Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q H R R H F F E E D C D C Y Y 2.5 2.5 A B A B With a stroke of 10mm With a stroke of 20 to 50mm Dimensions/10mm stroke Additional dimensions by stroke(mm) (mm) I H J Q: 6 Q: 8 Stroke A B C D E F H I J Y Model R S R S 20 +10 3 0 ZPR40F10-0-A14 ZPR50F10-0-A14 30 40 43 12.5 18.5 32.3 49.5 61.5 129.5 5 +20 +7 50 12.8 24.3 15.2 26.2 50 50 53 13.5 19.5 33.3 50.5 62.5 130.5 6 +25 +40 +52 15

ZP

How to Order ZP40 H N Pad unit Pad diameter Pad material Symbol Pad diameter 40 50 63 80 100 125 Symbol Material NBR Silicone rubber Urethane rubber FKM EPR 40 50 63 80 100 125 N S U F E Pad type Symbol Type Heavy-duty (Flat with rib) Heavy-duty (Bellows) H HB Dimensions: Pad Unit ZP H 40 50 ZP H ZP H 63 80 100 125 C C C 4.5 4.5 6 5.5 3.5 3.5 21 D 6 10 8 Y 11.5 3 7.5 A A A B B B 4 x 6 4 x

CRB2/CRBU2/CRB1

Model b (h9) h (h9) L !

CNG

19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l 0.25 ZZ H e f h ZZ 20

VCL

N C37 Class B Class H Class B Class H SUS FKM Valve type N.C.

Series VCL

N C37 Class B Class H Class B Class H Stainless steel FKM Valve type N.C.

Valve Single Unit

: SX7140(R)G H 02 03 Polarity indication Manual override (Press and turn for the locking type.)

Cylinder with Lock Series CNG

19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l 0.25 ZZ H e f h ZZ 20

CHKD/CHKG

Dimensions CHKDB--XC61 F with effective thread depth G Width across flats f C D d a Width across flats E b e g H h + Stroke X with thread depth Y Note) J C B + Stroke Rod end male thread A + Stroke A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1 12 32 63 51 12 18 15 13 M10 x 1.5 12 7 8.5 M8 x 1.25 16 40

SMC Pneumatic Clean Series

B H (mm) (mm) Applicable bore size SNJ-010B SNJ-016B SNKJ-016B Part no.

Rotary Actuator/Vane Type

E 4g70.004 0.016 L 0.5 MSZ 2 x M3 x 0.5 K CRQ2X MSQX G D B C 9 14 24 19.5 3 3.6 9.5 N 9.5 T MRQ M 2 x R H 3 Shaft-end shape of size 40 1.5 2 4 0 0.030 K Parallel key dimensions h L1 b b (h9) h (h9) L1 4 0 0.030 4 0 0.030 20 DRefer to page 61 for details of shaft type J.

IDG

Note) Not applicable with the cases of standard dew point 20C (Nil), 15C (symbol H).

MK

149 H 4.9 Clamp part 600 418 300 182 R 6 Performance of non-rotating 0.7 to 1.4 32 16 CE1 800 557 400 243 H 8 Clamp (Retracted stroke end) 1050 731 525 319 R 10.5 40 16 CE2 1250 870 625 380 H 12.5 1648 1149 825 502 R 16.5 50 20 ML2B 1961 1365 980 596 H 19.6 2801 1950 1400 851 R 28 63 20 C J G5-S 3121 2172 1560 948 H 31.2 Note) Theoretical output (N) = Pressure (MPa) x Piston area (cm2) x

Electric Actuator / Slider Type 《 AC Servo Motor 》

When the positioning mode is set: The minimum unit of the travel distance of the actuator should be 1 [m]. 9 - LECSB LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter Para. No.

MQQ

Metal Seal Accessory Dimensions Rod end nut Mounting nut d d C C B H B H Material: Carbon steel Material: Carbon steel Applicable bore size (mm) Part no.

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

CV/MVGQ

Bore size (mm) 40 50 63 80 100 Without rod boot With rod boot ZZ 201 208 217 245 253 W RS H A l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke h 59 66 66 80 81 f 11.2 11.2 11.2 12.5 14 e 43 52 52 65 65 ZZ 209 216 225 254 262 H 51 58 58 71 72 8 8 8 0 0 RZQ MI W S CEP1 Axial Foot Style: CVS1L CE1 Lube type (CVS1L), Non-lube type (CVS1LN) CE2 ML2B With rod boot Width across flats B1

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Note) Do not replace SV111 (G, H, L, M, W) to SV115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 27 Series SYJ5000 2 Position Single [ ]: AC G H Grommet (G), (H): SYJ5120-M5 With bracket SYJ5120-M5-F G H 37 30 3.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 2-3.5 (For mounting) 63.1 [65.3] 41 19.5 18 25 + 19.7 11 B A 5 35.1 [42.1] M5 x 0.8 (A, B port) 2-2.6

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Compact Manifold Regulator

H L L 11.5 8 3 5 L2 dimension DIN rail part no.