Process Pump

30 40 50 5 0 10 15 20 25 Discharge rate (L/min) Discharge rate (L/min) PAF3410 Air Consumption PAF5410 Air Consumption 200 SUP = 0.5 MPa 300 SUP = 0.5 MPa Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 0 10 15 20 25 5 0 20 30 40 50 10 0 Discharge rate (L/min) Discharge rate

5 Port Solenoid Valve, Series VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

3 Port Solenoid Valve Series SYJ300/500/700

Applicable tubing O.D.: 4, 5/32" 20 5 A A (Pitch) P=10.5 15.5 M5 x 0.8 (A port) L plug connector (L) M plug connector (M) M8 connector (W0) Approx. 300 (Lead wire length) 48.5 [55.5] 33.1 53 35.5 59.6 [66.6] Approx. 300 (Lead wire length) 62.8 [65] 53 [55.2] 61.9 54.5 48 Refer to the page 68 for dimensions with connector cable.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Solenoid Valve for Water and Air Dimensions (mm) 1in = 25.4mm VDW11 VDW21 22 20 Lead wire l approx. 300 Lead wire l approx. 300 21 27 20 27 Rectifying device AC type 20 27 Rectifying device 14 2 3.2 23.5 20 AC type 20.5 17 54 48 5 11 1 1 6 8 5 M5, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6

MHC2

MHZ MHC2/MHCA2/MHCM2 MHF MHL F MHR L MHK MHS F MHC MHC2-6D/MHCA2-6D MHC2-6S/MHCA2-6S MHCM2-7S MHT Pressure 0.6MPa 4 4 2 MHY Pressure 0.6MPa 0.5 Pressure 0.6MPa MHW Gripping force N Gripping force N Gripping force N 3 3 0.4 MRHQ 0.5 0.5 Misc. 2 2 1 0.3 0.4 0.4 D0.2 1 1 0.3 200 30 20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 12-8-11 12 Series MHC2/

MHC2

3 0.4 MRHQ 0.5 0.5 Misc. 1 2 2 0.3 0.4 0.4 D0.2 1 1 0.3 200 30 20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 12-8-11 12 Series MHC2/MHCA2/MHCM2 Confirmation of Inertial Moment of Attachment Step 2 Confirm the inertial moment of one of the two attachments.

VQ7-6/7-8

)(B port) 16(20)(A port) 16(20)(B port) 16(20)(A port) Manual override Manual override A B PB A B PB 62(72) 75(86) 62(72) 75(86) 38 50 B A 38 50 B A Cable with connector Cable with connector PA R1 R2 P PA R1 R2 P (L 500) 49(64) 49(64) Mounting hole 2-7.5 (L 500) 49 (64) 49(64) Mounting hole 2-7.5 Indicator light Indicator light 108.5(121.5) 108.5(121.5) 50(63) 5 3 38(53) 50(63) 32(42) 5

25

200 250 300 Installation distance (mm) 2) With high speed de-ionizing cartridge, With air purge 3) With energy saving type de-ionizing cartridge, With air purge Supply pressure: 0.1 MPa (8.6 L/min [ANR] per cartridge) Supply pressure: 0.1 MPa (4.3 L/min [ANR] per cartridge) 0 2 4 6 8 10 12 14 16 18 20 0 2 4 6 8 10 12 14 16 18 20 30 Hz Discharge time (s) Discharge time (s) 1 Hz 30 Hz 1 Hz

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Operating Fluid and Ambient Temperature Tightness of Valve (Leakage Rate) NBR, FKM, EPDM Seal material Leakage rate (With water pressure) 0.1 cm3/min or less Operating fluid temperature (C) Solenoid valve option (symbol) Ambient temperature (C) Power source Nil, G, L E, P 1 to 99 1 to 60 1 to 40 20 to 60 20 to 40 AC DC Note) With no freezing 3 4 Direct Operated 2 Port Solenoid Valve Series

Clamp Cylinder with Lock Series CLK1

Pin Dd9 2-3 L 4 4 D L Part no.

CXT

Dimension l from the guide shaft center to the top surface of the table is indicated below. 25 20 5.60 8.19 Ball bushing bearing 19.8 23.3 Slide bearing 32 30 10.1 14.8 Ball bushing bearing 37.3 46.2 12 16 20 25 32 40 Slide bearing 50 Bore size (mm) 40 21.3 27.5 l dimension Ball bushing bearing 19.5 24 28 31 39.5 47.5 Allowable Load Only by Adjusting Bolt If only the adjusting bolt is used

T

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

CRQ2

DRotation starting point End of rotation 20e R g 10 ot 10 n at ra L io B Rotation starting point End of rotation n n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 R A e R A o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Lmax Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 15 18 24 27 31.5 The figure shows the view

SFOD-OMT0009CN

B3 A3 (d) (5.7) 15 16 83 L (11) (30.7) No.SFOD-OMT0009CN-B 10.7 I/O J X C C 2 * L 1 1.5m 40 AWG AWG28 3 3m 5 5m PLC (7.5) R1.25-4(M4 ) 40 20 39 . . . 2 21 1 L PLC 1.27mm No.

Ejector Valve Unit Series ZYY/ZYX 1

(l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 80 80 80 80 Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure Vacuum pressure 60 60 60 60 60 60 Air consumption Air consumption 40 40 40 40 40 40 Suction flow rate Suction flow rate 20 20 20 20 20 20 0 0 0.1 0.2 0.3

CXT

of the L dimension.

MXS Series Air Slide Table

30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5 83.5 99.5 M 42 52 62 84 100 ZZ 48 58 68 90 106 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 67 MXSIL Series Air Slide Table (Symmetric type) Dimensions MXS 8 L /Symmetric type ZZ Z 0.5 22 24 Basic type 6 M +

PFxx-OMO0007CN

min 22 (OUT1) [o10] (OUT2) [o20] (OUT1) [1_n] 22 (OUT2) [2_n] [Anr] -21No.PF-OMO0007CN <> 2 [d_1] [d_2] SI [U_1] L/min L [U_2] CFM10 -2CFM10 -1 ft 310 -1 [U_2]24 (OUT1) 20) [o10] [o11] [o12] (OUT2) 20) [o20] [o21] [o22] () -22No.PF-OMO0007CN (OUT1) 20) [1_n] [1_P] (OUT2) 20) [2_n] [2_P] [Anr] 20 1 atm()65R.H.

E-P HYREG

0.1 0.1 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 2 2 2 VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700/1701 VY1900/1901 Command

Air Cylinder Series MB

(mm) Stroke range Z ZZ CDH10 CX +0.3 +0.1 CZ CDH10 L RR U 32 40 50 63 80 100 14 14 20 20 30 30 10 10 14 14 22 22 28 28 40 40 60 60 125 50 28 30 25 32 267 295 64 to 500 to 500 to 600 to 600 to 800 to 800 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 154 158 182 182 228 228 164.5 169 197 197 251 251 U CX to 1000 L CZ Z + Stroke RR Without air cushion Center trunnion Model without