operation manual. -48- No.

3

46 51.5 U 35.5 38 43 48 20 25 32 40 50 63 398 Auto Switch Mounting MK Series Auto Switch Mounting Bracket/Parts No.

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

VQ5000

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-G3/4 Conduit port 144.5 143 112.5 83.5 179 46.8 59.2 106 9 9 U side 55.5 M5 ground screw 19 34.5 34 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port B 2 A 4 6 B 2 A 4 Indicator light 5 B 2 A 4 A 4 SMC SMC SMC SMC A A B B B B B Manual override L2 L1 58.5 P = 41 B 2 A 4 A B 3 B 2 A 4 A B 2 A 34.5 48

VZS

Option Specifications 24, 48, 110, 220 VAC (50/60 Hz) 6, 12, 48 VDC Locking type (Tool required) With light/surge voltage suppressor Note) Coil rated voltage Manual override Option Plug-in type Note) Plug-in, K plug connector type is standard with light/surge voltage suppressor.

VM

Roller lever Roller lever One way roller lever Straight plunger Roller plunger Cross roller plunger Adjustable roller lever Toggle lever Push button (Mushroom) Push button (Extended) Push button (Flush) Twist selector (2 position) Adjustable rod lever Key selector (2 position) Twist selector (3 position) Foot pedal Push-pull P . 5-6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48

13

1 4 1 8 ZU 1 8 1 8 1 8 6/Rc 6/Rc 6/Rc Body ported type (Without silencer) 48 1.0 1.3 1.5 1.8 2.0 88 ZL 1 8 1 8 1 8 1 8 6/Rc 8/Rc 10/Rc 12/Rc 12/Rc 6/Rc 10/Rc 8/Rc 10/Rc 1 4 1 4 ZY 1 4 3 8 3 8 12/Rc 12/Rc Body ported type (Without silencer) 88 53 3 8 3 8 Supply pressure: 0.45 MPa. 1 2 1 2 16/Rc 16/Rc ZQ ZF Construction ZP Box type (Built-in silencer) Body ported (Without silencer) Cover B