Electro-pneumatic Proportional Valve Series VEF/VEP 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.03 s or less 0.03 s or less 0.05 s or less 0.05 s or less Response time Hysteresis 3% F .S. IR Repeatability 3% F .S. VEX Sensitivity 0.5% F .S.

Electro-pneumatic Proportional Valve Series VEF/VEP

IR Repeatability 3% F .S. VEX Sensitivity 0.5% F .S.

Electro-Pneumatic Valve NVEP/NVEF Series

Fluct. l\,lax. +1% @ 79'F (25'C) {1A F.S.) Max. +2% @ 79'F (25'C) (1A F.S.) vEA 250 vEA 251 vEA 252 Cperating Temp.

EXxx-OMO0027

5 6050:01 Channel 0 6050:02 Channel 1 6060:0 (No input data allocation) Slot 6 60A0:0 Diag.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

1/4 28.2 46.5 ASD430FG-02-08S 15.2 11 34.4 29.4 18.5 19.7 10 31 49.3 ASD430FG-02-10S 18.5 21 6 25.2 48.3 ASD530FG-02-06S 12.8 17 20.3 28.2 8 51.3 ASD530FG-02-08S 15.2 18.5 23 19.8 46.9 41.9 48.8 43.8 19 R 1/4 15.4 42.8 37.8 32.6 10 54.1 18.5 ASD530FG-02-10S 21 23.1 34.4 12 55.9 20.9 ASD530FG-02-12S 22 25.2 48.3 6 17 12.8 ASD530FG-03-06S 20.3 28.2 51.3 8 18.5 15.2 ASD530FG-03-08S 23 19.8

Vacuum Unit

C C1 L L1 L2 L3 L Individual wiring V V V V F D-sub connector V V P Flat ribbon cable connector V V 8 (Common PV) 6 (Common PS) P Vacuum pump system PN 5/16"(Common PV) 1/4" (Common PS) 10 10 stations 1 Common wiring F/P is available only for solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.

VFA3000

Caution Refer to p.0-33 to 0-36 for Safety Instruction and common precautions. 3.2-13 VFA3000 Dimensions/Body Ported 2 position single: VFA3122-F 01 02 SlA VlA SlA VlA VM/VR VH 2 position single: VFA3130-01 02 3.2-14 VFA3000 Dimensions/Body Ported 2 position double: VFA3230-01 02 3 position closed center/exhaust center/pressure center: VFA3 30-X1 01 02 3 4 5 3.2-15 VFA3000 Dimensions/Base

Soft Start-up Valve AV2000/3000/4000/5000 1

-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 VY1 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29 0 38 40 31 125

5 Port Solenoid Valve Series SZ3000 Plug-in Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Stations Stations Symbol 02 Symbol 02 2 stations 2 stations Double wiring specifications (1) Double wiring specifications Connector mounting position 10 02 11 02 10 stations 11 stations Mounting position Symbol D 2 stations 2 stations Specified layout (2) (Up to 21 solenoids possible) D side Specified layout (Up to 22 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable

Pin Cylinders Series CJP2/CJP

10 8.5 6.5 7.5 24 10 M5 x 0.8 M14 x 1.0 M5 x 0.8 19.5 4 43.5 Built-in magnet: CDJP2B6 to 16 Z + Stroke S + Stroke H A' F GB GA 2 x P A F' Mounting nut Width across flats B1 A' Rod end nut Width across flats B2 30 D-1 D E J C MM Without rod end thread NN W B (mm) Symbol A A' B B1 B2 C D E F F' GA GB H J MM NN P S W Z Bore size 6 10 16 7 9 14 14 5.5 2 3 16.5 8 6.5 5.5 6.5 17 6 M3 x 0.5 M10

VT317

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil no. PVT317-001GBPVT317-G PVT317-001GB-L06 PVT317-G-06 PVT317-001CBPVT317-C Coil assembly with terminal part no.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-02 ASP ASN AQ ASV AK VCHC ASS ASR ASQ Component Parts No.

HRX-OM-M090

Model number: HRS0-F-0 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

Precision Regulator

OUTPUT PRESS. 0.01 0.01 0.01 0.01 0.2MPa 0.2MPa 0.2MPa 0.2MPa IR3000 IR3000 IR3000 IR3000-02 02 02 02BG BG BG BG *** *** *** ***-*** *** *** *** Product code *** *** *** ***-*** *** *** *** Product number Max. supply pressure Set pressure range G G G G T T T To o o o MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN o Production lot no. Production lot no.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Free Mount Cylinder for Vacuum Series ZCUK

N S U F GN GS NBR Silicon rubber Urethane rubber Fluororubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Material N S U F NBR Silicon rubber Urethane rubber Fluororubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Pad type Table (1) Pad Dia./Pad Type Pad type Application: Refer to Table (1). Dia.

VXP21/22/23

LVH Connection LVD 02 03 04 06 10 12 14 20 1 4 Thread type Nil T F N Refer to the table (2) given below for availability. 3 8 1 2 3 4 Rc NPTF G NPT Thread LVQ Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LQ 1 4 1 2 LVN 32 40 50 For 32A For 40A For 50A Flange TI/ TIL PA Refer to the table (1) given below for availability.

q"s

, Connection thread f--Tpr -l rype T N--fNPr _-.l LT.l "-_l llTV20-02-3 . . . . . . . . . . . . . . . . . . . . . . . . 1 set (3 station manilold base parl no.) + tIV203o-31 1S-X26 .1 set (Elsctro-pneumalic regulator pad no-)Nole2) +P398020-13 . . . . . . . . . . . . . . . . . . . . 1 set (Blanking plate assembly parl no.)

Electro-Pneumatic Proportional Valve Series VEF/VEP

Repeatability Sensitivity 0.5% F .S. Linearity 3% F .S. or less Lubrication Not required (Use turbine oil Class 1, ISO VG32, if lubricated.)

High Power Cylinder Series RHC

NA S + Stroke F H WH B ZZ + Stroke (mm) A B C D E F GA GB H H1 H2 I Bore size (mm) Stroke range (mm) Effective thread length 26 8 5 44 47.5 53.5 16 14.5 10 18 40.5 32 15.5 200 to 700 20 31 8 6 48 49.5 56.5 16 18 12 22 45.5 36 19.5 200 to 700 25 38 9 6 51 51.5 55 19 18 12 22 51.5 44 19.5 200 to 1000 32 47 11 8 54.5 51.5 56 21 20.5 16 24 61.5 53 21 200 to 1000 40 N NE NA NB NF ND NN P S WH