3

PF3W711/511-;10 p10 (at 100 L /min) PF3W711/511-;06 PF3W721/521-;14 p8 (at 50 L /min) (at 250 L /min) p6 p4 PF3W721/521-;12 PF3W711/511-;10 (at 50 L /min) p2 (at 250 L /min) p0 0 2 4 6 8 10 0 2 4 6 8 10 Straight piping length [cm] Straight piping length [cm] No data for 4 cm, or for under 5 cm, as these cannot be used due to piping dimensions. 5 Digital Flow Switch for Water Series PF3W 3

Compact Cylinder

end nut CU CX +0.4 +0.2 L1 A + Stroke CL + Stroke B + Stroke L CW RR CZ 0.1 0.3 Rod end male thread Double Clevis (mm) A 42.5 B 8 CD 64 CL 4 CT 9 CU 8 CW CX 15 CZ 8 L 16 L1 6.5 RR 24.5 Size Stroke range 20 25 32 40 72 5 to 50 5 to 50 74 42.5 8 66 4 11 17 9 18 6.5 24.5 8 5 to 100 88 49.5 10 78 7 13 22 11 22 6.5 32.5 10 5 to 100 93 49.5 10 83 10 13 27 13 26 6.5 32.5 10 Double clevis bracket

Compact Type Dual-Rod Cylinder Series CXSJ

(mm) Overhang L (mm) Graph V = up to 800 mm/s (up to 700 mm/s for 15, 20) 4 CXSJM CXSJL Graph V = up to 600 mm/s 3 CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= =

Compact Vacuum Unit

(4) 2.9 14.5 psi (0.1 MPa) (20) 0.07 (2) 0 0 0 0.07 (2) 0.14 (4) 0.21 (6) 0.28 (8) 0 4 2 8 6 10 Suction flow SCFM (L/min (ANR)) Needle opening [rotations] The actual suction flow at the point of suction varies depending on the vacuum pumps piping conditions.

Table of Contents

-6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 C D A M2.5 x 21l M2.5 x 23l M2.5 x 25l M2.5 x 27l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 38l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l

Air Catch Sensor Series ISA

Air Catch Sensor Series ISA Dimensions: Individual Wiring Type (Lead Wire Type) Body Manifold With bracket Lead wire (5 m) Lead wire (5 m) Bracket 34 L2 34 L1 Bracket 34 (18) 10 10 SUP port Deviation level indicator light 10 10 Rc 1/8 Deviation level indicator light Gauge DIN rail center SUP 100 100 90 90 40 (4.5) 30 Setting dial 12 4 x 4.5 35 42 Gauge 42 35 42 8 x 4.5 EXH port 69.3 (Max

2/3 Port Valve

(mm) mm Flow rate coefficient Max. system pressure (MPa) (1) Port size Weight (g) Cv Water Air Model AC DC AC DC AC DC Effective area (mm2) 34 10 1.9 600 10 VXZ2232-02 0.7 0.6 0.7 0.6 0.7 0.6 1 4 1 4 10 43 2.4 600 10 VXZ2232-03 0.7 0.6 0.7 0.6 0.7 0.6 3 8 3 8 . 0.7 VXZ2242-04 0 1.5 15 95 5.3 850 15 0.7 0.6 0.7 0.6 0.6 1 2 1 2 165 20 9.2 1,370 20 VXZ2352-06 0.7 0.6 0.7 0.6 0.7 0.6 3 4 3 4

Refrigerated Air Dryer

Applicable dryer Capacity Model Inlet voltage Outlet voltage A B C D E F Weight (kg) 200, 220 230, 240 VAC (50 Hz) 200 to 260 VAC (60 Hz) 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase Single turn IDF-TR500-2 IDF1E-10 to 8E-10 IDU3E-10, 4E-10 500 VA 118 140 150 70 112 142 6 IDF-TR500-3, 4 C VOLUTAGE SELECTOR FUSE B OUT PUT IN PUT E D 4-F A Input cord 2 m Transformer part no.

