Prevents Micro-Bubbles

3/16, 1/4 LVC3 8 6, 8, 10 1/4, 3/8 LVC4 10 10, 12 3/8, 1/2 LVC5 16 12, 19 1/2, 3/4 LVC6 22 19, 25 3/4, 1 Model Orifice diameter Metric Tubing O.D.

HRX-OM-Q026

GWP reference . 8-6 8.1.7 Communication specifications . 8-6 8.2 Dimensions . 8-7 8.2.1 HRSH100-A-20/40. 8-7 8.2.2 HRSH150-A-20/40-, HRSH200-A-20/40. 8-8 8.2.3 HRSH250/300-A-20-, HRSH250/300-A-40. 8-9 8.2.4 HRSH100/150/200/250-W-20/40. 8-10 8.3 Flow Diagram . 8-11 8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40

HRX-OM-X037

water (Water-cooled type) . 8-9 8.4 Replacement of consumables . 8-10 8.4.1 Replacing Particle Filters . 8-10 8.4.2 Replacing the DI filter . 8-10 8.4.3 Consumables . 8-13 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRL100/200/300-A-40 . 9-1 9.1.2 HRL100/200-W-40 . 9-3 9.1.3 Refrigerant with GWP reference. 9-5 9.1.4 Communication specifications . 9-5 9.2 Dimensions . 9-6 9.2.1

CXS

0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 8-28-9 9 Series CXS 8-28-10 10 Series CXS Model Selection Caution Confirmation of theoretical output is required separately.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

VQZ1000/2000/3000

448 34 485.5 37 473 36 39 498 38 40 L dimension 510.5 Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions Applicable fittings size d Model A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 3.2 31.5 16 Color: White 6 32 16 8 35 18 10 39 20.5 12 43 22 Silencer (For EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

A 2 A Power supply (Output) 24 VDC +10/-5%, 24 VDC +10/-5%, 8 A DC24 V +10/-5%, 4 A 2 A Enclosure IP67 (With manifold assembled) 1 Environment Operating temperature range -10 to 50 oC Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%R.H.

Environment

0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg]

MTS

If an impact load is applied to the spline rod, the guide unit may be permanently deformed and displacement may increase. 0 10 20 30 Lateral load (N) 8-10-10 10 Precision Cylinder Series MTS 8, 12, 16, 20, 25, 32, 40 How to Order MX Piping direction MTS Bore size Standard piping type Axial piping type Nil P 8 8 mm MY MTS 8 F9BW 20 8 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

-02 AS321F AS331F AS421F AS431F Model 3.2, 4, 6 8, 10 Metric size 6, 8, 10 3.2, 4 4 6 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8" 5/32" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 100 230 180 260 390 460 660 790 920 1580 1710 Controlled flow (Free flow) 1.5 3.5 2.7 4 6 7 10 12 14 24 26 Effective area (mm2) Note)

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46 15 10.5 19 52 52 52 96.5 17.5 35 22.5 32 22.5 43 61 49 98 65 14 23 55 55 55 103.5 10.5 19 58 58 58 103 17.5 40 25 36 25 46 63 50 101 68 14 23 61 61 61 111

VQ4000

61.5 143 10 1.6 99 32 14.5 8 (182.5) Min. 0 to max 4 unit (0 to 216 mm) DI unit U side 54 VQC SQ L2 (In the case of 2 pcs.

AS-FG/ASD-FG

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 5/16" 3/16" 1/4" 1/8" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow Direction Symbols on Body Meter-out type Meter-in

C76

..) ( n2 2 15 + 45 (n = 2, 4...) ( n 2) 2 15 10 10 15 60 60 + 45(n 2) 6-10-6 7 Series C76 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Construction [First angle projection] Double acting, Single rod C7632 to 40 Rubber cushion 17 8 6 15 7 18 1 4 3 12 5 16 14 11 13 9 2A 2B 2C CJ1 CJP Front nose F Front nose in line port Y Basic: Double end E CJ2 10 17 8 6 15 7 18

C76

..) ( n2 2 15 + 45 (n = 2, 4...) ( n 2) 2 15 10 10 60 60 + 45(n 2) 15 6-10-6 7 Series C76 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Construction [First angle projection] Double acting, Single rod C7632 to 40 Rubber cushion 17 8 6 15 7 18 1 4 3 12 5 16 14 11 13 9 2A 2B 2C CJ1 CJP Front nose F Front nose in line port Y Basic: Double end E CJ2 10 17 8 6 15 7 18

MHZ

0 0.4 0 0.4 0 0.4 0 0.4 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible 9.7 9.7 12.6 12.6 17.2 17.2 22.8 22.8 5 5 8 8 10 10 12 12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7

MHZ

0 0.4 0 0.4 0 0.4 0 0.4 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible 9.7 9.7 12.6 12.6 17.2 17.2 22.8 22.8 5 5 8 8 10 10 12 12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled