MK

149 H 4.9 Clamp part 600 418 300 182 R 6 Performance of non-rotating 0.7 to 1.4 32 16 CE1 800 557 400 243 H 8 Clamp (Retracted stroke end) 1050 731 525 319 R 10.5 40 16 CE2 1250 870 625 380 H 12.5 1648 1149 825 502 R 16.5 50 20 ML2B 1961 1365 980 596 H 19.6 2801 1950 1400 851 R 28 63 20 C J G5-S 3121 2172 1560 948 H 31.2 Note) Theoretical output (N) = Pressure (MPa) x Piston area (cm2) x

Electric Actuator / Slider Type 《 AC Servo Motor 》

When the positioning mode is set: The minimum unit of the travel distance of the actuator should be 1 [m]. 9 - LECSB LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter Para. No.

MQQ

Metal Seal Accessory Dimensions Rod end nut Mounting nut d d C C B H B H Material: Carbon steel Material: Carbon steel Applicable bore size (mm) Part no.

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

CV/MVGQ

Bore size (mm) 40 50 63 80 100 Without rod boot With rod boot ZZ 201 208 217 245 253 W RS H A l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke h 59 66 66 80 81 f 11.2 11.2 11.2 12.5 14 e 43 52 52 65 65 ZZ 209 216 225 254 262 H 51 58 58 71 72 8 8 8 0 0 RZQ MI W S CEP1 Axial Foot Style: CVS1L CE1 Lube type (CVS1L), Non-lube type (CVS1LN) CE2 ML2B With rod boot Width across flats B1

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Note) Do not replace SV111 (G, H, L, M, W) to SV115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 27 Series SYJ5000 2 Position Single [ ]: AC G H Grommet (G), (H): SYJ5120-M5 With bracket SYJ5120-M5-F G H 37 30 3.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 2-3.5 (For mounting) 63.1 [65.3] 41 19.5 18 25 + 19.7 11 B A 5 35.1 [42.1] M5 x 0.8 (A, B port) 2-2.6

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Compact Manifold Regulator

H L L 11.5 8 3 5 L2 dimension DIN rail part no.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Model b (h9) h (h9) l ***!

Table of Contents

Model b (h9) h (h9) l ***!

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Model b (h9) h (h9) l ***!

HRX-OM-X084

COMP.T H No.9 Display in the range of 0 to 1,000,000 screen Accumulated operation time of fan FAN.T H No.10 Display in the range of 0 to 1,000,000 screen Used time of dust filter 1 FLTR.T H No.11 Display in the range of 0 to 1,000,000 screen Used time of DI filter 2 DI.T H No.12 Display in the range of 0 to 1,000,000 screen Instantaneous power failureoccurrence count POW.F No.13 Display

HRX-OM-W002

COMP.T H No.9 Display in the range of 0 to 1,000,000 screen Accumulated operation time of fan FAN.T H No.10 Display in the range of 0 to 1,000,000 screen Used time of dust filter 1 FLTR.T H No.11 Display in the range of 0 to 1,000,000 screen Used time of DI filter 2 DI.T H No.12 Display in the range of 0 to 1,000,000 screen Instantaneous power failureoccurrence count POW.F No.13 Display

Series KP/KPQ/KPG

D2 A L2 D1 H Connection threads 10 For Drive System Air Piping Series KPQ/KPG Dimensions (mm) 1in = 25.4mm, 1g = 0.0353oz Male Run Tee: KPQY, KPGY (M5) (M5) 2-Applicable tubing Effective area mm D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection threads R Note1) Weight g L2 D2 M L1 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08

Series KP/KPQ/KPG

D2 A L2 D1 H Connection threads 10 For Drive System Air Piping Series KPQ/KPG Dimensions (mm) 1in = 25.4mm, 1g = 0.0353oz Male Run Tee: KPQY, KPGY (M5) (M5) 2-Applicable tubing Effective area mm D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection threads R Note1) Weight g L2 D2 M L1 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08

Low Friction Cylinders Series MQ

Series MQM Accessory Dimensions Mounting nut Rod end nut d d C C B H B H Material: Carbon steel Material: Carbon steel Part no.

21

Female thread MM Depth A1 AL A H ZZ + Stroke ZZ + Stroke ZZ + Stroke H Basic (B) Bore size (mm) NA 24 A 14.5 AL 12 B1 13 B2 26 D 8 I KA E 20 F 13 FL 10.5 G 6 H H1 5 H2 8 MM NN 0 0.033 0 0.033 0 0.033 0 0.039 20 25 32 40 Width across flats 6 length 3.5 31 27.9 M8 x 1.25 M20 x 1.5 Width across flats 8 length 3.5 30 17.5 15 17 32 10 26 13 10.5 6 34 6 8 33.4 M10 x 1.25 M26 x 1.5 Width across

MY1

39.5 45.5 53.5 67 83 106 129 TT h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 W 58 58 70 88 104 128 152 5.4 (Max.11) 5 (Max.11) 5 (Max.16.5) 8 (Max.20) 9 (Max.25) 13 (Max.33) 13 (Max.38) MY1C MY1H MY1 HT MY1 W MY1 W With low load shock absorber + Adjusting bolt MY2C MY1W Bore size Stroke L MY2 H/HT TT MY3A MY3B h h E F MY3M EA h EB W F Stroke adjustment

MXW Series Long Stroke Slide Table

socket hole 3 J 14 Scale: 30% 8 Width across flats 10 6-M5 x 0.8 thread depth 9 (Helisert) 6H9 +0.03 depth 5.5 0 7 74 36 59 34 33 125 33 Y Y 6H9 +0.03depth 5.5 0 L 10 20 20 K A 43 31 23 A Z N-M6 x 1 thread depth 12 (N-1) x H G NN-M6 x 1 thread depth 12 Bottom through hole 5.1 HH Bottom through hole 5.1 GG H 7 depth 5.5 6H9 +0.03 0 F E 6H9 +0.03depth 5.5 0 Model F E G HH J K L N NN Z GG H

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

SYJ3000 22--1 Note White White White Material Zinc die cast Resin Resin Resin 6 1 2 3 4 5 7 SY114-22 22 22 22 22 22 Valve Drawings Series SYJ3000 2 Position Single (mm) Grommet (G), (H) : SYJ3120G H -M3 With bracket 53.6(GZ:54.6)[54.6] 28.4 23.5 (Mounting holes) Manual override 33.5 22 3.2 13.2 7.1 16.4 2 10 A 8.2 4 11.5 7 15.7 21.8 (Mounting holes for manifold) 22.3 34.8 [41.3] G :