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

KQ2

3.2 10 14 8 8 10 14 10 10 12 14 17 15.5 3.4 2.9 M5 x 0.8 M6 x 1.0 12.7 13.9 8 4 4 4 1 8 1 4 18 13.5 5.6 4 16 Connection thread M5 x 0.8 M6 x 1.0 13.5 10 4 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 6 18.5 17 15.5 24 20.5 15.5 26 27.5 22.5 19 28.5 23.5 22 33 27.5 13.1 10.4 17 Applicable tubing 14 8 26.1 18.0 18.5 17 26.1 26.1 17 21 10 3 8 41.5 29.5 1 2 22 Connection thread (With sealant

Compact Guide Cylinder Series MGQ

221 2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 80 90 100 110 140 170 5 10 10 10 15 15 100 110 124 132 166 200 M8 x 1.25 11 11 12.5 15 18 21 16 17 17 19 21 25 E DB A 50 st or less 53 54 60 61 84 89 Bore size (mm) Bore size (mm) 32 40 50 63 80 100 MGT A DB E M8 x 1.25 Over 50 st 90 90 102 102 143 153 50 st or less 5.5 0 4 0 9.5 5 Over 50 st 42.5 36 46 41 68.5 69 M10 x 1.5 32 40 50 63 80 100 20 20 25 25

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) MXJ Graph (19) Stroke: Up to 100 stroke Graph (15) Stroke: Up to 100 stroke MXP 20 20 10 10 MXY 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) MTS 40 2 2 32 32 1 1 25 20 0.5 0.4 0.3 0.5 0.4 0.3 25 20 16 16 0.2 0.2 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L

2–4

/8 NPT1/8 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA IB J KA KB L M N OB RA RB S U Z , TN, TF , TN, TF 38 10 5 60 58.5 4.5 28 19.8 7 34 5.5 9 7 58.5 31.5 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 46 10 5 69 67.5 5 33 23.3 7 40 5.5 9 7 66

Title not found

COM 10 LZR 9 6 LB B phase pulse detector (Differential line driver) LG 3 7 LBR Control common SD Plate 34 LG Control common 10 m or less Note 5) 33 OP Z phase pulse detector (Open collector) 1 P15R Plate SD 10 m or less 2 m or less Note 4) CN1 EMG Emergency stop 42 SON 15 Servo ON CN6 Note 4) RES 19 Reset 3 MO1 PC 17 Proportion control Analog monitor 1 10 VDC 1 LG TL 18 External torque limit

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

Clamp Cylinder with Lock

Unlock-port Unlocked when pressured Dust cover MA Rc1/4 Retraction port WA Cushion valve Top width across flats 3 (Tube cover side only) NA Rc1/4 Unlock-port Unlocked when pressured N 52 L + Stroke Hs 3 x Rc1/4 Extension port GA 10 17 10 BX W 3 10 14 3 x Rc1/4 Retraction port 45 M IA BY 36 40 13 35 D 30 Width across flats K 4 x M6 x 12 Clevis width CLK2GA: 16.5 CLK2GB: 19.5 +0.3 0 +0.4 0

VZ3000

fitting) VK VZ VF (Pitch) VFR (Mounting hole) (1(P), 3/5(R) port) 4-Rc 1/4 VP4 VZS G: 300 mm H: 600 mm VFS (Lead wire length) VS4 VQ7 EVS VFN 2n-One-touch fitting (4(A), 2(B) port) Applicable tubing model: T0604 (Pitch) (mm) Stations 2 3 65 52 81 68 20 353 340 L1 L2 4 97 84 5 113 100 6 129 116 7 145 132 8 161 148 9 177 164 10 193 180 11 209 196 12 225 212 13 241 228 14 257 244 15 273 260

Electric Actuator / Low profile slider type

Condition 1) 30mm position Step no.0 Step no.0 (Move Method: Relative) Condition 2) 30mm position Step no.1 Step no.1 (Move Method: Relative) mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 Relative 100 10.00 3000 3000 0 0 0 100 10.00 20.00 1.00 1 100 3000 3000 0 0 0 100 Relative -10.00 10.00 20.00 1.00 Position 10(INC) c Attainment point: 50[mm] 0 10 20 30 40 50 Stroke [mm] Position -10(INC

Electric Rotary Table

(N) Max. gripping force (N) Max. gripping force (N) Stroke/both sides (mm) Stroke/both sides (mm) Max. gripping force (N) Stroke/both sides (mm) Size Stroke/both sides (mm) Size Size Size Basic Compact 4 6 10 14 22 30 Basic Compact 4 6 10 14 Basic Compact 4 6 8 12 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

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