Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Ball bushing O-ring NBR Snap ring Nickel plated Carbon tool steel Rod end nut Nickel plated Steel Mounting nut Steel 12 Series MQM Dimensions Basic type: MQMLB 6 Mounting nut M12 x 1 Rod end nut 2-M5 x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F F S + Stroke H ZZ + Stroke (mm) P Bore

Rotary Table/

(Excluding D-F9, F-9 V) Note 2) For solid state switches with flexible lead wire specification, add "-61" at the end of the lead wire length.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

'i,-.1-)^' l z N F Noz l!

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

Modular Type Regulator Series AR

5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21 21 AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 0 3.5

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Table of Contents - Tubing

Burst Pressure Characteristics Chart 725 TPH0425,TPH0604 Burst pressure TPH0806,TPH1075,TPH1209 Burst pressure Burst pressure psi 580 435 290 Max. operating pressure (TPH0425,TPH0604) 145 Max. operating pressure (TPH0806,TPH1075,TPH1209) 4 32 0 68 104 176 Operating temperature F TUB-13 Clean Tubing: Soft Polyolefine Tubing How to Order TPS 06 04 B 20 Tube O.D.

LEKF-OMZ0035

Product Outline . 13 3.1 System construction . 13 4.Elictric actuators / Common precautions . 13 4.1 Wiring/Cables . 13 4.2 Design/Selection . 14 4.3 Mounting . 15 4.4 Handling . 17 4.5 Operating Environment . 18 4.6 Maintenance . 19 4.7 Actuator with Lock . 19 4.8 Design/Selection . 20 4.9 Handling . 21 4.10 Mounting . 22 4.11 Power Supply . 22 4.12 Grounding . 22 4.13 Wiring . 22 4.14 Maintenance

Series KP/KPQ/KPG

, Bumper EPDM Particulate Generation Grade Classifications Relationship of Operating Temperature and Maximum Operating Pressure 1.2 104 Average particle concentration Particles/ft3 Maximum operating pressure MPa Grade 4 1.0 103 0.8 102 Grade 3 0.6 101 Grade 2 0.4 100 Grade 1 10-1 0.2 0 0.1 0.2 0.3 0.5 1 -20 0 20 40 60 80 Particle diameter m or less Operating temperature C 1MPa = 145 psi F

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

M18 X 1.5 M22 X 1.5 M26 X 1.5 4 4 5 5 5 5 16 16 16 16 16 16 15 21 21 21 30 30 6 6 7 7 10 10 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 45 52.5 59 64 76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26

Series KP/KPQ/KPG

, Bumper EPDM Particulate Generation Grade Classifications Relationship of Operating Temperature and Maximum Operating Pressure 1.2 104 Average particle concentration Particles/ft3 Maximum operating pressure MPa Grade 4 1.0 103 0.8 102 Grade 3 0.6 101 Grade 2 0.4 100 Grade 1 10-1 0.2 0 0.1 0.2 0.3 0.5 1 -20 0 20 40 60 80 Particle diameter m or less Operating temperature C 1MPa = 145 psi F

EXxx-OMN0035CN

15 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 (EX600-DYF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 4 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -43No.EX-OMN0035CN-A EX600-DYB EX600-DYE -44No.EX-OMN0035CN-A EX600-DYF -45No.EX-OMN0035CN-A EX600-DM E D-sub (25 ) 8 8 F (32 ) 8 8 P PNP N NPN EX600-DME No. 1 LED 2 () 3 4 D-sub (No.4-

CEx-OMQ0013

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

MRQB-OM0002

2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121 161 241 322 402 482 536 32 12.2 IN 675 101 135 202 270 337

VK3000

Refer to page 3-13-4.) 10 ms or less (Standard), 15 ms or less (Low wattage type) Non-locking push type Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Actuator effective torque STa (S is 10 times or more) (Example) (Example) F: Pressing force (N) Friction coefficient Accelerating torque calculation Ta = I (Nm) Static torque calculation Weight m F = mg Ts = F x l (Nm) I : Moment of inertia Static torque calculation Movement Refer to page 11.

Electro-Pneumatic Positioner Series IP8000/8100

Series IP8000/8100 (Lever type) (Rotary type) 100mm in height (shortened by 13% compared with IP6100) 100mm in height (shortened by 13% compared with IP6100) 100mm in height (shortened by 13% compared with IP6100) Folk lever joints (Rotary type) Can absorb off-centering. 100mm 100mm Spring pin Pressure gauge (O.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36

SYJA3000

) 2-P1.8 2-M3 X 0.5 (Pilot port) A B 11 1.5 (Mounting holes) 2-3.2 17.5 18.5 A B (Non-locking) Manual override (Non-locking) Manual override 14 36 18.5 21 41.6 13.5 15 41.6 28.5 R2 P R1 21 R P R 13 11 0.5 10 5 5 1 (Bleed port) 210 10 7 7 1 (Bleed port) 228 5-M3 X 0.5 (Piping port) 5-M5 X 0.8 (Piping port) 3 position closed center/exhaust center/pressure center: SYJA3 20-M3(-F) 3 position

Compact

Note 10) A reference value for correcting an error in reciprocal operation. 13 800 14 900 15 1000 Switch and Acceleration Note) Table 2 Switch no. Acceleration [mm/s2] 0 250 1 500 2 1000 3 1500 4 2000 5 2500 6 3000 7 4000 8 5000 9 6000 10 7500 11 10 12 12500 13 15000 14 17500 15 20 Note) The factory default setting for the switch is No.0.